CL

11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405 419 440 9-3-10 43 Series CL1 Lock-up Cylinder Double Acting, Single Rod Rod Side Flange Style (F)/Long

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Without rod boot With rod boot H ZZ d* e* f h l ZZ 40 11 M14 x 1.5 27 1/4 42 11 20 45 153 60 9 12 80 42 100 51 215 52 43 15 59 1/4 stroke 223 50 11 M18 x 1.5 30 3/8 46 10 21 50 168 70 9 12 90 50 110 58 237 58 52 15 66 1/4 stroke 245 63 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 86 11.5 15 105 59 130 58 254 58 52 17.5 66 1/4 stroke 262 80 17 M22 x 1.5 37 1/2 55 15 23 70 208 102 13.5 18 130 76 160

Electric Actuator

Note 3) The Z phase first detecting position from the stroke end of the motor side. 11-LEFS40;;-200-; 11-LEFS40;;-200B-; 11-LEFS40;;-300-; 11-LEFS40;;-300B-; 11-LEFS40;;-400-; 11-LEFS40;;-400B-; 11-LEFS40;;-500-; 11-LEFS40;;-500B-; 11-LEFS40;;-600-; 11-LEFS40;;-600B-; 11-LEFS40;;-700-; 11-LEFS40;;-700B-; 11-LEFS40;;-800-; 11-LEFS40;;-800B-; 11-LEFS40;;-900-; 11-LEFS40;;-900B-; 11-LEFS40;;

Table of Contents

(Refer to page 14-19-11.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6 6 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8 39.4 28.5 45.2 38 46.8 48.9 1/4 37.9 43.7 45.3 3/8 40.9 46.7 48.3 30 1/4 39 31.1 44.7 41 46.3 51.9 3/8 42 47.7 49.3 19 Direct Operated 2-Port Solenoid Valve JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

BA 0 0.3 CA BA 0 0.3 Drawing of view E MM (mm) Bore size Z A NN S Y LB LC LH LT LX LY LZ X 85.5 6 15 15 17 3 8 12 11 28 16.5 4.5 9 1.6 24 16.5 32 24.5 7 M3 x 0.5 M8 x 1.0 57.5 5 T NA NB BA BB CA CB D F GA GB GC H 3 7 83 82 16 10 54 55 M12 x 1.0 M10 x 1.0 21.5 23 5.5 5.5 14 14 2.3 2.3 33 33 25 25 42 42 20.5 20.5 9.5 9.5 M5 x 0.8 M4 x 0.7 18.3 12 17 20 20 14 5 4 8 8 5 5 5 5 11 11 28 28 15

AC Servo Motor Driver (CC-Link Type ）

2 11.

CNA

21 98 22 25 20 19 16 to 750 (mm) MGC Bore (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J MGF 6 14 11 M14 X 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 216 M8 X 1.25 7 18 11 M18 X 1.5 30 3/8 42 to 44.5 58 168 44 11 0 238 M8 X 1.25 CY1 7 18 14 M18 X 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 255 M10 X 1.25 11 22 17 M22 X 1.5 37 1/2 59.5 to 62.5 71 218 59.5 15 0 307 M12 X 1.75 MY1 11 26 17 M26 X

CNA

144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 216 M8 x 1.25 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 238 M8 x 1.25 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 255 M10 x 1.25 11 22 17 M22 x 1.5 37 1/2 59.5 to 62.5 71 218 59.5 15 0 307 M12 x 1.75 11 26 17 M26 x 1.5 40 1/

CNA

144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 216 M8 x 1.25 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 238 M8 x 1.25 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 255 M10 x 1.25 11 22 17 M22 x 1.5 37 1/2 59.5 to 62.5 71 218 59.5 15 0 307 M12 x 1.75 11 26 17 M26 x 1.5 40 1/

Electric Actuator/Slider Type

(Refer to page 42.)

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 11 B CJ2RA-Z Series 10-/1121-/22Stroke Length Tolerance 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW R Z 60 16 A R 2 J D C 10 B M9BW R Z 60 16 A R 2 J D C 21 B Bore size (mm) Number of auto switches Built-in magnet Cylinder stroke (mm) Nil Type of auto switch Nil

Electric Grippers

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

CV/MVGQ

11 9 9 11.5 13.5 13.5 40 45 50 65 75 184.6 187.6 208.6 240.6 245.6 3.2 3.2 3.2 4.5 6 42 50 59 76 92 8 11 11 13 16 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 157 167 180 203 220 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

11 184.6 187.6 208.6 240.6 245.6 3.2 3.2 3.2 4.5 6 9 9 11.5 13.5 13.5 40 45 50 65 75 42 50 59 76 92 8 11 11 13 16 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 157 167 180 203 220 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

ZP

-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

MXQ

x 0.8 MXQ-CS6(L)-X11 15 25.5 MX MXQ-CS8(L) 5 18 B MXQ8(L) 7 22 7.5 8 16.6 14.6 9 3 8 9.8 MXQ-CS8(L)-X11 M3 x 8 M3 x 10 M6 x 1 15 28 MTS F MXQ-CS8(L)-X12 25 38 G E MXQ-CS12(L) 5 22 MY C MXQ12(L) M8 x 1 M4 x 12 M4 x 12 MXQ-CS12(L)-X11 9.5 29 11 12 20.5 18.5 14 4 11 13 15 32 MXQ-CS12(L)-X12 25 42 CY Table mounting section MXQ-CS16(L) 5 23 MXQ16(L) Q M10 x 1 MXQ-CS16(L)-X11 M5 x 16 M5 x 16 11

MGP

29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37

LX

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

LEC-OM069xx

DISCONNECT 11 Turn off the control and main circuit power supplies.