MTS

9 y !7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M10 x 1.25 52 1 12 28 40 Rod end nut 15 Flat washer 19.6 10 17.5 7 7 10 28 32.5 + Stroke 22.5 40 55 + Stroke 17 6 Note 1) Standard strokes available in 5 mm increments.

Cylinder with Lock Series CNG

201 to 350 201 to 350 10 (12) 6.5 M5 x 0.8 20 to 300 to 300 96 22 19.5 17 45 103 1/8 57 16.5 10 25 9 7 10 6 31 301 to 400 301 to 400 10 (12) 6.5 M5 x 0.8 20 to 300 to 300 97 22 19.5 17 45 104 1/8 57 20 12 25 9 7 10 6 38 301 to 450 301 to 450 10 (13) 7 M6 x 1 20 to 300 to 300 104 30 27 19 52 112 1/8 65.5 26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M

CG1

Basic Mounting CG1N20SCG120, #1 CG1N25SCG125, #1 CG1N32SCG132, #1 CG1N40SCG140, #1 CG1N50SCG150, #1 CG1N63SCG163, #1 CG1N80SCG180, #1 CG1N100SCG1100, #1 Foot : Add #2 Front flange : Add #3 Rear flange : Add #4 Front trunnion : Add #5 Rear trunnion : Add #6 1.6-9 Series CG1 With Mounting Bracket Clevis (mm) Bore (mm) Stroke range (mm) TH TF TE V RR L CZ CX B CD 20 25 32 40 50 63 80 100 25

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

Compact Cylinder with Air Cushion and Lock Series RLQ

with Air Cushion and Lock Series RLQ Dimensions/63 (Emergency Stop) Foot type/RLQL63 41 55 + Stroke 18 46 91.5 Special cap bolt 5 3.2 95 113 4-11 9 16.2 9 16.2 70 + Stroke 122.2 + Stroke Rod end nut 43.5 Front flange type/RLQF63 60 80 9 92 108 4-9 41 55 + Stroke 18 114 + Stroke Rod end nut 43.5 Rear flange/RLQG63 60 80 4-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Rod end nut 43.5 4-M8 x 1.25

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 ( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5

KR

(mm) A Weight (g) L2 M D1 D2 L1 Model Urethane 2-applicable tubing KAY23-M5 15 9.6 28.5 15.5 M5 x 0.8 M6 x 1 8 8 8 15.5 19.5 33 3.4 2.9 9 1 8 KAY23-M6 KAY23-U01 10 3.2 17.5 10 KAY04-M5 KAY04-M6 16 18 18.5 15.5 M5 x 0.8 M6 x 1 8 29.5 6 4.6 4.6 8 10.4 16 4 1 8 KAY04-U01 1 4 KAY04-U02 22 34 34.5 15 20 9 14 10 10 18 6.4 6.4 KAY06-M5 KAY06-M6 16.5 20 20.5 16 M5 x 0.8 M6 x 1 32

RQ

For detailed specifications, refer to page 7-9-1.

Modular Type Air Filters Series AF

Description Material Standard -7 1 1 11352-5B 11352-5S Bronze Stainless steel 2 Element Standard -2 -6 -8 -9 AF11-4(11316A) AF11-4-2 AF11-4-6-(1131123A) AF-8 AF11-4-9(123120) 3 Bowl assembly 1 JIS B2401 G130 4 1 NBR 630332 O-ring O-ring Element seal Deflector 5 7 8 1 2 1 NBR NBR Aluminum ADC Aluminum casted 113136 11217 11346 11344 113136 112310 11355 11354 Component Parts Material AF800

VFR

Cable Color List of Each Terminal No. 3 5 7 Red 9 Blue 11 13 2 4 6 8 Red Yes 10 Blue Yes 12 1 Terminal no. Lead wire color Dot marking 1 9 Gray 10 11 12 2 3 Red 4 5 6 Pink 7 Blue 8 Terminal no.

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

High Vacuum Angle Valve, XL Series

pressure to 1 x 10-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas permeation {Torr l/s} External Operating time s Note 2) 0.08 0.15 0.35 0.4 0.54 0.7 Flange type KF (NW), K (DN) KF

CXS

3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

Guide Cylinder Series MGG

1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

MG

1!9 i @0 @4 !0 y @3 !2 !0 r o @2 e !

•

flats 1 9 .

JXCx-OMT0061CN

No.JXC-OMT0061CN CC-Link (DC24V) / LECPMJ 1 . 4 2. . 6 2.1 . 6 2.2 . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8(). 11 9 . 11 3. . 12 3.1 . 12 3.2 . 13 3.3 . 14 (1) (LECPMJ-) . 14 (2) DIN (LECPMJD-) . 14 3.4 . 15 (1) . 15 (2) . 15 (3) . 16 4. . 17 4.1 (STATION NO.B RATE) . 17 4.2 . 18 4.3 PLC . 18 5. . 19 5.1 CN1: . 19 5.2 CN2CN3: . 19 5.3

XM, XY

1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity