HRX-OM-S004

1-5 1.7 Waste disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRS100/150-A-20/40/46 (In case of air cooled type) . 2-2 2.2.2 HRS100/150-W-20/40/46 (In case of water cooled type

HRX-OM-T002

1-5 1.7 Waste disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRS090-A-(In case of air cooled type) . 2-2 2.2.2 HRS090-W-(In case of water cooled type) . 2-3 2.3 Function of

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

REA/REB

2 t r e w u y !4 !9 @7 !8 @2 !7 @6 #1 #0 @8 !0 @9 !1 #2 i !6 @3 @1 @5 @4 @0 REAS10 Parts list Parts list No. Description No.

Vacuum Module Series ZX

(VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.

Process Valve Series VNA

Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 Note 2)4 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Valve size 1 to 4 10 5 Note) Note 2)6 B: Slotted locking type B (tool required) Note 2)7 2 15 Note 2)9 3 20 Note 1) CE compliant: For D or DZ only Note 2) Semi-standard 25 4 1 1 1 2 32 5 1 4 1 2 Nil: Non-locking push type

RQ

Installation and Removal of Snap Ring Selection Caution Caution 1. Use appropriate pliers (Type C snap ring installing tool) for installation and removal. 2.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

XL

/Mounting positions/Set quantity Set quantity Mounting position Set quantity 1 1 1 1 1 Mounting position Set quantity 1 1 1 1 Mounting position H2 (heater for 100C) H1 (heater for 80C) H3 (heater for 120C) XLA25-60M-1 XLA25-60M-2 XLA25-60M-2 XLA25-60M-3 XLA25-60M-2 XLA25-60M-1 XLA25-60M-1 XLA25-60M-2 XLA25-60M-3 XLA25-60B-1 XLA25-60B-1 XLA25-60B-2 XLA25-60B-2 XLA25-60B-3 XL -25 XL -40

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 w t !1 !3 q u !0 !2 r y e !5 o !

Modular Type Air Filters Series AF

Model AF20 AF40 AF40-06 AF50 1/8, 1/4 AF30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 Applicable Model Port size 1 Model AF30 AF40 AF40-06 AF50 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 30 AF X425 2 03 B Port size 1 30 AF 2 03 B X430 For high pressure Semi-standard: Select one each for a to c. Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Filter Regulator

8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95 234.1 155 45 38.4 M621.5 30 45 0 42.5

Mini Free Mount Cylinder

2, 3 and 4. : Applicable to mounting condition 1, 2 and 3. : Applicable to mounting condition 1 and 3.

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

LJ1H

1 !2 u @1 Section AA Parts list Material Note No. Description No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Load Black Blue Relay Black Blue Load Switch 1 Switch 1 Switch 1 Load Relay contact Brown Black Blue Brown Black Blue Brown Black Blue Switch 2 Relay Switch 2 Switch 2 Indication lights up when both switches are ON. 2-wire (2 pcs.)

Guide Cylinder Series MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

39

1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.