CNG

A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 50.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 59 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 Up to 300 20 to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 Up to 300 20 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 500

HRX-OM-T002

HRX-OM-T002 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Mini Free Mount Cylinder

Magnet) Cylinder model Mounting bolt size For Lateral Mounting Cylinder model Mounting bolt size For Axial Mounting Material: Structural steel Material: Structural steel C D A B 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 CDUJB12-5 -10 -15 -20 -25 -30 CDUJB16-5 -10 -15 -20 -25 -30 CDUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDUJS12-5 -10 -15 -20 -25 -30 CDUJS16-5

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with Bypass Piping Component Parts T1 81.4 93.3 99.8 T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Description No. 1 2 3 4 Qty. 1 1 1 1 Part no.

LJ1H

LEC-MR-RB-032 LEC-MR-RB-032 LEC-MR-RB-032 LEC-MR-RB-032 A1 A2 B1 B2 26 Series LJ1H20 Dimensions/LJ1H20PF 12.5 9.5 Work piece mounting reference plane 110 4 x M6 x 1 thread depth 15 67 20 4 x M8 x 1.25 thread depth 20 8H10 depth 10 Cable entry side Body mounting reference plane Z section detail 8H10 depth 8 130 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 3.3 92 55 90 82 A

VFS

Description Material Return spring Gasket VF4000-18-1 VF4000-20-1 VF4000-20-1 VF4000-18-2A VF4000-20-1 Stainless steel NBR o !0 !1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Vacuum Module Series ZX

1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

Standard Combinations

Threads for IN and OUT ports are not machined. 1/8, 1/4 40 40 28 11 11 1/8, 1/4 53 48 34 14 13 1/4, 3/8 70 54 42 18 15 How to Order Refer to the attachment table on page 4 or 7 for standard bypass port sizes applicable to ACG. 30 01 00 AKM Check valve Bypass port size for redirecting air flow Body size Body size 20 30 40 Port size Symbol 30 40 20 01 02 03 1/8 1/4 3/8 Thread type Nil N F Rc

Modular Type Air Filters Series AF

40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23 6.5 8 53 2.3 30 170 AF 70 165 18 35 38 75 35 50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb

Compact

0.05 ST 5, 10ST 15, 20 ST 5, 10 ST 15, 20 0.00 0 20 40 60 0.00 0 20 40 60 0.00 0 20 40 60 Load [N] Load [N] Load [N] ST = Stroke 14 MXZ Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Mounting D-M9mV D-M9mWV D-M9mAV D-M9m D-M9mW D-M9mA (1) Bottom mounting 5 10*2 15*1 15*1 (2) When mounting an auto switch into the groove from the top*3 15 15 30

Sensor Monitor

5 MPa 5 0.01 0.1 0.1 1 High pressure 10 MPa 10 0.01 0.1 0.1 1 20 MPa 20 0.01 0.1 0.1 2 25 MPa 25 0.02 0.2 0.2 2 Additional range 1 USEr It varies depending on the minimum unit setting of the additional range.

LG1H

1 Low Profile Single Axis Electric Actuator Series LG1H Series LG1H High Rigidity Direct Acting Guide Without coupling With coupling LJ1 LG1 LC1 LX LC6D/LC6C Switches Lead screw lead mm Mounting orientation Page Model Motor/Screw connection Series Motor type Guide type Ground ball screw Rolled ball screw Slide screw 10 20 10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor

7ND9071en

Tel. +358 20 483 150. Fax +358 20 483 151 North America, 44 Bowditch Drive, P.O. Box 8044, Shrewsbury, M A 01545, USA. Tel. +1 508 852 0200. Fax +1 508 852 8172 South America, Av. Independncia, 2500-Iporanga, 18087-101, Sorocaba-So Paulo, Brazil. Tel. +55 15 2102 9700. Fax +55 15 2102 9748 Asia Pacific, 238B Thomson Road, #17-01 Novena Square Tower B, Singapore 307685.

SY

stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

39

1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 NAAMS code ACA031M ACA032M ACA033M ACA034M ACA035M ACA036M NAAMS code ACA043M ACA044M ACA045M ACA046M ACA047M ACA048M A B C D E F G H I J A B C D E F G H I J Part no.

ZP

/Port size Symbol Connection 2 to 8 10 to 16 40, 50 20 to 32 20 20 N4 4 Nylon tube 25 25 6 Nylon tube N6 Barb fitting 32 32 Vacuum entry 4 Urethane tube U4 40 40 6 Urethane tube U6 50 50 M5 x 0.8 A5 Male thread M6 x 1 A6 M8 x 1 A8 Pad type (Refer to Table (1) for applications.)

Process Valve Series VNA

20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

MG

80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16 16 16 16 CY 1 1 MG Courtesy