,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

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Deep type (mm) G I H 533 71.1 25 197 G I H 15187 17 1:!

HRX-OM-W038

Model number: HRS040-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

PSxx-OMS0006CN

V ) -550 -1060 () 3585RH() CE/UKCA UL/CSA(E216656) 2 m 1(0 ms) 2 3MPa/kPa 490 M5 01 N01 C4H C6H N7H C4L C6L N7L M50.8 R1/8 NPT1/8 4 mm 6 mm 1/4 5/32 inch inch 4 mm 6 mm 1/4 5/32 inch inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 22 g 32 g 34 g 25 g 26 g 27 g 28 g 28 g 34 g 35 g 2(AWG26) 0.15 mm 1.0 mm (3 ) 3.4 -63No.PS-OMS0006CN-G M5 7 3.5 01/N01

Fieldbus system (PROFIBUS DP compliant)

(Only for EX510-S 01 ) -34No.EX-OMI0032-G No.

VT307

VV307 01 F V100 Mounting bracket Thread type SY VT307 manifold Nil F N T Rc G NPT NPTF SYJ Manifold valve can be easily converted from N.C.

Sine Rodless Cylinder Series REA/REB

Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

VFM300

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-48 5 Port Mechanical Valve Rubber Seal Series VFM300 How to Order S 01 02 0 VFM35 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 1 4 Roller lever 01 Black NPT N02 1 4 One way roller lever

Digital Flow Switch (Integrated display type)

PPS, PBT, FKM, SUS304, brass (Electroless nickel plating), Si, Au, GE4F One-touch fitting Straight: 40 g Straight: 48 g Rear: 55 g Rear: 63 g Body Straight: 72 g (G1/4: 117 g) Screw fitting Straight: 60 g Rear: 75 g Rear: 87 g Weight (G1/4: 132 g) Flow adjustment valve +34 g Lead wire +35 g Bracket +20 g Panel mount adapter +15 g DIN rail mounting bracket +65 g 1: Refer to the recommended

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 2.

EXxx-OMO0027

Pollution degree For use in Pollution Degree 3 Environment (UL508) Standard CE, UL(CSA), RoHS Weight 170 g 175 g 1: All unused connectors must have a seal cap fitted. 2: The UL agreement temperature is 0 to 50 oC.

ASR

Open knobs C and G gradually until the required speed is achieved. Make sure that knobs C and G are opened by the same number of rotations. Note 1) If the piston rod jerks, close knob G until the smooth operation is achieved. 3. Speed adjustment for return stroke The speed is adjusted with the dual speed controller. Open knob F gradually until the required speed is achieved. 4.

0.4

F 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil DIN rail mounting (For manifold) IN side port size OUT side port size D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

The electrical entry port {1021VQ1000: G 1/2, 1021VQ2000: G 3/4} permits connection of conduit fittings.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

The electrical entry port {1021VQ1000: G 1/2, 1021VQ2000: G 3/4} permits connection of conduit fittings.

HRX-OM-Q026

Piping thread type Nil Rc F G (Rc-G thread adapter set is included) *3Power supply '-20' only. *4W: Water-cooled only. N NPT (Rc-NPT thread adapter set is included) *5 Unit : MPa/ C (degree Celsius) *6 HRSH300-A-20/40 Air cooled only.

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.