MGP

X 0.02 X 0.02 X 0.02 R 11 15 VB VA H DA U PW X X T DB End lock mechanism non-locking type manual release GA PB DL XAH7 depth 6 XAH7 depth 6 WB Q GB 37.5 + Stroke C + Stroke WA 17 J K S 2-Rc 1/8 (plug) 6 XAH7 depth 6 10 HR G E B + Stroke A + Stroke 2-Rc 1/8 With front lock XB XAH7 15 8.4 5.4 HN d e 4.5 3 6 XAH7 24 End lock mechanism (Locking type manual release) T-slot dimensions 24 (mm) Section

Vacuum Module Series ZX

VJ10-20-4A-6 2 pcs. ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Air Fittings & Tubing

E B C D A 7 8 2.1 5.5 7.1 7.7 6.5 8.5 19.5 20.5 8.5 9.5 1.8 3 M-01H-4 M-01H-6 SM3A, #12/#13 2.1-49 Miniature Fittings Series M Series M5 Barb fitting for nylon tube: M-5AN-4, -6 Weight (g) 1.6 1.7 Effective area (mm2) 2.1 4.0 Part No. C B A 1.8 2.5 5 8 12 14 M-5AN-4 M-5AN-6 SM5B, #1/#2 Barb fitting for soft tube: M-5AU-3, -4, -6 Part No.

Thermo-chiller

6 !2 x 4 !3 w Parts List (170) No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7 7.5 8 O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 UB 6 7.5 10 9 12 VA VB 3 4 4 5 6 WA WB 2 2 2 2.5 3 XA XB 3 4 4 5 6 Model MHS3-32D MHS3-40D MHS3

Table of Contents

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

C95

(Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 35 + 30 (n 2) 35 + 30 (n 2) n (Different sides) n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2 15 15 Z7 15 + 40 (n 2)/2 15 + 40 (n 2)/2 n Z80 n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2 Y59 15 15 Y7P 15 + 40 (n 2)/2 15 + 40 (n 2)/2 n Y7W Y69 n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2 10 10 Y7PV 10 + 30 (n 2)/2 10 + 30 (n 2)/2 n Y7WV n = 2, 4, 6, 8 n = 2, 4, 6, 8 1, 2

Valve Single Unit

30 or less 2 position double 50 or less 56 or less 3 position 31 or less 1-6-13 Body Ported Series SX3000/5000/7000 Model/Series SX7000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Weight (g) Valve model Type of actuation L plug connector M plug connector 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Grommet C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Single Double Closed center 108

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Cable colour Terminal No. 8 8m* Vcc B-1 Brown 12 GND A-1 Black 13 A 10m* A B-2 Red 7 A A-2 Black 6 B 15m* B B-3 Orange 9 C 20m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 * Produced upon receipt SD-(TX) A-4 Black 10 of order Black 3 Actuator side Controller side (14.2) (c) (b) (10.2) (5.5 (6.7 (12.7) 6 2 1 (a) (14 (18) A B 5 6 (13.5) 1 3 1 4 2 1 (30.7) (14.7) 15 16 (d) L (10) (11) 10 - [2] Actuator

VQ5000

B 2 A 4 6 B 2 A 4 SMC SMC SMC SMC SMC 5 Cable length B 2 A 4 4 L2 L1 B 2 A 4 3 B 2 A 4 2 P=41 34.5 48 P=41 B 2 A 4 1 58.5 68.5 X 12 Stations D side 42 16 15.5 22 107.8 51 179 117 69 Electrical entry on D side (LD) 2-1/8 (external pilot port) Dimensions Formulas: L1 = 41n + 76, L2 = 41n + 96 L n 9 445 465 8 404 424 L1 L2 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 1 117 137

Cylinder with Lock

2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4, 6, 8)1 105 + 100 (n 2) (n = 2, 4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface) n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 D-A44 n

Pilot Operated

terminal: T J I Cable 6 to 12 J 19.5 H 32 19.5 (7.5) (1.6) (5.5) (A) 25 (7.5) (1.6) (5.5) 44 31.5 G 1/2 G H E OUT IN G (A) E OUT IN Bracket (67) (56) 50 C B (28) F 40 G 1/2 Bracket B C (28) 50 (56) (67) 40 F I 2 x Rc 1/4, 3/8, 1/2 2 x Rc 1/4, 3/8, 1/2 VXD2130-04 2-M5 x 8 18 (mm) Grommet Electrical entry (DC, AC/Class H coil) Model Port size P A B C D E F G H 32 34 62 64 Conduit H 54.5 56.5

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

10

1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 125

VCC

mounting Resin manifold block 50 212 VNA 120 2 port 6 valves Weight: 2700 g 3 port 6 valves VNB Fitting 19 pcs.

0.4

Note 1) Metal seal only Note 2) When -COM. is specified for the SI unit, select and mount the valve of negative common. Note 3) Dual 3-port is not applicable. N.O. N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.

Modular F.R.L. Unit

AC60B to W Z C D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

HRX-OM-I051

WRN Continued Reset the setting temperature. 6.2 Troubleshooting HRZ Series 6-2 HRX-OM-I051 Chapter 6 Error Message and Troubleshooting Table 6-1 Troubleshooting (2/2) Code Error message System condition Cause Remedies Check that the external valve is opened.

Modular F.R.L. Units

F G H SUP. 3 1 2 q Body size Description Symbol C D E 20 30 40 Key can be mounted when residual pressure is released.