Fieldbus System 123 135.5 148 148 160.5 173 173 185.5 198 198 210.5 223 223 235.5 248 40 Series EX260 Specific Product Precautions 1 Be sure to read before handling.
XLCV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L With single solenoid Port P (pressure port) (mm) N 3 3 3 3 6.5 6.5 M 6.5 6.5 6.5 6.5 11 11 L 9 9 9 9 11 11 K 14 16 29 42 32 45 P 17 15 2 6 Q Model XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 16.5 16.5 17.5 17.5 29 29 Other dimensions are the same as XLA. 11 Series XLF Normally Clossed/O-ring Seal Air
For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1
For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) DB A C C D C D D -X 20 25 32 30.5 36.5 (35) 3.5 4 2.5 (1) 38.5 6.5 40.5 32 38 (36.5) 2 5.5 4 (2.5) 40 8 42 2042.5 48.5 (47) 0.5 7 5.5 (4) 50.5 9.5 52.5 Data As for auto switch mounting
71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100 125 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 14 25 42 74 118 187 335 500 750 1270 (1) N 16 28 47 82 130 204 359 525 780 1320 () mm 4 4 6 8 8 12 16 20 24 32
Parameter definition and setting 42 Hardware Configuration 55 GSD file and icon 55 Configuration layout 55 SIEMENS PLC S7TM connection method 56 Parameter setting at PLC 59 I/O Map 61 Diagnostic 62 Accessories 70 -2No.EX-OMN0028-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
625 380 12.5 H 1648 1149 825 502 16.5 R 50 20 1961 1365 980 596 19.6 H 2801 1950 1400 851 28 R 63 20 3121 2172 1560 948 31.2 H Note) Theoretical force (N)=Pressure (MPa) X Piston area (cm2) X 100 Operation direction R: Rod side (Clamp) H: Head side (Release) Weight/Mounting Through Hole Unit: g Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 10 20 50 70 100 250 280 500 595 87 123
4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard
Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 14-5-8 8 Precision Regulator Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) F.R.L.
PB 0103 1 5 Gasket Subplate Buna N AXT 33112-2 18 Screws Pilot Cover (4) AXT 334.1G1 B o E G H K il N 127) 0.63 (161 1.42 {36) 0,91 123) 0.al (15.5) 1.24 (32) 6.10 (155) 2.4e (63) (62) 2.O5 <52) ?.o1 (51) l2B 1.06 1 7 Hold Down 8olls {8.32 x 1 9'61(2) NXT 333,17.5 Mi(tne ln Parenlhess NVSA45l4 DETAIL REF. 0EscRrPTtol{ MATERIAL PAB' NO. 1 Body Alum.
End plate ass'y 1 pc. 2500 3000 A B 146 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM2500, 3000 P Dimensions Symbol A B C D E F G H I J K L M N O P Model NARM2500 .24 .67 1.73 2.20 1.65 4.98 2.28 1.77 .67 .83 1.50 1.65 1.14 1.89 2.68 1.32 (6) (17) (44) (56) (42) (126.5) (58) (45) (17) (21) (38) (42) (29) (48) (68) (33.5) NARM3000 .28 .83 2.13 2.68 2.17 6.04
Nozzle length (D) 123 332 632 A B C Body color White Dark blue W BU Connection size Piping connection type Piping connection method Size and model no.
No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.
PB 0103 1 5 Gasket Subplate Buna N AXT 33112-2 18 Screws Pilot Cover (4) AXT 334.1G1 B o E G H K il N 127) 0.63 (161 1.42 {36) 0,91 123) 0.al (15.5) 1.24 (32) 6.10 (155) 2.4e (63) (62) 2.O5 <52) ?.o1 (51) l2B 1.06 1 7 Hold Down 8olls {8.32 x 1 9'61(2) NXT 333,17.5 Mi(tne ln Parenlhess NVSA45l4 DETAIL REF. 0EscRrPTtol{ MATERIAL PAB' NO. 1 Body Alum.
63) 132.5 Cable length 250 24 Motor cable 65 (3) 15.2 (2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42
HED 29 HEA IDH 123 Thermo-chiller connection side 141 Cable Wired remote controller connection side M12/4-core connector (socket side) To use the wired remote controller, the thermo-chiller main unit setting is needed. Use the wired remote controller indoors.
LEFB/Belt Drive Horizontal 4 Work load: W [kg] LEFB25 2 LEFB16 0 0 500 1000 1500 2000 Speed: V [mm/s] 42 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.
H F G JIS Symbol (A) Lockable at the time of exhaust E 2 C D 1 3 (P) (R) Effective area mm2 (Cv) Model Port Size EXH 1/8 1/4 3/8 IN, OUT 1/4 3/8 1/2 IN to OUT 14 (0.76) 31 (1.68) 55 (2.98) OUT to EXH 16 (0.87) 29 (1.57) 42 (2.28) VHS20 VHS30 VHS40 A Paint color (Standard) Handle: Red Body: Platinum silver Use an air filter on the IN side for operating protection.
How to Order AS500 AS420 JIS Symbol AS 42 0 02 Option Body size Nil None Caution 42 50 60 80 90 1/2 standard 3/4 standard 1 standard 1 1/4 standard 1 1/2 standard H (1) High temperature (5 to 80C) Low temperature (30 to 60C) Bore size L (2) Be sure to read before handling.