20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

3 Port Solenoid Valve/

-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

MGG

BA 32 BA 04 BA 05 BA 06 BA 08 BA 10 BA 01 BA 02 BM1 01 BM1 02 BM1 32 BM1 04 BM1 05 BM1 06 The following stainless steel mounting screw kits (including set screws) are available for use depending on the operating environment. (Order the mounting band separately, as it is not included.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Digital Flow Switch (Manifold type)

Nil S P W 0.5 to 4 L/min (Symbol 04) 0.50 0.49 0.50 0.48 2 to 16 L/min (Symbol 20) 1.79 1.21 1.38 1.05 5 to 40 L/min (Symbol 40) 4.57 3.11 2.42 2.04 Flow range: 0.5 to 4 L/min (symbol 04) Flow range: 2 to 16 L/min (symbol 20) Flow range: 5 to 40 L/min (symbol 40) -52No.PF-OMW0004-B Flow rate characteristics for several supply units Flow range: 0.5 to 4 L/min (symbol 04) (reference value)

Secondary Batteries

L-bracket 53 Quick Exhaust Valve with One-touch Fittings 90-AQ240F/340F Series How to Order IN, OUT port applicable tubing O.D. 04 4 Exhaust port Body size 04 Applicable tubing O.D. 4 2 M5 04 90 04 AQ 2 4 F 0 3 4 F 0 06 AQ 06 90 Exhaust port Series compatible with secondary batteries 06 Applicable tubing O.D. 6 90 Material restriction IN, OUT port applicable tubing O.D.

PFxx-OMA1007

(Refer to page 40, 41) Standby OFF delay 0 to 9s 0s Common Sensor Sets enabling/disabling of automatic isolation. (Refer to page 40, 41) Auto isolation Enable/Disable Disable Common Isolation delay Sets isolation delay. (Refer to page 40, 41) 0 to 9s 3600s Common Sets whether it is necessary to input the security code or not.

Rotary Clamp Cylinders

Weight Unit: g D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Caution 0.5 8 8 7 Lead wire length (m) 3 41 41 38 Precautions 5 68 68 63 Fix the switch with the existing screw installed on the switch body. The switch may be damaged if a screw other than the one supplied is used.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

V100 SY Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 SYJ VK Dimensions L (mm) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Applicable fittings fitting d Model A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 16 16 18

SZ3000

double solenoid For 3 position type For 4 position type [SOL.B] () Coil : SX100-41-4DCOM (+) How to Order Lead wire length 2000 mm SZ3160-5MO-M5 SX100-40-4S-20 Include the connector assembly part number together with the part number for the plug connectors solenoid valve without connector.

SZ3000

double solenoid For 3 position type For 4 position type [SOL.B] () Coil : SX100-41-4DCOM (+) How to Order Lead wire length 2000 mm SZ3160-5MO-M5 SX100-40-4S-20 Include the connector assembly part number together with the part number for the plug connectors solenoid valve without connector.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

For double solenoid For 3 position type: For 4 position type SX100-40-4DNegative common specifications Electric circuit diagram (With positive common and light/surge voltage suppressor) For single solenoid: SX100-41-4SFor double solenoid For 3 position type: For 4 position type SX100-41-4D[SOL.b] () Coil How to Order Lead wire length 2000 mm 10-SZ3160-5MO-M5 SX100-40-4S-20 COM (

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

V

14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

0.4

< #, = > > = #&#% #&#% = > > = > = > = #&#% > = > = > = 5 %. 41 $ / $. 41 $ / #&#% > = > = #&#% > = = > 3 0 % 3 '$ 4! = > $. 41 $ / 5 %. 41 $ / 7 #! 2! (.% * #2! !*&#%3! .-!"%1%"&#% 1 $ 9: ; < (.! 3&'3!. 1 $ !*&#%3! %5!, .% *'! & , , ()'! 0%$% * &$! &3&%'&)'! &. -#% . 2! &5%( ()!$ 1 & %1 ', .#&#% . %. ,!#!$% !, )4 #2! ()!$ 1 . '! %,. ( # ! % # 1 $ & .% *'! . '! %, #4-!

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Guide Cylinder/Compact Type Series MGC

D-H7C 9 7 8.5 10 D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4.5 4 4 5 D-B7/B80 D-B73C/B80C D-G79/K79 D-K79C D-G59F D-G5NBL BM1-01 BM1-02 BM1-32 BM1-04 5.5 5 5 6 40 40 35 45 Since this is a guideline including hysteresis, not meant to be guaranteed.

ZB-OM00301

04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.