7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

VQ5000

How to order manifolds U side VV5Q 5 5 08 03 C 5 W n Base mounted Plug-in Kit designation 1 2 4 3 1. Stations 5.

Electric Actuator / Guide rod Slider

400 400 Overhang direction:L5[mm] 300 m 300 600mm stroke or less L5 200 200 100 100 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L6[mm] Overhang direction:L6[mm] 600mm stroke L6 m 200 200 500mm or less 600mm stroke or less 150 150 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] -10- 2.2 How to Order LEL 25 T 300 S 1 6N 1 Size

Digital Flow Switch (Integrated display type)

There may be an error in the output voltage depending on this output impedance and the input impedance of customers' equipment. (example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

DOC1023126

Example 1 When installing an air cylinder with an auto switch (ex. CDQ2 series) side by side, maintain 40 mm minimum around the motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area.

One-touch Fittings

/16 KQ2P-05 6.8 34 20.7 1 1/4 KQ2P-07 8.5 35 21.7 1 5/16 KQ2P-09 10 39 24.8 2 3/8 KQ2P-11 11.5 43 27.4 3.5 1/2 KQ2P-13 15 45.5 28.5 5 D d Applicable fitting size d *1 D is maximum diameter.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

1 u t !5 CLK2 !0 o q i @2 @9 #1 @4 @5 #1 @6 #0 @1 @8 !3 @3 @7 !9 @0 !2 !7 !8 t !7 !6 y Enlarged drawing of shim part !

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

High Vacuum Angle Valve, XL Series

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

CL

4 3/8 3/8 1/2 1/2 11 10 13 15 15 153 168 182 208 226 16 19 23 28 36 6 7 7 11 11 42 46 48.5 55 56.5 45 50 60 70 80 30 35 40 48 58 20 21 23 23 25 71 80 99 117 131 10 12 16 20 25 8 0 0 0 0 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke CLAC40SCLA40, #5 (#1+#5+#11) CLAC50SCLA50, #5 (#1+#5+#11) CLAC63SCLA63, #5 (#1+#5+#11) CLAC80SCLA80, #5 (#1+#5+#11) CLAC100SCLA100, #5 (#1+#5+#11) 3.1

PFxx-OMY0005

Bit offset Item Notes 0 Accumulated flow SW1 0: OFF 1: ON 1 Accumulated flow SW2 0: OFF 1: ON 2 Flow rate SW1 0: OFF 1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis

HEC_001W-E

3 5 SPECIFICATIONS -5-1 5.1 SPECIFICATIONS OF HEC001 -5-1 TABLE5-1 SPECIFICATIONS OF HEC001 -5-1 5.2 SPECIFICATIONS OF HEC003 -5-2 TABLE5-2 SPECIFICATIONS OF HEC003 -5-2 5.3 PERFORMANCE CHART -5-3 5.3.1 PERFORMANCE OF HEC001 -5-3 1) COOLING CAPACITY -5-3 2) HEATING CAPACITY -5-4 3) PRESSURE LOSS OF RADIATING WATER -5-5 5.3.2 PERFORMANCE OF HEC003 -5-6 1) COOLING CAPACITY -5-6 2) HEATING CAPACITY

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 2 DI1 CN1-23 DI2 DI1 DI0 Program method DI-1 0 0 0 Program No. 1 0 0 1 Program No. 2 0 1 0 Program No. 3 0 1 1 Program No. 4 1 0 0 Program No. 5 Point table No.

AC Servo Motor Driver (SSCNET /H Type)

Select 'MR-J4-B' through Model" "New" and "Project". -5- 1.

Hydraulic Filters

0.05 5 4 4 4 0.4 0.3 Precautions 1.

MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Secondary Batteries

connector 4 Cable length (mm) 300 500 1000 2000 5000 Symbol W1 W2 W3 W4 W7 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

NCA1

G Across flat A A 1/16 Radial float H 1 Spherical motion E D B C E Dimensions H 1 1/2 2 1/4 2 1/4 Part No. NCA1-AC325 NCA1-AC800 NCA1-AC1000 A 3/4-16 1-14 1 1/4-12 B 1 3/4 2 1/2 2 1/2 C 2 5/16 2 15/16 2 15/16 D 5/16 1/2 1/2 E 1 1/8 1 5/8 1 5/8 F 31/32 1 3/8 1 3/8 G 7/8 1 1/4 1 1/4 Pivot Pins CP DD CL CD CL CD Dimensions Dimensions CL 2 5/8 3 1/8 4 1/8 CP 2.72 3.22 4.25 Part No.

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series