HRX-OM-X010 4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen . 5-4 5.3.1 Model Indication screen . 5-4 5.3.2 Status screen 1 . 5-5 5.3.3 Status screen 2 . 5-6 5.3.4 Status screen 3 . 5-7 5.3.5 Status screen 4 . 5-8 5.3.6 Alarm Display
Calle 18 69-05 Apart.
Calle 18 69-05 Apart.
Calle 18 69-05 Apart.
For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .
Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4
Bore size (mm) Part No. l Dd9 L m d H B C D Applicable cotter pin 3 X 18 l 4 X 25 l 4 X 35 l 4 X 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03 CD-M05 CD-M08 IY-12 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 10 14 22 25 36 51 72 44 60 82 4 4.5 5 5 3 4 4 4 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 6 8 11 13 16 16 17
: 0.8N.m :SYJ700-10-2A , (SYJ700-5-3) SYJ700-10-1AAss'y CE SYJ700-10-2A-1-Q SYJ700-10-2A-2Q 22 No.SYJ300-OMU0003 Assy 5 G V111 T S (DC24V,12V) Z *W R () U () 5 DC24V *AC S *RU DC *Z 6 DC12V V DC6V S DC5V G 300m R DC3V H 600m 1 AC100V50/60Hz )V111 CE L -Q 2 AC200V50/60Hz LN L AC110V50/60Hz LO 3 (AC115V50/60Hz) M 4 AC220V50/60Hz MN M (AC230V50/60Hz) MO *WDC *CE DC WO M8
For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com ZU S 05 A Port size Nozzle diameter 05 0.5 mm 07 0.7 mm Nil 6 One-touch tting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specications 1 .
AD value 31208 (79E8) (79E8) 1950 (79E) (79E) 1934 (78E) (78E) a Input 0 b 114 (72) (72) 31208 (F9E8) (8618) Input 0 Input 0 a a b Input signal range a 0 to 10 V Input signal range a b 1 to 5 V Input signal range a b 10 to 10 V 10 V 1 V 5 V 10 V 10 V 0 to 5 V 5 V 4 to 20 mA 4 mA 20 mA 5 to 5 V 5 V 5 V 0 to 20 mA 20 mA 20 to 20 mA 20 mA 20 mA Regarding AD value In the above graph, 3 AD values
Note Example Symbol Type E J K L P W Nil Without option V V V V B With DIN rail mounting bracket4 V V V V ZK2C10R5NC1A-08 ZK2C07R5NC1A-08 D With common release pressure supply (PD) port V V V 5 V Cannot be selected ZZK204A-A1P-B when r is N L Manifold individual supply specification V V V 5 V Individual supply port 1 2 3 Stations D side U side 3 When more than one option is selected
(Z) 1 (M) 3 (L) None (N) 0.5 (Nil) AC DC M9N M9P M9B H7C M9NW M9PW M9BW H7BA H7NF 3-wire (NPN) IC circuit 5 V, 12 V Grommet 3-wire (PNP) Solid state switch 12 V 2-wire Connector Relay, PLC 24 V 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) Grommet 12 V 2-wire Water resistant (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN) With diagnostic