LEC-OM02904

B2B2 3 rev 1 (2) (1) 200 TM MR Configurator2 PC02 MBR (MBR)OFF(Tb) 0 ms 0 1000 PC03 *ENRS 0h 0 0 A B AB CCW CW A A 0 B B A A 1 B B 0 1 0 1 PC04 **COP1 C-1 0h 0 0 0 02 14 1()(16) 11.1.2 02 1: 4 116 11.1.2 5 21 5 No.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

Output block / Power block

equipment (load) is above the rated current of 42 mA (1.0 W, 24 VDC).

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH PIPING ADAPTERIS10E-20-D to IS10E-60-D Port size A B C D E F 1/81/43/8 24 77.8 60.3 42 24 1/43/81/2 27 85.8 64.3 53 30 1/43/81/23/4 30 93.8 68.3 71 36 3/4 36 1 46 3/4 39 46 1 1/41 1/2 42 63 9.5 106.8 74.8 90 Model IS10E-20-D IS10E-30-D IS10E-40-D 8.5 31 96.8 69.8 71 IS10E-50-D IS10E-60-D -21- Revision history 50,60 size added,Corrected. May. 2021.

Digital Flow Switches

Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. 6 Red CH3_OUT1 5 Gray CH2_OUT1 4 White N.C. 3 Black CH1_OUT1 2 Blue DC () 1 Brown DC (+) Panel mounting adapter Panel (ZS-26-B) Waterproof seal (accessory) 2 m 42 Digital Flow Switch for Deionized Water and Chemicals Series PF2D A single controller can monitor the flow rate of 4 different sensors.

Pilot Operated

G VXD 3 0 21 VXD 3 0 21 5 1 02 G For Water For Oil For Air The AC (Class B) coil for VXD2130 comes with a full-wave rectifier.

HRX-OM-W058

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-X027

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-R016

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

/

Rating symbol DC 24 VS V100-61-5-05 24 VDC DC 12 VS V100-61-5-06 12 VDC 100/110 VS V100-61-4-01 100 VAC 200/220 VS V100-61-4-02 200 VAC 100/110 VS V100-61-4-01 110 VAC 200/220 VS V100-61-4-02 220 VAC 240 VS V100-61-4-07 240 VAC With Light/Surge Voltage Suppressor Rated voltage Part no.

Low Friction Cylinders Series MQ

24.5 55 175 20 8 Rod side flange type: MQMLF 6 20 REA 2.3 33 42 27.5 REB 2 x 5.5 66 + Stroke 93.5 + Stroke REC 10, 16, 20, 25 CY CX FY MQ FT RHC FX FZ H 2 x FC S + Stroke ZZ + Stroke RZQ (mm) DBore size (mm) FC FT FX FY FZ H S ZZ -X 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 Individual -X 20 7 4 60 34 75 40.5 97.5 151 25 7 4 60 40 75 44.5 102.5 160 1185 Series MQM Refer

5 Port Solenoid Valve

1 e VV5QC 4 1 16 SDQ 02 S Kit VQC4000 series y i o !

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Fieldbus system (CC-Link compliant)

Specifications 42 Dimensions 42 -1No.EX-OMI0001-I Input Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 46 Specifications 50 Specifications 50 Dimensions 50 Maintenance 51 Troubleshooting 52 Option 57 -2No.EX-OMI0001-I Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

VCL

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

VS7-6

B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5