VQZ1000/2000/3000

(R2), 4(A), 5(R1) port M5 x 0.8 external pilot port (Only external pilot type (R)) 2.1 28 3 4 5 3 4 5 DIN terminal (Y): VQZ2 50 1(R)-Y-01 02 L plug connector (L): VQZ2 50 1(R)-L-01 02 Indicator light 300 149.5 (Lead wire length) 68 Pg.7 Applicable cable O.D. 3.5 to 7 51.5 <56.5> 155.5 Max. 10 71.5 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 82.5 75 0 1 3 4 5 01 02 M

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

O.D. mm Connection threads R Note 1) Weight g D2 M L2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

KR

(mm) Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40/41 Type How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714-l SYJ714M-l SYJ724-l SYJ724M-l R Port Rc (PT)1/8 R Port Rc (PT)1/4 Valve model P Port Rc (PT)1/8 01 Rc (PT)1/8 A port side P Port Rc (PT)1/4 Stations 40 Type 40 Applicable blank plate ass'y SYJ700-10-2A 2 stations 02 41 Type 41 .. ..

HRX-OM-S010

wiring communication . 3-1 3.2 Communication specification . 3-1 3.3 Connected explanation . 3-2 Chapter 4 MODBUS communication function . 4-1 4.1 Precautions for communication . 4-1 4.1.1 Precautions after wiring and before communication . 4-1 4.1.2 Precautions for communicating . 4-2 4.2 Communication specification . 4-2 4.3 Setting and checking . 4-3 4.3.1 Setting and checking items .

HRX-OM-Q033

. 3-1 3.2 Communication specification . 3-1 3.3 Connected explanation . 3-2 Chapter 4 MODBUS communication function . 4-1 4.1 Precautions for communication . 4-1 4.1.1 Precautions after wiring and before communication . 4-1 4.1.2 Precautions for communicating . 4-2 4.2 Communication specification . 4-2 4.3 Setting and checking . 4-3 4.3.1 Setting and checking items . 4-3 4.3.2 Setting and

Rubber seal 5 Port Solenoid Valve Series SYJ7000

0.28 0.30 0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-

HRX-OM-T004

. 3-1 3.2 Communication specification . 3-1 3.3 Connected explanation . 3-2 Chapter 4 MODBUS communication function . 4-1 4.1 Precautions for communication . 4-1 4.1.1 Precautions after wiring and before communication . 4-1 4.1.2 Precautions for communicating . 4-2 4.2 Communication specification . 4-2 4.3 Setting and checking . 4-3 4.3.1 Setting and checking items . 4-3 4.3.2 Setting and

HRX-OM-R028

specification.3-1 3.3 Connected explanation .3-2 Chapter 4 MODBUS communication function. 4-1 4.1 Precautions for communication .4-1 4.1.1 Precautions after wiring and before communication . 4-1 4.1.2 Precautions for communicating . 4-2 4.2 Communication specification.4-2 4.3 Setting and checking.4-3 4.3.1 Setting and checking items. 4-3 4.3.2 Setting and checking . 4-4 4.4 Communication

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

HRX-OM-M091

. 3-1 3.2 Communication specification . 3-1 3.3 Connected explanation . 3-2 Chapter 4 MODBUS communication function . 4-1 4.1 Precautions for communication . 4-1 4.1.1 Precautions after wiring and before communication . 4-1 4.1.2 Precautions for communicating . 4-2 4.2 Communication specification . 4-2 4.3 Setting and checking . 4-3 4.3.1 Setting and checking items . 4-3 4.3.2 Setting and

VM

. 18mm2(1.0) 300 c.p.m or less Lubrication Not required/Turbine oil #1 (ISO VG32) Main valve Rc(PT) (8A) 1 4 Piping possible to any EXH port.

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

smcmaintenancepartslist

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

VZ5000

-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1/4 1/4 1/4 VZ52 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold Instruct by specifying

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.