Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 12.5 PSIG / 121 in H20 / 300 mbar , 12.5 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

Thomas Oil-less Articulating Piston Compressor Voltage (60 Hz): 115V, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 8 in / 203 mm Width: 4.75 in / 121 mm Height: 6.75 in / 172 mm , Length: 8 in / 203 mm, Width: 4.75 in / 121 mm, Height: 6.75 in / 172 mm, Net Weight: 9.3 lbs. / 4.22 Kg Internal Code: G3300963 Billing Code: 4Z791

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 115/60/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 12.5 PSIG / 121 in H20 / 300 mbar , 12.5 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

/ 200 mm, Width: 4.75 in / 121 mm, Height: 5.89 in / 150 mm, Net Weight: 6.5 lbs. / 2.9 Kg Internal Code: G0279623 Billing Code: 4XL33 Series Configured Datasheet.

Thomas oil-less linear diaphragm compressor / vacuum pump, 230/50/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 4.35 PSIG / 121 in H20 / 300 mbar , 4.35 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.2 0.3 40 34 29 11 23 17 57 OUT 6 3 29 25 21 8 17 13 42 IN 71 61 51 20 40 30 OUT 101 8 4 53 45 38 30 15 23 IN 75 158 136 113 90 45 68 OUT 226 12 6 119 102 85 68 34 51 IN 170 281 241 201 161 80 121 OUT 402 16 8 211 181 151 121 60 91 IN 302 440 377 314 251 126 188 OUT 628 20 10 330

ALF400 to 900, ALT-5/-9

121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 14-13-9 Oil Distributor VA, VB/Nylon Tubing Related Products: Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tubing O.D.

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

161 201 241 281 IN 302 60 90 121 151 181 211 25 (20 x 2) 10 OUT 628 126 188 251 314 377 440 IN 471 94 141 188 236 283 330 32 (25 x 2) 12 OUT 982 196 295 393 491 589 687 IN 756 151 227 302 378 453 529 40 (32 x 2) 16 OUT 1608 322 483 643 804 965 1126 IN 1206 241 362 483 603 724 844 50 (40 x 2) 18 OUT 2513 503 754 1005 1257 1508 1759 IN 2004 401 601 802 1002 1203 1403 63 (45 x 2) 20 OUT 3181

Plate Cylinder

148 FZ 24 28 32 39 50 ZZ 104 111 124 149 155 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Flange bracket material: Carbon steel Surface treatment: Nickel plated Single clevis Double clevis Single clevis Double clevis CDH10 L Spring return Z + Stroke Spring extend Z + 2 x Stroke RR (mm) CZ 18 22 26 32 32 L 17 22 27 32 38 RR 8 10 10 14 16 Z 113 125 142 169 179 ZZ 121

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

) 40.7 (181) 54.2 (241) 67.9 (302) 81.4 (362) 94.9 (422) C(L)KQG32 13.5 to 20.0 27.2 (121) 40.7 (181) 54.2 (241) 67.9 (302) 81.4 (362) 94.9 (422) 108.6 (483) 122.1 (543) 135.6 (603) Note 1) It takes approximately 0.3 seconds for the cylinder to operate to generate clamping force from an unclamping state (when no speed controller is installed).

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

1085 378 1621 603 2533 942 3848 1473 5945 2313 9715 3770 20 x 25 20 25 x 30 25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 47 71 94 118 141 165 189 212 236 217 326 434 543 651 760 868 977 1085 MGZ25 12 76 113 151 189 227 265 302 340 378 324 486 648 811 973 1135 1297 1459 1621 MGZ32 16 121

Applicable Auto Switch Model

H HW C 44 52 64 78 92 H' T T' Z Actuator series 50 63 80 100 D-A3lC-4, D-A44C-4 D-A3lC-5, D-A44C-5 D-A3lC-6, D-A44C-6 D-A3lC-8, D-A44C-8 D-A3lC-10, D-A44C-10 58(67.5) 50.5(60) CDA1, CDBA1, CDV3, CDVS, CDLA, CDL1, CNA 69 77 91 107 121 6.5 6.5 7.5 9.5 9.5 40 50 63 80 100 7.5 8.5 10.5 12.5 15.5 M5 X 0.8 X 16 9 10 11 11 11 59(68.5) 51.5(61) 61.5(71) 53(62.5) M5 X 0.8 X 20 65(74.5) 54.5(64) Note

ALF400 to 900, ALT-5/-9

121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 14-13-9 5 Oil Distributor VA, VB/Nylon Tubing Related Products: Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tubing O.D.

Table of Contents

Series ARP3000 Direct Operated Precision Regulator Modular Style Specifications 111 111 111 112 112 112 112 113 113 114 114 114 115 115 117 118 119 119 119 120 121 122 122 122 123 123 124 126 127 133 133 134 134 136 137 142 142 142 146 146 148 149 150 155 155 155 156 156 157 158 158 158 159 160 161 162 162 162 163 163 163 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

V

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 6.8 VACUUM VACUUM SWITCH SERIES ZS VACUUM SWITCH SERIES ZSM1 DIAPHRAGM TYPE 100 ms Response Time Compact Size T E C H N I C A L SPECIFICATIONS ZSM1 (VA C U U M E J E C T O R T Y P E) Model ZSM1-115 ZSM1-121 Electrical switch type Solid state NPN Contact (reed switch) Fluid Air, Inert

Air Pilot Operated

Parl No. naq. 1A MB aO20.03 tg Ba &2041 1C MB 4@1-03 lD MB12-O3 121 Manlfold Block #.{1 Mrnlfold Slock *23 Manlfold Block ,28 Manltold Block l{ol} Us lor mountlno NVS ln24 valvs.

MU

12 15 Spring return Spring extend Min. operating pressure 0.18MPa 42 521 119 360 440 199 OUT 32 804 280 14 24 Ambient and fluid temperature 10 to 60C 1257 56 824 195 573 698 321 OUT 40 447 16 30 Lubrication Not required (Non-lube) 1131 1327 1963 47 346 935 542 OUT 50 738 20 76 Piston speed 50 to 500mm/S 1134 1446 113 1757 2069 3117 510 822 OUT 63 20 61 +1.4 0 Stroke length tolerance 378 121

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

depth K (WWW) XX XXX ZZ (MY1HG) ZZ WW XX VV VV MY3M (Hexagon socket head taper plug) (Hexagon socket head taper plug) XXX ZZ (MY1HG) ZZ (Hexagon socket head taper plug) (Hexagon socket head taper plug) Standard piping/Centralized piping A B C G GB H K J LD L LL LW M MM N NC Model NE NW NF NH 110 140 170 PB PC P PA MY1H25 MY1H32 MY1H40 30 37 45 M5 x 0.8 M6 x 1 M6 x 1 9 13 13 16 19 23 90 110 121

CV/MVGQ

112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.