CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160

SQ1000/2000

AXT661-12AL AXT661-12AL AXT661-14AL AXT661-14ANL AXT661-13ANL AXT661-13AL 300mm 300mm AXT661-14AL-6 AXT661-14ANL-6 AXT661-13ANL-6 AXT661-13AL-6 600mm 600mm AXT661-14AL-10 AXT661-14ANL-10 AXT661-13ANL-10 AXT661-13AL-10 1000mm 1000mm AXT661-14AL-20 AXT661-14ANL-20 AXT661-13ANL-20 AXT661-13AL-20 2000mm 2000mm AXT661-14AL-30 AXT661-14ANL-30 AXT661-13ANL-30 AXT661-13AL-30 3000mm 3000mm Note) When

0.4

or less VQ1200 13 or less 10 or less 0.70 0.15 0.16 0.72 0.25 0.18 Metal seal 13 or less Double VQ1201 20 or less 15 or less 0.85 0.20 0.21 1.0 0.30 0.25 Rubber seal 20 or less VQ1300 40 or less 20 or less 0.68 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Closed center VQ1301 47 or less 25 or less 0.70 0.20 0.16 0.65 0.42 0.18 Rubber seal 33 or less VQ1000 VQ1400 40 or less 20 or less

PF2A/PF2W

(Add 20 g for the types of analog output whether voltage or current output selected.)

Electronic Pressure Switch Series (Separate Type)

kPa 100 to 100 kPa 10 to 101.3 kPa 0.1 to 1 MPa 0 to 100 kPa 0 to 1 MPa 0 to 101 kPa 0.1 to 0.45 MPa 0.1 to 0.4 MPa 20 to 101 kPa 101 to 101 kPa 0.1 to 1 MPa 0.4 to 10 MPa 0.5 to 15 MPa 100 to 100 kPa 0.1 to 1 MPa 0 to 1 MPa Voltage 12 to 24 VDC (Ripple 10% or less) 3% F.S. or less (5 to 40C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 0.01 mm or less

VCW

(mm) Dimensions Electrical entry A B C D E G H J Z Model Grommet Conduit DIN terminal Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 63.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5 74 24 55 45.5 53 48 60 51 68 101 86.5 VV2CW4 57 25.5 28.5 30 5.5 42 20.8 41.5 81.5 26 62.5 47.5 60.5 50 62 58.5 70 103 94 17-2-59

1

x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105 1.0133 x 102 1.0332 x 104 7.6000 x 102 1.0133 x 101 1.0133 1.0332 1.4706 x 10 1 9.8067 x 103 9.8067 x 105 1 x 104 9.6784 x 105 7.3556 x 102 1.4220 x 103 9.8067 x 106 9.8067 1 1.3332 x 102 1.3332 x 101 1.3332 x 103

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection Width across flats M thread 10 95 61 23 20 133 71 51 30 143 81 40 179 91 77 50 189 101 10 50 33.9 25 A S 10 97.5 63.5 23 20 135.5 73.5 51 30 145.5 83.5 40 181.5 93.5 77 50 191.5 103.5 10 8 M5 x 04 06 13 2.5 52.5 36.4 27.5 0.8 D C B P 10 99 65 23 20 137 75 51 30 147 85 40 183 95 77 50 193 105 Applicable tubing O.D

Table of Contents

Material Polyolefin (Equivalent to UL-94 standard V-0) 0 20 0 20 40 60 Note) The color of all inner tubing is black.

MXS

Z K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 48.5 53.5 64.5 82.5 100.5 150.5 82.5 132.5 3.11-30 Air Slide Table Series MXS MXS

Table of Contents

11 115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

Series VQ Base Mounted Metal Seal/Rubber Seal

64 Single Rubber seal VQ1 5.4 (0.3) 15 or less 20 or less Metal seal VQ1210 3.6 (0.2) 10 or less 13 or less Double Rubber seal VQ1211 5.4 (0.3) 15 or less 20 or less Metal seal VQ1310 3.6 (0.2) 20 or less 26 or less Closed center VQ1000 Rubber seal VQ1311 5.4 (0.3) 25 or less 33 or less 78 Metal seal VQ1410 3.6 (0.2) 20 or less 26 or less Exhaust center Rubber seal VQ1411 5.4 (0.3) 25 or

Series VCL

54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5

LEY-OM007

20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16 LE-D-2-1 25 LEY-L025 LEY-F025 LEY-D025 25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4 /P.47 7.5 -12- 3.

ZR

ZF ZP ZCU D1 D2 D3 ZR1 1-K1M18 20 AMJ 10.2 Misc.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.