S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 10, Voltage: 24 V DC,

Size: 1 (ø10), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 6A (1/8), Voltage: 5 (24VDC), Lead Wire: G (Grommet)

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 10, Voltage: 24 V DC,

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Open, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 10, Voltage: 24 V DC, Sealing

Size: 1 (ø10), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 6A (1/8), Voltage: 5 (24VDC), Lead Wire: G (Grommet), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 1 (ø10), Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 6A (1/8), Voltage: 5 (24VDC), Lead Wire: G (Grommet), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

2/3 Port Valve

Screw-in styles, 6A to 50A, are standardized.

Air Slide Table

MXQ 6A-Z Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc.

Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: FKM Seal, Body Material: Aluminum Body, Pilot System Option: Standard, Thread: NPT, Port Size: 1/8, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Locking Style Slotted, Bracket: Bracket, X200: -, CE Compliance: -

Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: B (FKM Seal), Body Material: L (Aluminum Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 6A (1/8), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: B (Locking Style Slotted), Bracket: B (Bracket)

42

However, the maximum number of stations is 16. 1B 2A 2B 3A 3B 4A VFR 4B 5A 5B 6A 6B 7A 7B VQ7 1.

SQ1000/2000

B (+) () 1B 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM SOL. A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 2 SOL. B (+) () 2B SOL. A (+) () 3A Station 3 SOL. B (+) 3B () SOL. A (+) 4A () Station 4 SOL. B 4B (+) () SOL. A (+) () 5A Station 5 SOL. B (+) 5B () SOL. A (+) () 6A Station 6 SOL. B 6B (+) () SOL.

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

Process Valve

Screw-in type (6A to 50A) and the flange (32F to 50F) are standardized.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

) 1 8 (6A) 320 4.5 2 300 3 3 1.0 7.9 0.33 500 320 500 660 500 660 1 4 (8A) 4.5 15 0.61 470 620 470 620 560 700 560 700 470 470 620 470 620 560 700 560 700 560 700 4.5 0.61 15 1 4 (8A) 1.0 6 1.1 26 6 1.1 26 8 1.6 38 3 0.33 7.9 0.5 500 10 4.5 0.61 15 1.9 46 3 8 (10) 660 500 660 3 7.9 0.33 6 1.1 26 4.5 0.61 15 1.0 Note) Weight of grommet type.

VNB

Refer to Table (2) to select the port size of the threaded type (6A to 50A) and flanges (32F to 50F).

VM

Lubrication Not required/Turbine oil #1 (ISO VG32) Port size (Nominal size) Rc(PT) (6A) 110g 1 8 Weight (Basic) Model Actuator part No.