Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: 01N (NPT 1/8)

Series: 20, Voltage: 24VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1mm; Size 20: 1.6mm, Material: Stainless Steel Body, FKM Seal, Class B Coil, CE Compliance: -

Series: 10, Voltage: 24VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1mm; Size 20: 1.6mm, Material: Stainless Steel Body, FKM Seal, Class B Coil, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket), CE Compliance: Q (CE Marked)

ZQ-OM01401

-Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: 2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZQ-OM01401-B /ZQA / *3) 1)1 1.5 2) 3) *3) 1 1 () 3 - No.ZQ-OM01401-B () -() 4 - No.ZQ-OM01401-B 1.

IR1000/2000/3000

4 Rc(PT) 1/8 Port size Rc(PT) 1/4, 3/8, 1/2 Rc(PT) 1/4, 3/8, 1/2 Rc(PT) 1/4 Pressure gauge port Rc(PT) 1/8 (2 locations) Ambient and fluid temperature 5 to 60C (with no freezing) 0.64 0.30 0.14 0.71 0.35 Weight (kg) Note 1) With the condition of no flow on the output side.

VFS4000-OMY0001

equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Operation Maintenance Warning Caution 1. Do not rotate the cover. Rotating the cover when mounting the cylinder or screwing pipe fittings into the ports may cause damage from the cover joint section. 1. Grease packs Order grease for maintenance using the order number below. Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Integrated clevis type Note 1) Single clevis type Note 1) Bore size (mm) Seal kit no. Kit components Double clevis type Note 3) Note 1) Front trunnion type (1 pc.) Note 2) 20 25 CM2X20-PS Rear trunnion type (1 pc.) Note 2) Rod seal: 1 pc. CM2X25-PS 32 40 Boss-cut basic type (1 pc.) CM2X32-PS Grease pack (10g): 1 pc. Boss-cut flange type (1 pc.)

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Piston seal: 1 pc. 12 16 20 25 CQSX12-PS Rod seal: 1 pc. CQSX16-PS Tube gasket: 1 pc. CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4