V R E 95 130 175 SCFM (ln/min) L Type 16 (400) V A C U U M P O R T S 660mm Hg L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !
I Wear ring Plastic I C 1 A040-07-305 W Cushion packing A NSR f1j Cushion packing B NBR MC-20 CM-050-16-128 CM-063-16-129 C 1 AQ50-07 -306 C 1 A063-07-307 MC-25 MC-20 I MC-25 @) Gasket for cushion valve NSR CK40-1697 @I Gasket for speed controller NBR iii) Detecting rod packing NSR CK40-1697 DYR5K 14(1.
2 3 4 PRESSURE SET 3 16-3-1 2 A single controller monitors up to 4 pressure sensors. 1 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 ZSE ISE Multi-channel Controller Series PSE200 Pressure Sensor Series PSE530 PSE Z I SE3 Multifunction 3 Space saving 1 PS Display calibration (P. 16-3-17) Each channel has an adjustable display function.
59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/
P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Unit part no.
OFF 1: ON Out of CH2 display range (When HHH and LLL are displayed). 10 CH3: Diagnostics 0: OFF 1: ON Out of CH3 display range (When HHH and LLL are displayed). 11 CH4: Diagnostics 0: OFF 1: ON Out of CH4 display range (When HHH and LLL are displayed). 12 Reservation 13 Fixed output 0: Normal output 1: Fixed output 14 Error 0: Normal 1: Abnormal 15 System error 0: Normal 1: Abnormal 16 to
20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking LOCK M8 x 1.25 Effective thread depth 13 Approx. 31.5 Rc 1/8 unlocking port (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Front cylinder port Rc 1/8 Rear cylinder port 2-5.4 through 2 x 2-9 counter bore depth
(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 18 Series VQ7-8 DIN Connector Type 2 position/Single : VQ7-8-FG-S Single (reverse pressure) : VQ7-8-YZ-S 154 56 (71) 82.5 71.5 154 49 (64) 49 (64) 82.5 56 (71) 31 (42) 31 (42) 2-7.5 Mounting hole 16 (20) (port A) 16 (20) (port B) R1 R2 P Manual override A B PB (22) 16 16 (23) 12 (16) (11) 10 75
8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position) 145 (Double) 55 77.5 121 PA 14 PB 12 1 R 3 5 65 54 P 39 (Pilot pressure EXH port) 4-1/8 SMC 21 R2 R1 17 17 (P , R port) 6-3/8 26.5 26.5 L Dimension n: Stations 10 9 8 7 6 5 4 3 2 1 Formula L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377 334 291 248 205 162 119
1 t @4 #1 #0 !9 i u !8 y r w !2 !4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !
8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5 19 52 52 52 96.5 17.5 35 22.5 32 22.5 43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in
8, 3/16, 1/4 LVC3 8 6, 8, 10 1/4, 3/8 LVC4 10 10, 12 3/8, 1/2 LVC5 16 12, 19 1/2, 3/4 LVC6 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.
60 l66l 8.03 t2a4) 4,66 '220) 1.57 4.02 h02) t.o7 (78) 0.98 (25) 2.05 (52) t.55 i14l 0.43 121) ).43 t l l I 1.89 (44) M22xL5 1.46 ) 7 9 (20t 457 1 1 1 5 1 1 . 1 0 (2Al r.21 :;dd5r 3 1 . 5 : 3 : l 2.36 (60) 2.gJ 171) 9.25 t235) I0.04 t255) 2.56 (65) 0.49 1 2 5 ) 1 . 1 5 t80l 9.61 1244\ (264) 1.57 4.57 ( 1 1 6 ) 3.62 (92) 1 . 1 8 (30) 2.05 (52) ).55 (14) 0 4 3 t21) 1.43 l l 1 ) 2.25 (54) M26xl
Please refer to the Fig. 9-15, Fig. 9-16 for the Cooling capacity*1 W details.
(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 71.5 31 6.5 12.5 28 14 12.8 M4 22 45.5 44 43.5 58 41 46.5 99 43.5 66 1/8 VCW22 18 36 74.5 31 8.5 12.5 28 18 12.8 M4 22 46.5 44 44.5 58 42 46.5 99 44.5 66 1/4 22 40 88 36.5 11 15 32 20 19 M5 24 57 46 55 60 52.5 48.5 101 55 68 1/4, 3/8 VCW32 30 50
20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking LOCK M8 x 1.25 Effective thread depth 13 Approx. 31.5 Rc 1/8 unlocking port (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Front cylinder port Rc 1/8 Rear cylinder port 2-5.4 through 2 x 2-9 counter bore depth
As a guide, adjust it within the smaller range than the values of L1 dimension in Table (1). Caution on Adjuster Option Table (1) MXP6 MXP10/12/16 With Shock Absorber L1 L1 L1 (mm) 9 (One side only) 9 (One side only) 7 6 7 7 8 8 Model MXP6-5 MXP6-10 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Caution 1. Do not rotate the screw set on bottom of shock absorber.
1 4 1 4" 18.5 39.4 34.4 32.0 26.6 5 16" 3 8" 19 1 4" 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 5 16" 3 8" 1 4" 5 16" 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 3 8" 3 8" 1 2 18.6 24 22.4 54.6 47.1 44.5 37.0 1 2" Note 1) Reference dimensions Note 2) Reference dimensions of Uni thread after installation.
(Crimping tool: Model DXT170-75-1) ZSE1-55 ZSE1--16/-17 Brown DC (+) OUT1 (white lead wire, red LED) can be set with pressure setting trimmer 1 (SET1). Main switch circuit (OUT1) Black + 12 to 24VDC Load 80mA OUT2 (green lead wire, green LED) can be set with pressure setting trimmer 2 (SET2).