Thermo-chiller

/Japanese 1 pc.), Anchor bolt fixing brackets 2 pcs.(including four M8 bolts), Cable accessory 1 pc. (For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Digital Flow Switches

2, NPT 2, G 2 46 M6 x 1 9 0V 75 220 55 114 89 75 56 M6 x 1 9 50msec PF2A7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

Compact Cylinder with Lock Series CLQ

10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking LOCK M8 x 1.25 Effective thread depth 13 Approx. 31.5 Rc 1/8 unlocking port (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Front cylinder port Rc 1/8 Rear cylinder port 2-5.4 through 2 x 2-9 counter bore depth 7 9 7.5 60 6.5 16

Stroke Reading Cylinder and Counter

0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

SMC Basic Pneumatics

9 1 9 1 9 1 9 20 21 21 21 21 22 22 6 ACTUATORS Linar Cylinders Single Acting Cylinder Double Acting Cylinder Cylinder Construction Cushioning Special Cylinder Options Double Rod Non Botaling Bod Twin Rod Flat Cylinder Tandem Cylinder Multi Position Cylinder Cylinder Mounting Floating Joints Buckling Strength Cylinder Sizing Cylinder Force Thoretical Force Bequked Force 49 49 49 49 50 9U 51

Modular Type Lubricators Series AL

12316 123156 12314PA Sight dome 3 1 Lubrication plug assembly 4 1 123528A Standard Bumper assembly 5 1 Note 1) -2, -8 123528-1A Note 1) Needle stud assembly 6 1 123128PA 124232A 123321-1A 123321-4A 12318 123111 113136 KA00466 Standard -8 -1 Siphon tube assembly 7 1 Sight dome seal Siphon nut seal O-ring O-ring 8 9 10 11 12 13 Urethane rubber 1 1 1 1 1 1 Urethane rubber NBR NBR Bumper retainer

%silltr

9 1 9 1 9 1 9 20 21 21 21 21 22 22 6 ACTUATORS Linar Cylinders Single Acting Cylinder Double Acting Cylinder Cylinder Construction Cushioning Special Cylinder Options Double Rod Non Botaling Bod Twin Rod Flat Cylinder Tandem Cylinder Multi Position Cylinder Cylinder Mounting Floating Joints Buckling Strength Cylinder Sizing Cylinder Force Thoretical Force Bequked Force 49 49 49 49 50 9U 51

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1 t @4 #1 #0 !9 i u !8 y r w !2 !4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1) 0.05 l/pulse 0.1 l/pulse 0.5 l/pulse l/min, gal(US)/min l, gal(US) Real-time flow rate Accumulated flow Display units Note 1) 0 to 9 l, 0 to 9 gal(US) Accumulated flow range Note 1) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC (ripple 10% or less) (With power supply polarity protection) 55 mA or less (Not including the current consumption of the sensor

KP/KPQ/KPG

25.7 9 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 3.5 10.4 3.5 20.7 18 10 D1 6 9 12.8 9 22.8 19.5 D2 L2 A 14 8 12 22 15.2 15 26.3 21.5 H Connection threads 10 35 18.5 25 29.4 24 17 17 12 50 20.9 40 31.4 25 22

Series KP/KPQ/KPG

26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 3.5 10.4 3.5 20.7 18 10 D1 6 9 12.8 9 22.8 19.5 D2 L2 A 14 8 12 22 15.2 15 26.3 21.5 H Connection threads 10 35 18.5 25 29.4 24 17 17 12 50 20.9 40 31.4 25 22

VVX31/32/33

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

AMH

160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMH250 1 2 3 8 1 2 , AMH350 3 4 1 2 3 4 , AMH450 1 1 1 1 AMH550 AMH650 3 4 1 2 , , 14-20-34 6 Micro Mist Separator with Prefilter Series AMH AMH850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

With (1) DIN connector DIN terminal without connector DIN connector DIN terminal without connector Without Coil voltage (1) With (1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 With (w/o light) (1) YOS Note 1) DIN is applicable to VQZ2000, 3000.

LG1H

MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LG1-1-G05 1 (for motor) 2 LG1-1-R05 MR-JCCBL5M (for encoder) DP9320081-2 (for motor) DP9320089-2 (for encoder) LG1-1-Y05 3 1 When the Matsushita Electric Industrial Co., Ltd. motor driver is selected, in addition to the cable, a power connector (MOLEX 556910R) and an interface connector (Sumitomo/3-M Limited 10126-3000VE) are also required