VQZ1000/2000/3000

C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5 39.5 Residual pressure

3 Port Air Operated Valve

N.O. 13.5 SYA 12 NC 26.2 65.2 58.2 3R 58.2 27 50 50.1 65.2 SYJA 1P 26.2 NO 12 VZA 1/4 1(P), 3(R) port 1/8 (Pitch) P = 27.5 12(PA) port 28 M5 x 0.8 (Breathing hole) VFA 7.5 L2 L1 VFRA (Station n) (Station 1) 1/8 12(PA) port VPA4 12 SYJA 73.5 54 VZA 37.5 11 2A 2A VTA 1/4 2(A) port (Pitch) P = 27.5 28 VGA 2 stations 83.5 68.5 111 96 138.5 123.5 166 151 193.5 178.5 221 206 248.5 233.5 276 261

Vacuum System Peripherals:

block assembly (Standard): SX3000-51-2A The following columns shall be filled in by SMC.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

on page 6-5-50.

CJ2

Mounting Auto switch model Number of switches 2 (same surface) 50 D-C7 D-C8 2(different surfaces) 15 Precautions Band mounting 1 10 D-H7 D-H7W (1) D-H7BAL (1) D-H7NF (1) 2 (same surface) 60 2 (different surfaces) 15 Be sure to read before handling.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

51 VQZ1000 2 to 20 stations l l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll

VFS

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Body Option Pilot type 0 1 Standard Direct manual override R Internal pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

With (1) DIN connector DIN terminal without connector DIN connector DIN terminal without connector Without Coil voltage (1) With (1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 With (w/o light) (1) YOS Note 1) DIN is applicable to VQZ2000, 3000.

Table of Contents

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

Table of Contents

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

CJ2

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

Swivels

1.19 7/16-20 7/16-20 73.7 mm 53.0 mm 19.0 mm 30.2 mm UNF-2A UNF-2A B Hex 2 Hex 1 PS610503-6-6 3.11 2.18 .88 1.31 9/16-18 9/16-18 78.9 mm 55.2 mm 22.2 mm 33.3 mm UNF-2A UNF-2A Port 2 PS810503-8-8 3.34 2.38 1.12 1.50 3/4-16 3/4-16 84.9 mm 60.3 mm 28.6 mm 36.5 mm UNF-2A UNF-2A Port 1 PS810503-10-10 3.50 2.48 1.12 1.50 7/8-14 7/8-14 88.9 mm 62.9 mm 28.6 mm 36.5 mm UNF-2A UNF-2A PS1210503-12-

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

/721-C8(-L) Rear ported !

MY1

Therefore, also check the allowable load for the selected conditions. 10 16 20 25 32 40 0.8 1.1 0.8 6.1 6.1 6.1 3.7 4.9 3.7 10.8 10.8 10.8 11 16 11 17.6 17.6 17.6 MY1H 23 26 23 27.5 27.5 27.5 39 50 39 39.2 39.2 39.2 50 50 39 50 50 50 The above values are the maximum allowable values for moment and load.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

MGG

, 50, 63, 80 and 100.) 13 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Non-contact Gripper

ZPT ZPR XT661 XT661 735 Non-contact Gripper XT661 Series How to Order Specifications Cyclone type 2A 4A 6A 8A 10A XT661 2A R Outer body diameter (mm) 20 40 60 80 100 Piping port size M5 x 0.8 Rc 1/8 Fluid Air* Outer body diameter: Operating pressure 0.01 to 0.5 MPa 2A 20 mm 4A 40 mm 6A 60 mm 8A 80 mm 10A 100 mm Proof pressure 0.75 MPa Ambient and operating temperature 5 to 60C (no freezing