Cylinder with Lock

AB AH AO AT AU E R2 TG 0.2 TR Screw size R2 TG/2 32 L5032 7 32 10 4.5 24 48 15 32.5 32 M6 x 16L 40 L5040 10 36 11 4.5 28 55 17.5 38 36 M6 x 16L 50 L5050 10 45 12 5.5 32 68 20 46.5 45 M8 x 20L 63 L5063 10 50 12 5.5 32 80 22.5 56.5 50 M8 x 20L 80 L5080 12 63 14 6.5 41 100 22.5 72 63 M10 x 20L 100 L5100 14.5 71 16 6.5 41 120 27.5 89 75 M10 x 20L AH AT AB E TR AU AO * Supplied with 4 mounting

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

lateral load at rod end is exceeding the value in the graph, we recommend anti-lateral load type cylinder be used. 101 g 43 g 3 g 141 g W (Mounting orientation: Horizontal) 7-6-5 6 Series CQ2 (N) Theoretical Output (g) Weight Cylinder stroke (mm) Operating Operating pressure (MPa) Bore size (mm) 5 Bore size (mm) direction 0.3 75 50 45 40 0.7 35 30 0.5 25 20 15 10 100 12 59 60 42 54 47 25 41

A

Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

KJ

19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 11.11 14.29 11.11 14.29 11.11 14.29 11.11 14.29 17.46 12.7 14.29 17.46 9.6 10 17.5 15.5 1 8 43 37.5 43.5 38 44 40.5 46.5 48.5 43.5 49.5 51.5 56 58 64.5 58 60 66.5 10.4 10 16 3 18 5 32 11.4 10 16.5 3.5 19.5 3 16 K 1 4 4.6 17 13.2 10 20.5 M H 5 16 6 18.5 15.2 12 23.5 D Connection thread (with seal) 17.46 3 8 7 21 17.9 17 25.5 MS 22.23 Courtesy

Plug-in/Plug Lead: Single Unit

53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 Rc 1/8 PE port Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 External pilot port

KR

17 12 57.4 22 45.4 17 28.5 20.9 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R thread installation.

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

AIR COMBINATION

57.2 35 7 14 4 41 AC30-B 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 1/43/81/2 AC40-06-B 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 3/4 AC50-B 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 3/41 AC55-B 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

5-Port Solenoid Valve

p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53 p.

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

66 50.5 75.5 41 66 27.5 27.5 16 25 25 116 116 25.5 100.5 91 50.5 75.5 41 66 50.5 75.5 41 66 30 30 16 125.5 125.5 D-G5NTL D-G59F D-G5NTL D-G59F 32 32 117 117 26.5 101.5 92 51.5 76.5 42 67 51.5 76.5 42 67 33.5 33.5 17 126.5 126.5 40 40 119 119 31 106 94 56 81 44 69 56 81 44 69 38 38 19 131 131 20 20 27 102 92.5 52 77 42.5 67.5 52 77 42.5 67.5 27.5 27.5 17.5 25 25 27 102 92.5 52 77 42.5 67.5

Free Mount Cylinder Series CU

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) When mounting Series CU, refer to the below table. C(D)U6-D Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.