SZ3000

Double wiring specification Double wiring specification Connector entry direction 04 05 09 10 4 stations 9 stations 1: Vertical connector 2: Horizontal connector 5 stations 10 stations Specified wiring (up to 19 solenoids possible) Specified wiring (up to 9 solenoids possible) ... ... ... ... 09 19 9 stations 19 stations Note 1) Double wiring specifications: Single, double and 3 position

OMU0023

0 1 "12h" 48 5th shift 0 1 1 0 1 1 0 0 1 1 0 1 0 1 0 0 0 49 6th shift 0 0 1 1 0 1 1 0 0 1 1 0 1 0 1 0 0 50 7th shift 0 0 0 1 1 0 1 1 0 0 1 1 0 1 0 1 0 51 8th shift, ExOR A001h 1 0 1 0 1 1 0 1 1 0 0 1 1 0 1 1 1 52 Load 6th byte "34h" 0 0 0 0 0 0 0 0 0 0 1 1 0 1 0 0 0 53 ExOR step 51 with step 52 1 0 1 0 1 1 0 1 1 0 1 0 1 1 1 1 0 54 1st shift, ExOR A001h 1 1 1 1 0 1 1 0 1 1 0 1 0 1 1 0 1 55

Dual Rod Cylinder Series CXSJ/CXS

13(11.5) 8(9) D-A93 19(20) 14.5(15.5) 6.5(7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for auto switch mounting position for stroke end detection.

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

Clamp Cylinder Series CK1

Description Material Qty Note 18 19 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Retaining ring Clevis bushing Chromated Hard anodized Chromated Hard chrome plated 2 Steel wire 1 1 1 1 1 1 2 3 2 4 1 2 2 1 1 1 Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Copper alloy Aluminum alloy Aluminum alloy

SMC Electronic Switch Series Variations

Output Specifications 14 15 16 17 18 19 55 NPN Open Collector 30V, 80mA Model Output method Hysteresis Analog output Number of outputs Indicator light Trimmer adjustment PNP Open Collector 80mA 1 to 10% of set press. (Variable) 3% F.S. or less (Fixed) 1 to 10% of set prss. (Variable) 1 to 5V 1-10% of set press.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

13

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc

Escapements Series MIW/MIS

(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

27 32 32 37 37 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 10 (12) 10 (12) 10 (12) 10 (13) 12 (14) 12 (14) 16 (20) 16 (20) 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 0 0 0 23 23 20 20 20 114 (122) 119 (127) 121 (129) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) Up to

HRX-OM-X037

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.4 1.8 2.5 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water 1, DI water (pure water) 9 CH2 : Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.0 1 6.0 1

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

AW

160 201 239 242 409 25 40 53 70 75 95 1/16 1/8 1/8 1/4 1/4 1/4 25 40 55 80 80 20 AR M38 x 1.5 M42 x 1.5 1/4, 3/8, 1/2 3/4 3/4, 1 AL M42 x 1.5 AW Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge M 25 30 41 50 50 70 Model AG N 28 34 40 54 54 66 Q 30 44 46 54 56 66 R 4.5

0.4

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

CV/MVGQ

, 16 D-A59W n (Same side) 90 100 110 120 15 1 2 (Different sides, Same side), 1 25 110 120 130 140 D-F5NTL n = 2, 4, 6, 8 25 + 55 (n 2) 2 110 + 55 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 130 + 55 (n 4) 2 140 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) 15 75 90 90 100 100 110 110 Different sides 2 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G59F D-G5NTL Same side

2–4

70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x

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N.O. 2-port 7 MPa 59 14 19 63 19 61 3 MPa 7 MPa 3 MPa 7 MPa 52 59 52 59 71 56 59 56 59 71 79 55 17 14 17 14 7 7 14 7 14 7 9 9 22 19 22 19 12 12 19 12 19 12 15 15 56 63 56 63 75 60 63 60 63 75 83 59 22 19 22 19 12 12 19 12 19 12 15 15 54 61 54 61 73 58 61 58 61 73 81 57 SGH200 3-port 3-port dual pressure type N.C.

LJ1H

1 !2 u @1 Section AA Parts list Material Note No. Description No.

High performance type Step Motor Controller (Servo/24 VDC)

0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.