7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

LJ1H

100 W 12 mm/12 mm lead Guide Series LJ1H10 How to Order 300 LJ1H10 F R 2 A1 PB S2 Auto switch Nil Without switch 1 2 3 4 5 6 NPN, A contact 1pc.

RQ

21 55 24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.

Vacuum Module Series ZX

Note 2) M5: Suffix -4, M6: Suffix -1 Note 3) M5: Suffix -1, M6: Suffix -2 Adapter D P3200152-12 (M2.5 x 28) Philips screw ZF M2.5 x 12 Philips screw How to order (1) Valve unit (Supply valve: Air operated) (For replacement) Adapter D (2) Individual spacer R1 ZP M2.5 x 12 Philips screw Adapter D individual spacer R1 assembly Assembly no.

HRX-OM-S004

HRX-OM-S004 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-T002

HRX-OM-T002 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Filter Regulator

How to Replace the Components] (P28-40) and [12. Disassembly Drawing] (P41-44). -12- 7 Bowl Assembly Specifications 1.

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 40.1 39.3 18.8 18 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 A 4 63.3 79.8 4-One-touch fitting [1(P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable tube O.D.: 8 10 12 1 P 1 P B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 + + One-touch fitting

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 1 3 5 6 100 VAC (50/60 Hz) 1 2 3 4 5 2 position single Note 2) 110 VAC (50/60 Hz) 24 VDC 12 VDC 2 position double (Latching) (1) (2) 3 position closed center (1) (2) 3 position exhaust center Electrical entry (2) 3 position pressure center Note 1) Note 2) LO MO L plug connector without connector M plug connector without connector (2 stations space are occupied.)

•

;.i Flat type Flat w~h rib (mm) ZPT02 1:6 y H Rat FIalwith rib M_I 1>A 1>8 C 0 E F G 1:4 H ZPT08 ZPno ZPTlOg 10 12 12 21 32.5 56.5 68.5 BaS B9 3 1.7 ZPT13 30 30 30 30 30 30 ZPT13g 13 15 12 21 32.5 56.5 68.5 188.5 89 3 1.8 .

ZP

flat 15 (Hexagon) 3.5 3.5 3.5 3.5 (12) (12) 5 5 1 1 2.5 2.5 6 10 15 10 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T04S-B3 Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 7 (Hexagon) 3.5 5 5.5 4 4 5 7 5 7 (10.5) (12) (12) 1 0.8 1 1 1.5 1.5 2.5 4 3 4 6 8 ZP2-T10S-B5 ZP2-T15S-B5 M5 x 0.8 Width across flat 15 (Hexagon) M5 x 0.8 Width across flat 10 (Hexagon

MG

-www.stevenengineering.com 16 16 12 12 1 1 0.1 0.1 10 50 100 200 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 50 50 10 10 40 Load weight m (kg) 40 Load weight m (kg) 5 5 32 32 25 25 20 1 20 1 16 16 12 12 0.1 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

Series 10-SV ® EX500 Decentralized Serial Wiring

One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Mixed 8 One-touch fitting 5/16" One-touch fitting 10-SV1000 10-SV1000 10 One-touch fitting 3/8" One-touch fitting 10-SV2000 10-SV2000 12 One-touch fitting 3/8" One-touch fitting 10-SV3000 10-SV3000 3/8" One-touch fitting 12 One-touch fitting 10-SV4000 NPT 3/8 10-SV4000 Rc 3/8 NPTF 3/8 G 3/8 For mixed specifications (M), indicate separately on the

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

One-touch fitting for 10 SV2000 SV2000 One-touch fitting for 6 One-touch fitting for 1/4" Protocol type SI unit Symbol One-touch fitting for 8 One-touch fitting for 5/16" DeviceNet PROFIBUS DP CC-Link EtherNet/IP One-touch fitting for 6 One-touch fitting for 1/4" One-touch fitting for 3/8" One-touch fitting for 12 SV3000 SV3000 One-touch fitting for 8 One-touch fitting for 5/16" EX500-S001