Stations: 4 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 5 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 7 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 8 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 10 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 12 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 3 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 2 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 3 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 4 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

CQS

JIS symbol Theoretical Force Unit: N OUT IN Operating pressure (MPa) Rod diameter (mm) Piston area (mm 2) Bore size (mm) Operation 0.3 0.5 0.7 84.8 IN 25 42 59 12 6 CU 113 OUT 34 57 79 151 IN 45 75 106 16 CQS 8 201 OUT 60 101 141 236 IN 71 118 165 CQ2 20 10 314 OUT 94 157 220 MU 378 IN 113 189 264 25 12 491 OUT 147 245 344 Intermediate Strokes Spacer is attached on standard stroke body.

Compact Cylinder Series CQS

JIS Symbol Theoretical Output (N) OUT IN Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 0.3 0.5 0.7 Made to Order Specifications (For details, refer to pages 1373 to 1565.) 84.8 IN 25 42 59 12 6 113 OUT 34 57 79 Symbol Specifications 151 IN 45 75 106 16 8 XA Change of rod end shape 201 OUT 60 101 141 Heat-resistant cylinder (10 to 150 C) (without

SMC

thread depth 4 (With stroke adjuster at extension end) 2 (Stroke adjuster at retraction end) 23 40 15 30 37 10 3H9 depth 3 +0.025 0 12 F +0.025 0 N 1 x F 2 3H9 depth 3 30 24 M 0.5 23 24 Z ZZ (NN1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 depth 3 +0.025 0 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151

1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series CM2 BM (Adjusting bolt) BM MH ZZ Bore size (mm) 20 25 32 40 MB Caution M10 x 1.25 26.5 142.5 M14 x 1.5 29 149 Precautions MB1 M14 x 1.5 29 151 1.

CQS

MU Theoretical Output (N) DOperating pressure (MPa) Piston area (mm 2) Rod size (mm) Operating direction Bore size (mm) 0.7 0.5 0.3 -X IN 12 6 59 42 25 84.8 20OUT IN 16 8 106 75 45 151 Data OUT Mounting IN 20 10 165 118 71 236 1. When removing a load, be sure to secure the wrench flats of the piston rod on the load side. 2.

Stations: -, Piping: -, Thread: -, Option: -, CE/UKCA Compliant: -

Large Size Vacuum Module: Series ZR

Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 966 Large Size Vacuum Module: Ejector System Series ZR Circuit diagram ZA ZX Individual spacer (ZR1-R1-4) ZR PV PD EXH PS Function plate (ZR1-RV1-4) ZM X X X X X PS PE ZMA SOL.C Silencer Pressure switch for vacuum SOL.A SOL.B ZQ X X X X X PD PV Ejector ZH Release valve Supply valve V ZU Suction filter ZL X

Compact Guide Cylinder Series MGQ

30 45 60 76 91 106 121 136 151 XA Change of rod end shape Heat resistant cylinder (10 to 150C) XB6 0UT 314 63 94 126 157 188 220 251 283 314 20 10 MGT XB9 Low speed cylinder (10 to 50 mm/s) IN 236 47 71 94 118 142 165 189 212 236 XB10 Intermediate stroke (Using exclusive body) 0UT 491 98 147 196 246 295 344 393 442 491 25 12 XC22 Fluororubber seals IN 378 76 113 151 189 227 265 302 340 378

Air Slide Table Series MXW

-X = 3.5/14.3 = 0.24 Individual -X 149 Air Slide Table Series MXW How to Order MXW 16 100 B M9BW Made to Order Refer to page 151 for details. Port thread type M thread Rc NPT G 8 to 16 Nil Number of auto switches Nil TN TF 20, 25 2 pcs. 1 pc. n pcs.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Model Rod size (mm) Operating 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGT 726 236 1085 378 1621 603 2533 942 3848 1473 5945 2313 9715 3770 20 x 25 20 25 x 30 25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 47 71 94 118 141 165 189 212 236 217 326 434 543 651 760 868 977 1085 MGZ25 12 76 113 151