REA/REB

CV MVGQ CC RB J D-X 20Data 10-2-55 55 Series REAH Construction: 10, 15 Single axis type: REAH y !4 !8 !2 @1 i !3 q @0 !7 !9 #2 !1 w r t u @8 o #4 e !5 !6 #3 !0 #0 @9 #1 @3 @5 @6 N@4 REAH10 @7 @2 Component Parts No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Aluminum alloy Plate B q !

REA/REB

CV MVGQ CC RB J D-X 20Data 10-2-55 55 Series REAH Construction: 10, 15 Single axis type: REAH y !4 !8 i !2 @1 !3 q @0 !7 !9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com #2 !1 w r t u @8 o #4 e !6 !5 #0 @9 #1 #3 !0 @3 @5 @6 N@4 REAH10 @7 @2 Component Parts No.

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

REA/REB

4 !9 @7 !8 @2 !7 @6 #1 #0 @8 !0 @9 !1 #2 i !6 @3 @1 @5 @4 @0 REAS10 Parts list Parts list No. Description No.

Process Valve Series VNA

Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 Note 2)4 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Valve size 1 to 4 10 5 Note) Note 2)6 B: Slotted locking type B (tool required) Note 2)7 2 15 Note 2)9 3 20 Note 1) CE compliant: For D or DZ only Note 2) Semi-standard 25 4 1 1 1 2 32 5 1 4 1 2 Nil: Non-locking push type

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

4 i !2 w t !1 !3 q u !0 !2 r y e !5 o !

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

RQ

8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut and accessories.

Mini Free Mount Cylinder

socket head) Mounting condition 1 Mounting condition 2 Male connector Barb fitting M-5AU-3&4&6 M-5ALU-3&4&6 : Applicable to mounting condition 1, 2, 3 and 4. : Applicable to mounting condition 1, 2 and 3. : Applicable to mounting condition 1 and 3.

Filter Regulator

8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95 234.1 155 45 38.4 M621.5 30 45 0 42.5

Vacuum Module Series ZX

(VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.

LJ1H

4 !6!7 !4 A q i A !9 !1 u !8 !2 @1 Section AA Parts list Material Note No. Description No.

XL

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

CNG

Brake spring Taper ring Ball retainer Brake shoe holder Air pressure supply Air pressure exhaust Brake shoe Release piston Steel ball Locked state Unlocked state 9-5-10 11 Series CNG Cylinder with Lock Double Acting, Single Rod Construction #7 e$4!2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!

Guide Cylinder Series MGG

4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

High Vacuum Angle Valve

1 Spring (Material: SWP/Electroless nickel plating) Port 3(R) (Exhaust port) !4 Solenoid valve (Maintenance part)1 Shaft side exhaust !

LG1H

M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 8H10 depth 10 LJ1 LG1 LC1 LX LC6D/LC6C Switches Encoder signal line Bending radius 80 Motor power line Bending radius 80 35 8H10 depth 8 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth

39

1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Bellows seal, Manual operation: XMH, XYH Features 1 Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal Series XMA, XYA How to Order XMA XYA M9N 16 A A M9N 25 Angle type In-line type 1 2 3 4 5 6 7 2. Flange type 1.

0.4

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc