AC Servo Motor Driver (Network card type ）

(P980) . 20-19 20.4.4 Identification & Maintenance (I&M) . 20-20 20.4.5 Reset To Factory . 20-21 20.5 STATE TRANSITION . 20-22 20.5.1 Basic State Machine . 20-22 20.5.2 FSA state . 20-25 20.5.3 Controlword/Statusword . 20-27 20.5.3.1 Controlword . 20-27 20.5.3.2 Statusword . 20-30 20.6 CONTROL MODE . 20-36 20.6.1 Selection of control mode . 20-36 20.6.2 Control switching . 20-37 20.6.3 Profile

Table of Contents

Accessory 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69 70 75 76 77 82 83 84 Nil A Without pressure gauge With pressure gauge Note) Pressure gauges are not available with the copperfree specification. 6.

JXCx-OMT0023

50 20 50 7 20 8.

AC Servo Motor Driver

50 20 50 8 16 8.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

Vacuum Module Series ZX

VJ10-20-4A-6 2 pcs. ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

ZX

1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

13

Box type (Built-in silencer) B S 07 ZH 06 06 Body ported type (Without silencer) D S 07 ZH 01 01 01 EXH. port size Note) Nozzle diameter Symbol Size Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in Screw-in Screw-in 05 07 0.5 mm 0.7 mm 06 08 10 12 16 01 02 03 04 6 8 10 12 16 Rc 1 8 Rc 1 4 Rc 3 8 Rc 1 2 10 1.0 mm 13 1.3 mm 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

30

(inch) a b Note 2) Effective area (mm2) W Note 1) D W Weight (g) L1 O L2 P M1 M2 N Model P KQB2U01-03 KQB2U03-07 KQB2U07-09 KQB2U09-11 KQB2U11-13 5.6 5.6 8 8 8 3.2 3.2 4.2 4.2 4.2 3.2 4.2 13.4 25.6 40 8.5 11.8 20 31 45 9.1 11.7 13.7 16 19.6 27 28.8 33.8 38.3 40.5 10.8 11.4 12 13.8 13.7 8.1 9.1 12.2 14.6 17.2 16.4 18.2 23.9 28.3 33.2 12 12.6 13.5 16.1 16.6 12.6 13.5 16.1 16.6 18.5 1/8" 5/32

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

17 (17.5) AS221F-02-08 AS221F-02-07 8 1/4" 36.4 27.2 15.2 18.5 25.2 18.5 34.5 34.9 34.4 29.4 39.9 34 34 13.2 18.5 (17.5) AS221F-02-10 AS221F-02-09 10 5/16" 18.3 44.5 35.3 18.5 21 27.2 21 36.4 18.2 36 36 15.2 1/4 1/4 AS321F-02-06 AS221F-02-11 6 3/8" 12.8 17 35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

Air Suction Filter With One-touch Fittings Series ZFB 1

Metric size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 16 1 4 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 20 22 20 22 30 30 75 40 100 62 1 4 Metric size(2) 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZS-20-5A-50 . 1 pc.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.