Modular F.R.L. Pressure Control Equipment

A C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C AD27-C Polycarbonate C2SF-J

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

JXCx-OMU0026

JXC-OMU0026 12.5 Actuator cable [For sensor/ with lock (5m or less)] (a) (b) L E C P B Signal name Terminal Cable color Terminal number number Brown 2 A B-1 Red 1 A-1 Cable length [L] Orange 6 B B-2 Yellow 5 B A-2 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 (c) 5 5m Shield Cable color Terminal number Brown 12 Vcc B-4 Black 13 GND A-4 Red 7 A B-5 Cable type Black 6 A A-5 Orange 9 B

Standard Combinations

OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size

SYJ300/500/700

Made to Order Made to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-4 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm2) M8 connector L/M plug connector Grommet

Air Combination

Note 2) : For NPT thread type only. Note 3) : Select with an option E1, E2, E3 or E4. -18- 4-4. AC20C-D to AC40C-D 30 03 DE AC C D Symbol Description Body size 20 30 40 Rc Nil Thread type NPT N G F 1/8 1/4 3/8 Port size 01 02 03 3/4 1/2 04 06 Nil Without auto drain a Float type auto drain C N.C. (Normally closed) Drain port is closed when pressure is not supplied. D N.O.

HRL

system Pump capacity Particle filter nominal filtration rating (Accessory) [m] 5 Circulating fluid outlet, circulating fluid return port CH1: Rc1 (Symbol F: G1, Symbol N: NPT1) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Tank drain port CH1: Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Fluid contact material (Metal/Resin) CH1: Stainless steel,

C76

2 !3 !4 !5 !6 !7 !

C76

2 !3 !4 !5 !6 !7 !

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

REA/REB

4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No.

Vacuum gripper

TQ1230001-OM104-C 4. Mounting 4.1. Mounting Mounting procedure 1) Confirm the gasket seal on the adapter, then mount 4 cups with adapter to the vacuum gripper.

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

SZ3000

B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X,PE ports) Applicable tube O.D.: 6 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) Connector case attachment lever (both sides) 7.6 (3.2) 101.2 Horizontal connector

Pin Clamp Cylinders

side 30 7.5 10.5 CKQ 2 x 6H7 Depth 10 D Clamp arm 4 x M8 x 1.25 Depth 12 Port side C A 2 x Rc1/8 B 45 49.5 Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6 156 15.7 157 15.8 158 15.9 159 16.0 160 7.5 075 7.6 076 7.7 077 7.8

Thermo-chiller

Circulating uid outlet, Circulating uid return port Rc3/4 NPT3/4 or G3/4 Overow port Rc1 NPT1 or G1 Automatic uid ll port Rc1/2 NPT1/2 or G1/2 Facility water inlet, Facility water outlet Rc3/4 NPT3/4 or G3/4 (for HRS-EP029 or HRS-EP030) (It is not necessary to purchase this when pipe thread type F or N is selected in How to Order since it is included in the product.) Part no.

HRX-OM-X037

HRL Series 3.3 Installation 3-41 HRX-OM-X037 Chapter 3 Transport and Setting Up Recommended piping circuit User's equipment Thermo-chiller 1 2 2 Circulating fluid outlet for CH2 Optical 2 2 systems Circulating fluid return port CH2 1 4 4 Circulating fluid outlet CH1 for Laser 4 4 source Circulating fluid return port CH1 3 For water-cooled type 5 4 6 Facility water inlet Facility 4 5 water

Modular Type Filter Regulator Series AW

8 C J N R W Z AW10 AW30 to 40 B C D E G H 1 2 6 8 C J N R W Z Accessories Optional specifications 56 AW10 to 40 Standard specifications AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 Air 1.5MPa 1.0MPa 0.05 to 0.85MPa AW40 1/4, 3/8, 1/2 AW40-06 3/4 Model Port sizes Fluid Proof pressure Maximum operating pressure Set pressure range Pressure gauge port size Note 1) 0.05 to 0.7MPa Rc 1/16 Note 2)

90

PS and PD port dimensions 1,4 Common supply (PV) port 1 Metric size: 2 x 8 D Inch size: 2 x 5/16" 2 x Common supply (PD) port 4 62 53 37.4 C 38 8.4 B 26.4 2 x Common exhaust (EXH) port 2 3.5 n x Individual exhaust (EXH) port 3 10.5 n x Vacuum (V) port (Built-in suction filter) (n1) x 15 15 33 (mm) Number of stations Hexagon width across flats B A D C Port type 1 2 3 4 5 6 7 8 9 10 06 08