Series: VP300, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 12 Stations, Symbol: 3, Port Size: 1/4, Thread Type: NPT

XL-OMY0002

60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46 200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42

XLDV Series

8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41 48.5 XLDV50 70 183 79 57.5 17.5 75 52 55.0 XLDV63 88 217 100 72.2 20.0 87 95 70 66.5 XLDV80 90 256 117 82.6 26.5 114 110 83 75.0 XLDV100 108 321 154 95.2 38.0 134 130 102 93.5 XLDV160 138 335 200 101.2 40.0 190 180 153

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

When power is supplied, alarm for AbEnc ID ALM /code: 1-153 is generated. 1) Combination of the controller Combination at the time of shipment and actuator is not correct. shall be kept. 2) The product is used for the This is normal. Turn ON RESET to reset the alarm. first time, or when the actuator or controller is replaced. Input the reset signal.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

CRQ2

BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153

Table of Contents

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Caution Mounting Caution Operate loads within the range of the operating limits. Select a model taking into consideration the allowable horizontal loads, rotational torque and eccentric loads that will apply.



L Dimension Equation L1 = 31n + 29, L2 = 31n + 14 n: Station n 8 7 6 5 4 3 2 Symbol L1 L2 277 246 215 184 153 122 91 262 231 200 169 138 107 76 14-6-13 14 Series VEX130 3 Precautions Related Products: Silencer (Series AN) Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reduction capability of over 30 dB.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

VXR21/22/23

53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20

Series VQ Base Mounted Metal Seal/Rubber Seal

487.5 498 23 421 441 462.5 473 22 405 425 450 460.5 21 389 409 437.5 448 20 373 393 412.5 423 19 357 377 400 410.5 18 341 361 387.5 398 17 325 345 375 385.5 16 309 329 350 360.5 15 293 313 337.5 348 14 277 297 325 335.5 13 261 281 312.5 323 12 245 265 300 310.5 11 229 249 275 285.5 10 213 233 262.5 273 9 197 217 250 260.5 8 181 201 225 235.5 7 165 185 212.5 223 6 149 169 200 210.5 5 133 153

pa

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

Title not found

1.45mm 0.0571 1.5mm 0.0591 53 0.0595 1.55mm 0.0610 1/16 0.0625 1.6mm 0.0630 52 0.0635 1.65mm 0.0650 1.7mm 0.0669 51 0.0670 1.75mm 0.0689 50 0.0700 1.8mm 0.0709 1.85mm 0.0728 49 0.0730 1.9mm 0.0748 48 0.0760 1.95mm 0.0768 5/64 0.0781 47 0.0785 2mm 0.0787 2.05mm 0.0807 46 0.0810 45 0.0820 2.1mm 0.0827 2.15mm 0.0846 44 0.0860 2.2mm 0.0866 2.25mm 0.0886 43 0.0890 2.3mm 0.0906 2.35mm 0.0925 42

Title not found

1.45mm 0.0571 1.5mm 0.0591 53 0.0595 1.55mm 0.0610 1/16 0.0625 1.6mm 0.0630 52 0.0635 1.65mm 0.0650 1.7mm 0.0669 51 0.0670 1.75mm 0.0689 50 0.0700 1.8mm 0.0709 1.85mm 0.0728 49 0.0730 1.9mm 0.0748 48 0.0760 1.95mm 0.0768 5/64 0.0781 47 0.0785 2mm 0.0787 2.05mm 0.0807 46 0.0810 45 0.0820 2.1mm 0.0827 2.15mm 0.0846 44 0.0860 2.2mm 0.0866 2.25mm 0.0886 43 0.0890 2.3mm 0.0906 2.35mm 0.0925 42

Power Valve Precision Regulator

VEX1A33, VEX1B33 Supply pressure range Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 Proper tightening torque (Nm) Supply pressure (MPa) Supply pressure (MPa) 1 8 1 4 3 8 1 2 3 4 1 1 1 4 1 1 2 2 2. Ordinarily, air is discharged from the bleed port (PE).

H/DL/L/LL

LL10-03 LL10-04 LL12-02 10 98 117 121 LL12-03 LL12-04 17 14 19 64.4 65.5 66.7 67.4 71.4 31 17 22 23.3 60.9 63.9 62.9 63.9 66.9 17 17 19 129 153 12 17 22 43 24.3 17 22 15-2-64 Self-align Fittings Series H/DL/L/LL Swivel Type/Parts No. Swivel type fitting parts lineup The body of elbow connectors and extended elbow connectors are compatible with almost any fitting.

Fieldbus System

Such a place is likely to cause malfunction. 42 Series EX260 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) and Operation Manual for 3/4/5 Port Solenoid Valve Precautions.

Compact Cylinder

) K B + Stroke 10 M A + Stroke E 2.5 13.5 counterbore 5 (4 positions) (The same four-place size) M: Rod end male thread Width across flats K Hexagon width across flats 24 D M16 x 1.5 10 25 28 B + Stroke 38 A1 + Stroke Rod End Male Thread (mm) Basic Style (mm) Bore size (mm) Bore size (mm) D E I K C M Q Z A B F A1 64 54 11 25 91 15 121 22 72 19 36 92 80 80 77 67 14 30 111 18 145 27 89 26 42

2/3 Port Valve for Various

53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20