Cylinder with Lock Series CNS

19 14 190 100 230 16 155 to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 16 180 to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275 18.5 215 (mm) Bore size (mm) GB GL GR J K KA M MM N P Q S T V VA H ZZ 125 140 160 23 25 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 85.5 303 87.5 20 23 110 432 28 30 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 93.5 343 95 20 28

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

CNS

19 14 190 100 230 155 16 Up to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 180 18.5 Up to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275 215 Bore size (mm) GB GL GR J K KA M MM N P Q S T V VA H ZZ 125 140 160 23 25 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 303 20 23 110 432 87.5 85.5 28 30 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 343 20 28 110 472

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

Table of Contents

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

Cylinder with Lock Series CNS

19 14 190 100 230 16 155 Up to 1000 50 47 161 160 245 1/2 3/8 128 136 36 90 63 35 14 19 20 212 112 255 16 180 Up to 1000 56 53 182 180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 18.5 215 Up to 1200 (mm) Bore size (mm) GB GL GR K KA M N P Q R S T V VA H ZZ J MA MM 125 140 160 23 25 30 15 31 19 35 1/2 85.5 25 303 87.5 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 28 30 30 15 31 19

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

16 16 14 16 17 14 16 18 9.0 9.0 9.0 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 15 19 20 15 19 20 14 16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS5600 VFS5110 VFS5100 1 2

OMU0023

Step Request data Response data Operation details 01 10 0600 000A Alarm history command to clear alarm 14 0 0 0 0 1 01 10 0600 000A history sent. (0 to 10 entries) 0 0 0 0 0 0 01 10 060A 000A Alarm history command to clear alarm 14 0 0 0 2 01 10 060A 000A history sent. (11 to 20 entries) 0 0 0 0 0 0 0 67 - Caution Ensure the alarm history is cleared only after taking corrective action in

IDX-OM-W089

Specification for Option_T 14 1 Safety instructions . 14 1 14 2 Specifications . 14 1 14 3 Remote operation . 14 2 14 4 How to connect the power supply and signal cable . 14 2 14 5 Electric circuit . 14 3 Chapter 15 Specification for Option_V 15 1 Safety instructions . 15 1 15 2 Specifications . 15 2 15 3 How to perform maintenance . 15 2 Chapter 16 Service Record 16 1 Service Record

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 46 58 25 12 H Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Refer to Semi-standard on page 562 for details. 16 SOL.B 18 17 14 16 15 SOL.A () () (+) (+) 12 Station 3 14 13 SOL.B Triangle mark indicator position 10 12 11 SOL.A () () (+) (+) 8 Station 4 9 10 SOL.B 6 8 7 SOL.A () () (+) (+) 19 Station 5 SOL.B 6 5 17 Note) When using the negative common specifications, use valves for negative common.

SMC Pneumatic Clean Series

18 25 Bore size 20 25 32 40 76 92 104 128 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 Note) End boss is machined on the flange for E.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Refer to Semi-standard on page 562 for details. 16 SOL.B 18 17 14 16 15 SOL.A () () (+) (+) 12 Station 3 14 13 SOL.B Triangle mark indicator position 10 12 11 SOL.A () () (+) (+) 8 Station 4 9 10 SOL.B 6 8 7 SOL.A () () (+) (+) 19 Station 5 SOL.B 6 5 17 Note) When using the negative common specifications, use valves for negative common.

HRX-OM-Q026

Flow switch Blue (DC COM) Brown (24 VDC) Terminal No. 14 Brown (24 VDC) 6 Terminal No. Flow switch 5 Terminal No. Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-12 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No.

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

VQ4000

Polarity Lead wire color Dot marking Release valve SOL.A 1 1 () (+) Black None SOL.B 14 14 (+) () Yellow Black 1 station 1 14 1 2 3 Stations Pressure switch SOL.A 2 2 () (+) Brown None 2 U side 15 VQC SOL.B 15 15 (+) () Pink Black 2 stations 3 16 4 SOL.A 3 3 () (+) Red None SOL.A 17 D side 5 SOL.B 16 16 () (+) Blue White 3 stations SQ SOL.B 18 6 19 SOL.A 4 4 () (+) Orange None SOL.A 7 SOL.B

Guide Cylinder/Compact Type Series MGC

190 129 350 to 500 14 207 146 350 to 600 14 210 146 350 to 800 15 236 191 Note 1) Dimensions marked with are not required for without rear plate.