Free Mount Cylinder

Port size 2-M5 x 0.8 [32: 2-Rc 1/8] 2-P through Seal washer Vacuum port size Socket (Only 16) M5 x 0.8 d Through d Through d through Hexagon width across flats 8 Width across flats L 2-P through HA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 GA A' B C d D E F FK FL FY GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKQ16

Modular Design with Uniform Body Style

18 g*18 g*18 g*18 g*18 *14 The combination of metal bowl 2 and 8 is not available. *15 For the pipe thread type: NPT This product is for overseas use only according to the New Measurement Act.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

Electric Actuator with Integrated Guide

Mount LTF6 M5 bolt 2 5.5 or M5 2 X n-Mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n-1) X pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 6.6 or M6 2 X n-Mounting

5 Port Solenoid Valve SY Series

(3.2) Note) Refer to the page 226 for dimensions of connector types. 7 SY3000/5000/7000/9000 Body Ported Dimensions: Series SY3000 [ ]: AC 2 position double Grommet (G), (H): SY3220(-F2) G H C4, N3 C6, N7 SY3220-M5(-F2) G H (A, B port) M5 x 0.8 2-M3 x 0.5 depth 3.5 (For mounting bracket) 9.5 4 23.5 25 16.9 28.5 [35.5] G: Approx. 300 H: Approx. 600 88.8 [93.2] (Lead wire length) 44.4 8.6

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

cable 6 to 12 D D K F G1/2 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts C H C J E J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port

MGP

P PB GB GA 2-P Q J K (Plug) PA + Stroke S G FA FB C + Stroke Refer to "Manufacture of Intermediate Strokes" on page 2 for intermediate strokes other than the standard strokes.

1

NCM Series CG1 Series CQ2 CQS NCA Bore size (mm) With rubber bumper With air cushion Standard type Bore size (mm) G G Th9 Th9 Rod side Head side Rod side Head side D0 0.043 0 0.043 1.5 12 1.5 15 15 20 (2.1) 5 4 3 3 0 0.052 0 0.052 16 1.5 1.5 20 20 25 (2.5) 5 4.5 3.5 3.5 -X 0 0.043 0 0.043 20 2 2 13 13 32 (3.3) 6 5 6 5 0 0.043 0 0.052 0 0.043 25 2 2 15 15 40 (3.9) 7 5 7 5 2032 2 21 50 (4.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Stopper Cylinder

in the same tube. *2 TF (G thread) for 20 indicates M5 x 0.8.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

CJ2

2 !3 !

Auto Switch Guide

x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator light Most sensitive position Most sensitive position

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) A B C D EH EV F G H J K L M O1 25 15 to 100 130.5 116 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range (mm)

PSE540/560

, Piping port/pressure sensor: Stainless steel 316L Material PSE56-: Oil proof 3-wire heavy-duty vinyl cable with air tube (0.2 mm2) Sensor cable PSE56--28: Oil proof 2-wire heavy-duty vinyl cable with air tube (0.2 mm2) 193 g 200 g 194 g 201 g 187 g 203 g 193 g Weight With sensor cable 101 g 108 g 102 g 109 g 95 g 111 g 101 g Without sensor cable 16-3-27 6 Series PSE560 Internal Circuit

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10-D CDRBU2W15, 20, 30-D (Figures below show size 20 actuators.) 2 x M3 x 0.5 through 2 x 3.5 through 2 x 3.5 through 17 2 x S2 2 x S1 10.5 B port A port 0.5 9 2 x S1 2 x S1 3 2 x M5 x 0.8 (Connection port) 10.5 2 x 3.5 through A port B port 2 x R D-90 ,D-S99 D-90A ,D-T99 3 D-97 D-93A (3m) 0.5m 18.5 2 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.