Number of Ports: 2 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: 01 (R 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: U (w/Bottom Mounting Thread), Port Size: 01 (R 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green), Indicator: None

Number of Ports: 2 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: F02 (G 1/4), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green)

Number of Ports: 2 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: N02 (NPT 1/4), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green)

Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: N02 (NPT 1/4), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green)

Number of Ports: 3 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: N02 (NPT 1/4), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green)

Number of Ports: 2 Port, Piping Direct., Plunger Length: 2 (Bottom Ported, Long), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green), Indicator: None

Number of Ports: 2 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: N01 (NPT 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green), Indicator: None

Number of Ports: 2 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: U (w/Bottom Mounting Thread), Port Size: N01 (NPT 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green), Indicator: None

Number of Ports: 2 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: U (w/Bottom Mounting Thread), Port Size: 01 (R 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: G (Green), Indicator: None

IR1000/2000/3000

x 1.5 NBR O-ring JIS B 2401 P3 JIS B 2401 P4 JIS B 2401 P5 NBR O-ring (1) (1) (1) P36203015 NBR Seal (A) P36203016 NBR Seal (B) KT-IRV1000 KT-IRV2000 KT-IRV3000 Repair kit no.

Process Pump

B Control unit Diaphragm B Diaphragm A 1.

125

Port size (External/ Internal) Pilot solenoid C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b VEX312-01 1/8 2.4 0.19 2.4 0.31 2.3 0.36 2.5 0.22 0.1 0.2 VEX312-02 1/4 3.5 0.35 3.3 0.49 3.1 0.46 3.5 0.33 0.1 0.2 VEX332-02 1/4 4.1 0.36 4.3 0.42 4.1 0.41 4.6 0.25 0.3 0.4 VEX332-03 3/8 8.7 0.29 7.9 0.52 7.8 0.51 8.7 0.33 0.3 0.4 VEX332-04 1/2 9.8 0.37 9.6 0.52 9.1 0.53

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2) 101.2

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

VZ100/300/500

01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Manifold 1(P), 3(R) port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5-40-2 VV3Z5

Clean Gas Filter

MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint AME AMF 0.0001 1000 1 10 100 ZFC SFA103, SFA203, SFA303 Flow rate L/min (ANR) SF SF 2 x UOJ 1/4 SFA30 SFD 7 9.5 6.5 0.1 LLB B Inlet pressure IN 0.3 MPa AD Max. flow rate line Pressure drop MPa 0.1 MPa 0.01 GD A 0.7 MPa A B Model Connection