Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve 8 1/4 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 2.2 1.4 1.7 2.1 1.4 1.8 2.1 2.0 1.5 1.9
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 32 BQ-2 BMU1-025 80 BQ-2 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
8 83.2 87.6 71.8 41.6 40 21 5 30 24 33 5.5 11.5 3.5 29 38 1/8, 1/4 AC30D-D 1/8 110.2 115.3 86.5 30 55.1 55 26.5 3.5 41 35 7 14 6 42.5 42.5 1/4, 3/8 AC40D-D 1/8 145.2 147.1 91.5 38.4 72.6 80 35.5 0 50 40 55 9 18 7 50 65 1/4, 3/8, 1/2 AC40D-06-D 1/8 155.2 149.1 93 38.4 77.6 80 35.5 0 50 40 55 9 18 7 50 65 3/4 Options Semi-standard specifications Metal bowl with Digital level gauge With auto
8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95 234.1 155 45 38.4 M621.5 30 45 0 42.5
52 10 7 6 8 10 28 5.4 9 25 10 to 50, 75, 100 96.5 M6 x 1.0 M6 x 1.0 84.5 12 12 (11.8) 45 13.5 Rc 1/8 NPT 1/8 G 1/8 49.5 58 60 10 7 7 4.5 10 12 34 5.5 9 30 10 to 50, 75, 100 116 M8 x 1.25 M6 x 1.0 104 13 16 (15.8) 52 17.5 Rc 1/8 NPT 1/8 G 1/8 57 71 69 10 7 10 5 14 12 40 5.5 9 40 10 to 50, 75, 100 116 M8 x 1.25 M8 x 1.25 104 13 16 (15.8) 64 17.5 Rc 1/4 NPT 1/4 G 1/4 71 71 86 14 8 10 7 14
0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 port Base mounted 2 position M5 x 0.8 1/8 (For manifold 56 66 3 position 58 base only) Note 1) Dedicated for manifold base.
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
0.8 31.5 38 (Pilot port) 64 2-3.2 Manual override 69.5 14 35 (For mounting) 89 Manual override 1/8,1/4 (P, A, B port) 29 28 25 21 1.6 14 89 18 2-1.8 (Bleed port) 55 With fiflter (80 mesh) 2-1.8 (Bleed port) 40 25.5 20 11.5 12 R1 R2 P With fiflter (80 mesh) 18 22 22 1/4 27.2 63 1/8 (Piping port) (R1, R2 port) 5-2-28 Series SYJ3000 Manifold Specifications Manifold Standard Manifold Specifications
Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.
/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller
1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3
H F G JIS Symbol (A) Lockable at the time of exhaust E 2 C D 1 3 (P) (R) Effective area mm2 (Cv) Model Port Size EXH 1/8 1/4 3/8 IN, OUT 1/4 3/8 1/2 IN to OUT 14 (0.76) 31 (1.68) 55 (2.98) OUT to EXH 16 (0.87) 29 (1.57) 42 (2.28) VHS20 VHS30 VHS40 A Paint color (Standard) Handle: Red Body: Platinum silver Use an air filter on the IN side for operating protection.
Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.
1 !2 u @1 Section AA Parts list Material Note No. Description No.
Length 136016-1A 136016-2A 136016-3A 136016-4A 136016-5A 136016-6A 136016-7A 136016-8A 136016-9A 136016-10A 16 14 1 SRH 28 2 42 3 SRP 56 4 70 5 SRF Tie-rod for centralized supply block 84 6 98 7 ITV 112 8 126 9 IC 140 10 For 1 station 14 mm x 1 station = 14 mm Length ITVH For adding a regulator Tie-rod part no.
M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up to 700 1/8 146 20 8 25 219 32 M26 x 1.5 Up to 1000 1/8 159 20 8 25 232 40 M32 x 2 Up to 1000 1/4 181 23 10
x 1.25 thread depth 16 (N-1) x H G GG HH H 9 8H9 +0.036 NN-M8 x 1.25 thread depth 16 depth 9 0 Bottom through hole 6.6 8H9 +0.036depth 9 0 E F G F E J HH H GG Model NN Z N L K 105 270 120 195 60 MXW25-175 490 6 63 34 142 275 155 225 60 MXW25-200 540 6 88 59 165 305 175 245 55 55 MXW25-225 1 590 7 113 84 187 335 200 275 60 67 MXW25-250 1 640 7 138 109 210 360 225 300 65 80 MXW25-
-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1
TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0