Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3 x 2 4 x 3 4 x 3 3 x 2 6 x 4 6 x 4 8 x 6 6 x 4 10 x 8 10 x 8 6 x 4 8 x 6 10 x 8 12 x 10 12 x 10 19 x 16 19 x 16 25 x 22 1 2 4 x 3 1/4" x 5/32" 2 6 x 4 3/8" x 1/4" 3 1/4" x 5/32" 10 x 8 3 1/2" x 3/8" 4 8 x 6 4 12 x 10 3/8" x 1/4" 5 19 x 16 6 3/4" x 5/8" 25 x 22 5 B side 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1" x 7/8" C side A side 6 3/4" x 5/8" 1/2" x 3/8

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Square Tube Type Air Cylinder Series MB1

8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type

7

Description Material Qty Note 18 19 20 21 22 23 24 25 26 27 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Clevis bushing Coil scraper Rod seal Piston seal Tube gasket Magnet holder Magnet Switch mounting rod Chromated Hard anodized Chromated 1 1 1 1 1 1 1 2 1 1 1 1 1 1 2 2 4 1 2 2 1 1 1 1 2 Phosphor bronze NBR

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) C B CV DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 84.5 1.5 1.5 2.5 2.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 9 12.5 112 120 148 162 M6 24 27 32 39 M8 x 1.25 20 20 22 22 M8 x 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 62.5 24 27 32 39 11 11 14 14 30 30 40 50 16 16 20 20 34 40 46 58 7.5 7.5 9 9 Rc 1/8 Rc 1/

KR

10 28.4 28.4 21 1 2 KAY10-U04 30 49 51 31 35 22 1 4 3 8 KAY12-U02 KAY12-U03 49.5 50.5 27 28 17 20.9 17 12 28.5 45.4 45.4 22 1 2 KAY12-U04 31 51.5 22 55 Reference dimensions after Uni thread installation.

CG5-S

10 AS4311FG-04-10 AS3311FG-02-12 -03-12 AS4311FG-04-12 R 1/4 10 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 12 In-line Type AS-FG JIS symbol SUS303 Model Model In-line type Applicable tubing O.D.

2/3 Port Valve

port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36

CG5-S

10 AS4311FG-04-10 AS3311FG-02-12 -03-12 AS4311FG-04-12 R 1/4 10 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 12 In-line Type AS-FG JIS symbol SUS303 Model Model In-line type Applicable tubing O.D.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

NN P RR S U Z ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 23 f8 to 800 18 13 10 16 10 16 12 8 41 5 30 5 M8 x 1.25 13 26 19 15 M22 x 1.5 1/8 13.5 81 14 136 149.5 15.5 25 25 f8 to 800 22 17 10 16 12 16 12 8 46 6 32 5.5 M10 x 1.25 13 28 19 15 M24 x 1.5 1/8 14.5 81 15 142 156.5 19.5 32 31 f8 to 800 24 22 12 16 16 19 12 8 53 8 40 7.5 M14 x 1.5 13 36 19 15 M30 x 1.5 1/8 18.5 87

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

16.5 25.5 90 87 115 10 11 M6 x 1.0 M14 x 1.5 Rc 1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc 1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 12 10.5 M8 x 1.25 M20 x 1.5 Rc 1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 PA dimensions are for split from center.

CNG

2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169 (178) 12 10 (12) 107 15 (16) 33 8 4 12 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ e f h ZZ H 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke 40 193 (201) 30 17 62 215 (223) 40 196 (204) 35 17 62 218 (226) 50 221 (230) 35 17 70 241 (250) Note) ( ): Denotes

CNG

141 (149) 35 178 (186) 30 22 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 215 (223) 31 151 (159) 40 193 (201) 30 24 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 5.5 7 60 30 75 3 12 M5 x 0.8 218 (226) 38 154 (162) 40 196 (204) 35 24 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 6.6 7 60 30 75 3 12 M5 x 0.8 241 (250) 47 169 (178) 50 221 (230) 35 25 70 6 14 M14 x 1.5 44 1/8

A

8 02 1/ 4 03 3/ 8 04 1/ 2 06 3/ 4 10 1 12 1 1/ 4 14 1 1/ 2 20 2 (A1 only) One Touch C06 6 (B1 only) C08 8 C10 10 C12 12 (A1 only) S Y M B O L S S E R I E S A1 Noise Reduction at 40dB(A) B1 Noise Reduction at 38dB(A) D I M E N S I O N S MODEL (THREAD CONNECTION) Model Port Size Effective Weight Dimensions (mm) orifice (mm2) (g) A B C ANA1-01 1/8 10 4 37 16 ANA1-02 1/4 15 14 64 22 18 ANA1

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

Cylinder with Lock Series CNG

169 (178) 107 8 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc(PT) 1/8 28 2.5 81 12 10 (12) 15 (16) 33 20 4 12 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 l 0.25 ZZ 178 (186) H e f h ZZ 35 30 55 198 (206) 16 193 (201) 40 30 62 215 (223) 17 Stroke x 196 (204) 40 35 62 218 (226) 17 221 (230) 50 35 70 241 (250) 17 Note) Dimensions inside ( ) are for long strokes.

LEC-OM069xx

Examples of Servo System Configurations.1-10 1.5.1 Connecting to LECYM2-V DRIVER.1-10 1.6 DRIVER Model Designation.1-12 1.7 Inspection and Maintenance.1-13 1.8 Installation Environment and Applicable Standards.1-14 1.8.1 DRIVER Installation Environment. 1-14 1.8.2 Installation Conditions for Applicable Standards.1-15 1.8.3 Conditions Corresponding to Low Voltage Directive. 1-15 1.9 DRIVER