CY1

7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

Vacuum Module Series ZX

Rc G Note) Station 8 only 8 (Ordering example) If installed on station 1 and station 3: ZZX106-R 1 pc. ZX1101-K15LZ-EL(-Q) 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 (Dummy spacer) 4 pcs. NPTF When spacers are mounted alternately, specify them together. When retrofitting, 3 pcs. of M2.5 x 32 (for ZX) are necessary.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Note 3)The actual mounting position should be adjusted after confirming the auto switch performance. 5 5 3 5 5 3 5.5 5 4.5 2.5 5.5 5 4.5 2.5 1 3 3 1 3 3 1 3.5 3.5 2.5 0.5 3.5 3.5 2.5 0.5 1 3 1 5 5 3 5 5 3 5.5 5 4.5 2.5 5.5 5 4.5 2.5 1 7 7 5 1 7 7 5 7.5 7 6.5 4.5 7.5 7 6.5 4.5 MHS-16D MHS-20D MHS-25D MHSL3-16D MHSL3-20D MHSL3-25D MHS-32D MHS-

Process Valve Series VNA

(Back side port 2) Bracket (Option mark: B) U: Long hole for mounting 4 positions Main port 3 (3 port valve only) Flow indicator for 2 port valve VNA Dimensions (mm) VNB Model Main port 1, 2, 3 2 Port Pilot port 12(P1), 10(P2) 3 Port A B Note) C D E F G H I SGC 3 8 1 2 3 x 3 4 3 x 1 3 8 1 2 2 x 3 4 2 x 1 1 8 3 x 3 x VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A 2 x 2 x A B A B A B A B 60 80 100

XL

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

Mini Free Mount Cylinder

1 1 1 3 7 3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.

Filter Regulator

8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95 234.1 155 45 38.4 M621.5 30 45 0 42.5

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

LJ1H

3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40

39

1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Guide Cylinder Series MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

RQ

For detailed specifications, refer to page 7-9-1.

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

XM, XY

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

LG1H

depth 8 35 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

0.4

(Not applicable to Gateway unit) Connector type manifold Connector wiring diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin