CNG

XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 11 11 M6 x 0.75 3 12 40 193 (201) 30 17 62 215 (223) M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 11 10 (11) M8 x 1.0 3 12 40 196 (204) 35 17 62 218

RQ

50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut and accessories.

Process Valve Series VNA

(mm) 1 8 1 4 1 8 1 4 1 8 1 4 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.

Mini Free Mount Cylinder

coefficient: 0.2 8 6 1 4 0.1 Tightening torque Tightening torque 0.01 0.01 0.1 1 2.

Filter Regulator

8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95 234.1 155 45 38.4 M621.5 30 45 0 42.5

LJ1H

1 u !8 !2 @1 Section AA Parts list Material Note No. Description No.

High-precision Digital Pressure Switch ( compatible)

value (main display). (1) Press and hold the SET button between 1 and 3 seconds in measurement mode.

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

PSxx-OMV0003CN

55))UPDOWN SET -21No.PS-OMV0003CN-G (P1LP1H) 21P1L()P1H()WH1() (n1Ln1H) 31 OUT2 [F 1]OUT1[F 2]OUT2// -22No.PS-OMV0003CN-G <> () ,() SET1~3[SEt] [SEt]()[P_1][n_1]() () UPDOWNSET()(55) UP DOWN SET (delay)( )(55 ) UP DOWN ON/OFF 0.01[sec.]0.0060.00[sec.]

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

LG1H

depth 8 35 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

0.4

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc

SY

SS5Y54, #1 (#1 + #6 + #7 + #8 + #18) SS5Y5-45FU-B .

VFR

8 02 2 stations 1 2 1 2 U side mounting D U D side mounting 08 1 Side 2 Bottom 8 stations M Mixed Common Common Max: 8 stations For bottom ported: Rc 3/8 only.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

•

25 2B 14 5 23 8 6 23 8 8 29 12 6.2 4 1.8 12 29 6 23.5 8 8 29.5 1 2 6.2 4.5 2.3 ZPT3~ 32 35 14.5 5 23.5 8 29.5 1 2 Deep type F:M5X O .8 F:M6 x l F:M8 x l .25 F :~ vi D I E 1 G D I E IG D I E 1 G D I E G MOdel ,A ;B Ic ZPT25D 25 28 20 5 129 1 8 6 129 1 8 8 135 1 1 2 6.2 135 1 12 1 0 I 16 Flat type Deep type/ ZPT10D ' 16D Flat type Deep type/ ZPT40D only F F F F Widlh across Width acro5$ flats

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

EX120/121/122

L dimension L dimension No. 6 7 8 2 3 4 5 1 0 7 185.5 0 98 2 3 4 5 6 7 1 0 0 8 198 1 110.5 6 7 8 4 5 2 3 1 1 9 210.5 123 2 M12 input block (n) 6 7 8 3 4 5 2 2 10 223 135.5 3 L dimensions 6 7 8 9 5 4 3 11 235.5 4 148 9 10 8 7 6 4 12 248 5 160.5 Connector type For M (m + n = 2 to 8) 10 8 9 7 5 173 6 10 11 9 6 11 10 7 12 8 Connector type For T (n = 1 to 8) 1686 Decentralized Serial Wiring (GW

SYJ300/500/700

Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (