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amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

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, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage Configuration Note 2) VQ1000 VQ2000 1 2 3 4 5 6 VQ0 100V AC (50/60Hz) 2 position single 1 2 3 4 5 200V AC (50/60Hz) 2 position double (latching) 110V AC (50/60Hz) Electrical entry (2) (1) 3 position closed center 220V AC (50/60Hz) 24V DC 12V DC Grommet (Except for double (latching) and AC.)

CJ2

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

A

/DC or less 50 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C80L 48VAC/DC 40 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C80L 100VAC/DC 20 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C73CL 24VDC 5 ~ 40 None Sequence Controller Connector D-C7 type D-C8 type D-C80CL 24VAC/DC or less

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

/721-C8(-L) Rear ported !

VFS

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Body Option Pilot type 0 1 Standard Direct manual override R Internal pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 9 Other VFS VFR 4 5 6 VQ7 7 Option Body Option Pilot type 0 1 Standard Direct manual override Nil R Internal pilot External pilot Option Option How to Order Pilot Valve Assembly SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50

CM2

Minimum Strokes for Auto Switches Mounting (mm) Number of switches 2 n Auto switch model On the same surface On different surfaces On the same surface 1 On different surfaces D-C7 D-C8 D-H7l D-H7lW D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50+45(n2) 50 15 n2 2 15+45 ( ) (n=2, 4, 6) 10 60+45(n2) 60 15 n2 2 15+50 ( ) 10 65 15 (n=2, 4, 6) 65+50(n2) n2 2 20+50 ( ) (n=2, 4, 6) D-H7LF 10 65 20 D-B5

2-Color Display Digital Flow Switch Series PFM

--E-/PFM7--FPNP + External input type PFM7--HBrown DC (+) Black OUT1 Max. 80 mA Load White OUT2 (PFM7--Bonly) 0 V or Load 50 msec 50 msec 909 Series PFM7 Dimensions PFM7-C4/C6/C8/N7 A (mm) 48 One-touch fitting Applicable tube O.D.

Vacuum System Peripherals:

block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

MGG

, 50, 63, 80 and 100.) 13 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

0.55

to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other 1 2 3 Indicator light is not available for grommet type.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

32, 40, 50, 63, 80 and 100.) 8-21-18 18 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

VZ5000

) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

RSQ

w/ Onetouch fittings are 20 to 50.

AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

Stopper Cylinder Adjustable Mounting Height Type Series RSG

U A 38.2 Auto switch mounting positions Auto switch mounting height (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL U D-C7 D-C8 D-C73C D-C80 Auto switch model D-H7W D-H7F D-H7BAL D-H7 D-H7C D-C73C D-C80C D-H7C Bore size (mm) A B A B A B U U 40 22.0 26.0 21.0 25.0 19.5 23.5 35.0 38.0 37.5 50 30.0 18 29.0 17.0 27.5 15.5 40.5 43.5 43.0 26 Series RSDG Auto Switch Internal Circuits Lead wire colors inside