Piping: 41R (Base Mounted), Stations: 4 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41R (Base Mounted), Stations: 3 Stations, A, B Port: 01N (NPT1/8)

AC Servo Motor Driver (Pulse input type/Positioning type ）

end reference home position return type . 16-195 16.12.13 Dogless Z-phase reference home position return type . 16-197 16.12.14 Automatic retract function used for the home position return . 16-198 16.13 SERIAL COMMUNICATION OPERATION . 16-199 16.13.1 Positioning operation using the program . 16-199 16.13.2 Multi-drop method (RS-422 communication) . 16-200 16.13.3 Group specification . 16-201

3

Rotary Angle Port side During unclamping (Extension end) 80 to 100 (9010) L type (Counterclockwise) During unclamping (Extension end) 80 to 100 (9010) R type (Clockwise) Theoretical Output Operating pressure (MPa) Unit: N Bore size (mm) Rod size (mm) Operating direction Piston area (cm2) 0.8 1.1 1.5 2.0 2.0 3.1 3.8 4.9 6.0 8.0 10.6 12.6 16.5 19.6 28.0 31.2 1.0 85 113 151 201 201 314 378 491

MLGP

CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing

Clean Gas Filter

Material Case Note 1 Stainless steel 316 Electrolytic polishing (Interior/Exterior) V-clamp 2 Stainless steel 304 Holder 1 3 Polyester Holder 2 4 Filter medium 5 Element PTFE Seal 6 FKM V-seal 7 300 SFA100/200/300 Series Clean Gas Filter: Cartridge Type/Disc Type Flow Rate Characteristics Fluid: Compressed air Inlet temperature: 20C Dimensions SFA100/101, SFA200/201, SFA300/301 SFA10 Inlet

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot h l Symbol f e 1 to 50 51 to 100 101 to 150 151 to 200 201

CG1

JIS symbol Double acting Minimum Strokes for Auto Switch Mounting Stroke Long stroke (2) (mm) Max stroke (mm) Number of switches Bore size (mm) Standard stroke (1) (mm) Auto switch model 2 1 D-C7/C8 D-B5/B6 D-H7 D-G5/K5 25, 50, 75, 100, 125, 150, 200 201 to 350 20 15mm 10mm 301 to 400 25 301 to 450 32 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 15mm 1500 301 to 800 40 D-B59W 301 to 1200

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

MLGP

Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4

MLGP

Selecting Conditions/Table 1 Vertical Upward facing Downward facing Horizontal l = Eccentric distance l = Distance between the plate and load center of gravity m Mounting orientation m m l = Eccentric distance Maximum load speed V Graph (Slide bearing type) Graph (Ball bushing type) 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 50 to 200mm/s 201 to 400mm/s 1 , 2 3 , 4 1 3, 1 4

VFS

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

Vacuum Pad

64.3 60.3 56.3 52.2 48.2 44.2 40.2 36.2 32.2 107 101 95 88 82 76 69 63 57 50 167 157 147 137 127 118 108 98 88 78 Vacuum pressure (kPa) Pad Diameter (63 to 340) (N) Pad diameter (mm) 125 122.7 150 250 300 340 Pad area S (cm2) 176.6 63 31.2 80 100 50.2 78.5 490.6 706.5 907.5 85 80 75 70 65 60 55 50 45 40 265 250 234 218 203 187 172 156 140 125 427 402 377 351 326 301 276 251 226 201

Vacuum Pad

64.3 60.3 56.3 52.2 48.2 44.2 40.2 36.2 32.2 107 101 95 88 82 76 69 63 57 50 167 157 147 137 127 118 108 98 88 78 Vacuum pressure (kPa) Pad Diameter (63 to 340) (N) Pad diameter (mm) 125 122.7 150 250 300 340 Pad area S (cm2) 176.6 63 31.2 80 100 50.2 78.5 490.6 706.5 907.5 85 80 75 70 65 60 55 50 45 40 265 250 234 218 203 187 172 156 140 125 427 402 377 351 326 301 276 251 226 201

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

IS 1I 5~.tIono{ SOL. 151-1 5 ,1onl {~20 (-) 5 ... tiono {~201-1 ~B(+I CS(+I COM '31+1 COM '31+1 SOL.A2, I _ I SOl.A2, I I ~171-1 So ... lon. { OL. 'S I I ~'71-1 s.totion.{ SOL.

Table of Contents

How to Order Valves. 181 182 183 183 183 183 185 186 189 189 189 190 190 191 192 193 194 194 194 194 195 195 195 196 197 198 198 198 199 199 199 200 201 202 203 204 207 209 210 211 212 216 218 218 219 220 224 226 227 227 228 229 231 233 233 234 235 238 239 239 239 242 242 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

ZFC Series

ZFC200-08 No. 0.0001 1 10 100 ZFC200, 201 ZFC100, 101 S14 S10 O-ring Accessory BP-17S BP-16S Bracket Flow rate l/min (ANR) O-rings are already installed in spare elements. A bracket is included with the product. 4 Air Suction Filter Series ZFC In-line Type with One-touch Fittings Dimensions (mm) 1in=25.4mm Applicable tubing O.D.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

ZFC200, 201 ZFC100, 101 Flow rate ( /min (ANR)) O-ring S14 S10 q Bracket Accessory BP-17S BP-16S O-ring is a set with spare element (I-S-A). A bracket is included with the product. 13-10-8 3 Series ZFC Air Suction Filter In-line Type with One-touch Fittings Dimensions Applicable tubing O.D.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 81 93 106 131 156 12.5 25 37.5 50 75 100 35 17 68 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 35 17 72 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 35 17 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 19 77 46 Refer to p.1.4-19 and 1.4-20 for

CV/MVGQ

Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 201 208 217 245 253 W RS H A l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14 e 43 52 52 65 65 ZZ 209 216 225 254 262 H 51 58 58 71 72 8 8 8 0 0 RZQ MI W S CEP1 Axial Foot Style: CVS1L CE1 Lube type (CVS1L), Non-lube type (CVS1LN) CE2 ML2B With rod boot Width across flats B1