Soft Start-up Valve

+ 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC [115

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5

DM

(Option ) Multi-connector Socket side only Plug side only DMK6-23 DMK6S-23 DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 DMK6P-04 DMK12-23 DMK12S-23 DMK12P-23 12 DMK-C-12 DMK12-04 DMK12S-04 DMK12P-04 Specifications Applicable tubing materials Nylon, Soft nylon, Polyurethane Applicable tubing O.D.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

VXZ

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Compact Vacuum Unit

ZB1-PS1-A (PSE541) Rated pressure range Proof pressure Output voltage Output impedance Power supply voltage Current consumption Accuracy Linearity Repeat accuracy Effect of power supply voltage Temperature characteristics 72.5 psi (500 kPa) 1 to 5 VDC Approx. 1 k 10 to 24 VDC10%, Ripple (p-p) 10% or less 15 mA or less 2% F.S.

AN

-04 90 1 2 AN500-06 160 3 4 Note) NPT thread is also available.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

0 Steel wire NBR Steel wire NBR XT010-20 XT010-21 XT041-1 4-16-6 Series VS3135/3145 Dimensions VS3135/3145 V100 SY SYJ VK VZ VT 3-Port size VP 4-Q Mounting hole 3-Q Mounting hole VG VP S070 VQ VS3135 VKF VQZ VZ Q Terminal dimensions Port size Rc VS A Model B C D E F G H J K L M N P R S T U VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19

PFA/PFW

Table 1 Table 2 Output type ON YES Hysteresis mode For air OFF P-1 P-2 Display Instantaneous flow rate l/min Cumulative flow rate l Large flow rate "P" H H H (fixed hysteresis) = 3 digits CFM x 10-2 ft3 x 10-1 ON CFM = ft3/min Window comparator mode NO OFF P-1 P-2 For water Large flow rate OUT1 Output mode Display Instantaneous flow rate l/min Cumulative flow rate l ON YES OUT2 is the

Electro-pneumatic Proportional Valve Series VEF/VEP 1

)) P A Inlet pressure P1 (MPa) 14-9-14 5 Electro-pneumatic Proportional Valve Series VEF/VEP Construction Flow type: VEF2121 (2 port) VEF3121 (3 port) Pressure type: VEP3121 (3 port) P(1) port R(3) port F.R.L.

VXA21/22

Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

Shuttle Valve/AND Valve with One-Touch Fittings

IN High pressure IN Low pressure IN P IN P OUT OUT OUT IN High pressure IN Low pressure OUT IN P IN P JIS symbol JIS symbol IN P OUT IN P SMC Pneumatics, Inc.

Electro-pneumatic Proportional Valve Series VEF/VEP

(3 port) P(1) port R(3) port F.R.L.

S Couplers Series KK/KKH/KK13

Lock 165 Series KK Plug (P) Socket (S) Male thread type Part no. Male thread type Body size Port size Part no.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Option Suck Back With flow rate adjustment With bypass With flow rate adjustment & bypass P .497 Variations [Integral fittings] P .495 Applicable tubing size Metric size Inch size Flow characteristics Av x 10 -6m 2 (Cv) Series Orifice diameter 3 4 6 8 10 12 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 2.1 (0.09) 8.4 (0.35) 2 LVD10 4 LVD20 31.2 (1.3) 45.6 (1.9) 120 (5) 8 LVD30 10 LVD40 16 LVD50 P .502

Compact 5-Port Solenoid Valve

Box p. 105 Terminal Block Box p. 106 Lead Wire p. 107 EX600 p. 108 EX245 p. 110 EX250 p. 112 EX260 p. 113 EX120 p. 114 Manifold Exploded View [Common Parts] p. 115 Type 10: How to Increase Connector Type Manifolds p. 115 For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10/ Manifold Parts Nos.

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.