High Purity Fluoropolymer

Model K J E L M H t W1 W2 LQ1P1A LQ1P2A LQ1P2B LQ1P2C LQ1P3A LQ1P3B LQ1P4A LQ1P4B LQ1P5A LQ1P5B LQ1P6A LQ1P6B 11.5 10 13 10.5 6 44 8 11 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" M 25 1 16.5 15 14 6 17 14.5 55.5 8 15 Class 6 23 20 17 7 24 20.5 69 8 21 28 24 21 7 28 24.5 78.5 8 26 39 29 26 9 43 36.5 100 13 39 49 36 10 39.5 55 48.5 133 20 51 15 High Purity Fluoropolymer Fittings

C92

1 !2 !3 No. !4 !5 !6 !7 !8 !

Clamp Cylinder with Lock Series CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 46 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 50 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 56 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port Rear cushion valve Top width across

Sensor Monitor

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum 101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

Modular F.R.L. Units

38.4 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 1/8 1/8 1/8 1/8 1/8 126.4 167.4 167.4 220.4 235.4 87.6 115.1 115.1 147.1 149.1 35.9 38.1 38.1 39.8 37.8 41.6 55.1 55.1 72.6 77.6 60 80 80 110 110 23.4 30.5 30.5 36.1 39.6 30 41 41 50 50 43.2 57.2 57.2 75.2 80.2 24 35 35 40 40 33 5.5 7 7 9 9 12 14 14 18 18 3.5 4 4 5 5 29 41 41 48 48 Model Semi-standard specifications Optional specifications

Low Friction Cylinders Series MQ

39.5 38 7 4 5 5 8 20 3.5 6.5 16 80.5 M4 x 0.7 M6 x 1.0 10 to 60 70.5 8 8 ( 7.8) 36 11.5 48.5 47 10 7 5 7 10 25.5 5.4 9 20 89 M5 x 0.8 M6 x 1.0 10 to 60 79 10 10 ( 9.8) 40 12 55 52 10 7 6 8 10 28 5.4 9 25 10 to 50, 75, 100 96.5 M6 x 1.0 M6 x 1.0 84.5 12 12 (11.8) 45 13.5 Rc 1/8 NPT 1/8 G 1/8 49.5 58 60 10 7 7 4.5 10 12 34 5.5 9 30 10 to 50, 75, 100 116 M8 x 1.25 M6 x 1.0 104 13

PSxx-OMV0003CN

55))UPDOWN SET -21No.PS-OMV0003CN-G (P1LP1H) 21P1L()P1H()WH1() (n1Ln1H) 31 OUT2 [F 1]OUT1[F 2]OUT2// -22No.PS-OMV0003CN-G <> () ,() SET1~3[SEt] [SEt]()[P_1][n_1]() () UPDOWNSET()(55) UP DOWN SET (delay)( )(55 ) UP DOWN ON/OFF 0.01[sec.]0.0060.00[sec.]

Mechanically Jointed Rodless Cylinders

9 r !1 @0 @2 @5 o @4 @3 !

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 Diaphragm Body 1 1 Chromate treatment Spring Valve guide 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm shell 1 1 Zinc chromate treatment Chromate treatment Washer Valve 1 1 Rubber lining material: HNBR Spring holder Valve spring 1 1 Zinc chromate treatment Seal Diaphragm 1 1 O-ring holder Diaphragm holder

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 Diaphragm Body 1 1 Chromate treatment Spring Valve guide 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm shell 1 1 Zinc chromate treatment Chromate treatment Washer Valve 1 1 Rubber lining material: HNBR Spring holder Valve spring 1 1 Zinc chromate treatment Seal Diaphragm 1 1 O-ring holder Diaphragm holder

REC

9 1 2 Piston Aluminum alloy Cushion seal NBR Chromated r @0 1 1 Piston rod Stainless steel Wear ring Resin Hard chrome plated t @1 1 1 Bushing Sintered oil-impregnated beaning Piston gasket NBR y @2 1 2 Seal retainer Rolled steel Holder gasket NBR u @3 1 Cushion seal holder Aluminum alloy Chromated i 1 Cushion ring A Electroless nickel plated Brass o 1 Cushion ring B Electroless nickel plated

PC Wiring System

Dimensions 10.5 10.5 178 (3.6) 1 C H C H R S 16.7 OUT IN AX/ 140A 28.3 0 45 4.1 53.5 5.1 (3.7) 55 1 1F 16 D 4 0 2 3 5 6 7 8 9 A B C E F 10 11 12 13 14 15 17 18 19 1A 1B 1C 1D 1E + + + + + + + + + + + + + + + + 4.5 5 5 Refer to page 50 in CAT.E02-20 for the junction cable part number.

Compact Cylinder with Lock Series CLQ

(mm) With auto switch B Without auto switch Stroke range (mm) A Bore size (mm) BP C OA Rc NPT G D E F G H I J K L M N O OB P Q RA RB T V Z B A 10 to 50 82 36 15.6 14 63 92 46 1/8 M5 x 0.8 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 1/4 53 16 4.2 1.6 16.5 19 depth 12 depth 10.5 75, 100 92 46 10 to 50 96.5 43.5 19.6 17.5 80 106.5 53.5 1/8 1/8 21 25 98 12.5 43 M16 x 2.0 132 6 22 10

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

Hydraulic Cylinders

49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Cylinder series Applicable bore size (mm) 10 16 20 25 32 40 50 63 6 BJ2-006 BJ3-1 CDJ2 BJ2-010 BJ3-1 BJ2-016 BJ3-1 CDVJ3/5, CDJ2X CDBJ2, CDLJ2 CDM2, CDBM2 CDM2X, CDM2Y CDLM2, CDVM3/5 CDG1, CDBG1 CDG1Y, MGG RHC MGC CDLG1, CDNG MLGC, REC CKG1 BM2-020 BJ3-1 BM2-032 BJ3-1 BM2-025 BJ3-1 BM2-040 BJ3-1 BMA2-063 BJ3-1 BMA2-050 BJ3-1 BMA2-020 BJ3-1 BMA2-032 BJ3-1 BMA2-025 BJ3-1 BMA2-040 BJ3-1 BMA2

OMR0032

Note 5) Cables are not included. 15 - 3.2 Parts description Details of the parts of the controller. (1) (2) (3) Remove the housing. (10) (8) (4) (5) ON (6) ON (7) OFF 1 2 3 4 5 6 (9) Pulse input signal switch (default) No.

PFxx-OMA1007

power supply voltage 1: The power supply voltage exceeds the specified value. 0: Other than the above case. 10 Alarm generation 1: Any one of bits 4 to 9 is "1". 0: Bit 4 to 9 of the Bit offset are "0". 11 Internal communication error 1: Error 0: No error 12 Built-in solenoid valve error 1: Error 0: No error 13 Internal system error 1: Error 0: No error 14 EEPROM error 1: EEPROM error 0:

LEC-OM071xx

Encoder Error of Module Gr.1 A.8A1 External Encoder Error of Sensor Gr.1 A.8A2 External Encoder Error of Position Gr.1 A.8A3 External Encoder Overspeed Gr.1 A.8A5 External Encoder Overheated Gr.1 A.8A6 Regeneration Error Gr.1 A.B31 Current Detection Error 1 Gr.1 9-3 9 Troubleshooting (contd) Alarm reset SigmaWin+ SigmaWin+ Servo motor Power [Alarm] [Setup] Alarm Alarm warning Stop ping

SQ1000/2000

A Black Red Station 1: 1 Station 1 Station 1: 2 1 2 3 4 Double wiring White SOL. B Red COM. Black SOL. A 1 COM SOL. A Station 1: 3 Black Red Station 2 Black Red White Unused Station 1: 4 COM SOL. A Station 2: 1 Black Red Stations for all double wiring Station 3 Station 2: 2 COM SOL. A A B Black Red White Station 2: 3 1 2 3 4 5 6 7 8 9 10 Station 4 Station 2: 4 2 3 4 5 6 7 8 9 10 SOL.