Fluoropolymer Piping Equipment

B E E F G H L1 L1 L2 L2 M Min. port size M F LQ3T21-SB 6 4 17 16 6 12 16 34.5 33.5 39.5 38.5 20 3.9 LQ3T31-SB 10 5 22.5 19.5 9 18 21 47.5 44.5 52.5 49.5 25 7.5 LQ3T32-SB 8 49.5 46.5 6.3 LQ3T41-SB 12 6 24 22 10 20 24 52.5 50.5 54.5 52.5 29 9.5 LQ3T51-SB 19 7 26.5 24 14 28 32 64 61.5 66 63.5 37 15.8 LQ3T61-SB 25 8 30 26 18 36 41 78 74 80 76 49 22 1/4 (E, E) G (E, E) H L1, L1 L1, L1 (E,E): Reference

Series VQ Base Mounted Metal Seal/Rubber Seal

Item Specifications 24V DC, +10%, 5% External power supply Current consumption (Internal unit) SA, SB, SD, SE, SF, SG, SJ, SK, SQ, SR: 0.1A SC: 0.3A How to Order Manifold VV5Q 08 C6 12 D XP A S Dust proof styel (-XP)(VQ1000 only) Suffix -XP for the dust proof SI unit. (Except for SE, SG and SQ.)

Hygienic Design Cylinder Series HY

(mm) Bore size A1 82 85 MM M6 x 1.0 M8 x 1.25 20 25 B1 10 13 C1 10 12 H1 3.6 5 K 5 5 KA 6 8 L1 22 24 X 12 14 (mm) Bore size A 70 71 H M4 x 0.7 M5 x 0.8 20 25 B 60 61 C 8 10 D 8 10 E 33 40 F 6 6 I 42 50 K 5 5 KA 6 8 L 10 10 M 22 26 N 4.4 5.4 OA M5 x 0.8 M6 x 1.0 Q 14 14 R 10 10 SA 6.5 6.5 SB 10.5 11 Stroke range 50 or less 50 or less Note 1) The [ ] value denotes dimensions with the auto

Electric Actuators

distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 50 50 2.1 2.1 1.1 1.1 0.3 0.3 0.1 0.1 100 100 1.2 1.1 0.7 0.6 0.3 0.2 0.1 0.1 Refer to page 302 for acceleration time. 215 Direct Acting Guide 5 Phase Stepper Motor Low Profile Slide Table Type Slide Screw Series LXF Without Motor Brake 8mm/12mm lead How to Order 1 S F9N Stroke LXFH5 SB

LX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LXF Without Motor Brake 8mm/12mm lead How to Order 1 S F9N Stroke LXFH5 SB Auto switch types Wiring/Output type Lead wire length (m) Contact Symbol Model Without auto switch Nil F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL Home position switch

LX

mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 50 50 2.1 2.1 1.1 1.1 0.3 0.3 0.1 0.1 100 100 1.1 1.2 0.6 0.7 0.2 0.3 0.1 0.1 Refer to page 302 for acceleration time. 215 Direct Acting Guide 5 Phase Stepper Motor Low Profile Slide Table Type Slide Screw Series LXF Without Motor Brake 8mm/12mm lead How to Order LXFH5 SB

VQ5000

Special wiring specifications (except double wiring) Name plate (available only for T kit) N SB Note 3) L Direct exhaust with silencer box: D and U side exhausts 1 to 12 2.

Plug-in/Plug Lead: Single Unit

Porting specifications Applicable stations Series 4(A), 2(B) port location Port size 1(P), 5(R1), 3(R2) 4(A), 2(B) Side Rc 3/4 Rc 3/8 Rc 1/2 Rc 1/2 VQ5000 Max. 9 stations Bottom Type SA With general type SI unit (Series EX300) Type SB Mitsubishi Electric Corporation MELSECNET/MINI-S3 Data Link System Name of terminal block (LED) Note STATION NO. ADDRESS NO.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Low Profile Slide Table Type Slide Screw Series LXF Without Motor Brake 8mm/12mm lead How to Order Auto switch types 1 S F9N Stroke LXFH5 SB Wiring/Output type Lead wire length (m) Contact Symbol Model Without auto switch Nil F9N F9P F9G F9H F9GL F9HL

VQ5000

Porting specifications Applicable stations Series 4(A), 2(B) port location Port size 1(P), 5(R1), 3(R2) 4(A), 2(B) Side Rc 3/4 Rc 3/8 Rc 1/2 Rc 1/2 VQ5000 Max. 9 stations Bottom Type SA With general type SI unit (Series EX300) Type SB Mitsubishi Electric Corporation MELSECNET/MINI-S3 Data Link System Name of terminal block (LED) Note STATION NO. ADDRESS NO.

A

/4 1 3/8 325 (3.25) 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 1 3/8 400 (4) 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 D I M E N S I O N S S I D E L U G M O U N T I N G T Y P E NC A1S E BORE (INCH) KK A B C DD EA G SS ST MM D EE J SB

CATALOG

/4 1 3/8 325 (3.25) 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 1 3/8 400 (4) 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 D I M E N S I O N S S I D E L U G M O U N T I N G T Y P E NC A1S E BORE (INCH) KK A B C DD EA G SS ST MM D EE J SB

Series VQ Metal Seal/Rubber Seal Body Ported

Manifold Specifications Series Porting specifications Applicable stations Port location Port size P, R A, B C3, C4, M5 C3, C4, C6, M5 C4, C6, C8 C6 C6 C10 VQ0 VQ1000 VQ2000 Side Side Side Max. 16 Max. 16 Max. 16 SA applicable to Series EX300 SB applicable to MELSECNET/MINIS3 Data Link (Mitsubishi Electric.) STATION NO. ADDRESS NO.

VQ7-6/7-8

U side n Silencer box Air release valve coil rating 5 Without With None 100VAC 50Hz/60Hz 200VAC 50Hz/60Hz 24VDC 12VDC Other Nil SB Nil 1 2 3 4 9 4 3 2 1 R side L side 2.

Vacuum

Flat wlth rib Deep type Deep type uimensions I lPfi $mie WfiBulle Pad Diameters a6 . sB Pad Diameters s20. s25. a32 Bellows type itp!199!!9 tuE!!.

Vacuum

Flat wlth rib Deep type Deep type uimensions I lPfi $mie WfiBull Pad Diameters a6 . sB Pad Diameters s20. s25. a32 Bellows type itp!199!!9 tuE!!.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

For model no., refer to Option on page 2-4-93. 2-4-85 VQ1000 Kit (Serial transmission unit) S Dust-protected type SI unit 43.5 (M plug connector AC, Latching) 2-C6 P (SUP port) The DWG shows a SB type.

LEC-OM07605CN

IP65 2510m LE-T10) LE-CSM-RB IP65 2510m 11) LE-CSB-SA IP65 2510m LE-T12) LE-CSB-RA IP65 2510m 13) LE-CSB-SB IP65 2510m LE-T14) LE-CSB-RB IP65 2510m 15) LE-CSE-SA IP65 2510m LE-T16) LE-CSE-RA IP65 2510m 17) LE-CSE-SB IP65 2510m LE-T18) LE-CSE-RB IP65 2510m 11 5 11. 11.1.2 STO CN8 LEC-MR-D05UDL3M 3m CN8 (1) LEC-MR-D05UDL3M MR-D05UDL3M-B CN8 (2) CN8

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

cleaner for Rc1: U side exhaust Exhaust cleaner for Rc1 1/2: U side exhaust Special wiring specifications (other than double wiring) Name plate (T kit only) Direct exhaust with silencer box: Both D and U side exhausts Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure (except F and T1 kits) Symbol Series Nil CD1 CD2 CU1 CU2 K N SB

Rotary Actuator

AU MU CRQ2 MSQ MSZ B CRQ2X MSQX SOL.1 Rc1/4 (Port size) (Opposite side) D (g6) DD (h9) MRQ W K b SC F H l U VJ 35 44.5 SE SD BA 37 76 107 S VL SB 49 (Max.) BA VH VK A C Drawing shows the appearance for rotation of 90 and 100. * ( ) are the dimensions for rotation of 180 and 190. Drawing shows that SOL.1 is in the de-energized state.