Plug-in/Plug Lead: Single Unit

VQ0 55.5 M5 ground screw VQ4 34.5 U side n VQ5 12 X VQZ B 2 A 4 6 B A VQD B 2 A 4 SMC SMC SMC SMC SMC 5 B A A 4 B 2 4 B A L2 L1 A 4 B 2 3 B A A 4 B 2 2 B A P = 41 58.5 34.5 48 P = 41 A 4 B 1 B A 2 68.5 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n 9 445 465 8 404

Regulator

Tighten others with 0.60.05Nm. -27- 12. Domensions 12-1.

F

M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

NCQ8

Solid state switch Reed switch Yes 5 V A96V A96 Grommet A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V IC circuit Relay, PLC No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V 2-wire

Series IDG

Page 41 Precautions .

Fieldbus system (PROFIBUS DP compliant)

(Only for EX510-S 01 ) -34No.EX-OMI0032-G No.

KS/KX

(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

HRX-OM-W058

Centigrade (oC)Fahrenheit (oF) 5.13 12 Changing pressure unit Pressure unit can be changed.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

Gun Type Ionizer

Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.

ZQ-OM01401

1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y (15) ON/OFF (16) (ZQ-ZSV-A

Plug-in/Plug Lead: Single Unit

M5 ground screw 9 9 2n-Rc 1/2 4(A), 2(B) port VQ0 U side 34.5 VQ4 n X 12 X 12 VQ5 B 2 A 4 6 B B B B B B A A A A A A VQZ B 2 A 4 VQD 5 SMC SMC SMC SMC SMC B 2 A 4 4 L1 L2 B 2 A 4 3 B 2 A 4 2 P = 41 P = 41 B 2 A 4 1 Cable length (600 or 1500 mm) 58.5 34.5 48 68.5 Stations D side 42 16 15.5 61.8 133 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

25

min [ANR] per cartridge) 0 2 4 6 8 10 12 14 16 18 20 0 2 4 6 8 10 12 14 16 18 20 30 Hz Discharge time (s) Discharge time (s) 1 Hz 30 Hz 1 Hz 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) Supply pressure: 0.3 MPa (17.6 L/min [ANR] per cartridge) Supply pressure: 0.3 MPa (8.6 L/min [ANR] per cartridge) 12 12 10 10 Discharge time (s) Discharge

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 V Grommet (NPN equivalent) Yes Yes 100 V 12 V 24 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 12 V 2-wire Grommet 24 V IC circuit 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire Solid state switches marked with are produced upon receipt of order.

One-touch Fittings Series KQ2

L D A M Nylon Urethane 3.2 KQ2R23-04 KQ2R04-06 4 6 2 2.1 9.6 33.5 34.5 3.4 2.9 18.5 17.5 15.5 10.4 4 KQ2R04-08 36.5 5.6 5.6 2.3 8 18 16 KQ2R04-10 12.8 39.5 3.6 10 18.5 KQ2R06-04 4 3 12.8 37 4 4 21 6 KQ2R06-08 37 3 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 13.1 3.5 10 18.5 KQ2R06-12 42 15.2 5.2 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.5 10 20 18.5 KQ2R08-12 42 5.1 12 12 KQ2R10-12 17 42 41.5 32.8 33

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

OPTIONS AND AUXILIARY EQUIPMENT (b) Surge protector RAV-781BYZ-2 [Unit: mm] 1) 2) 3) Black Black Black 5.5 1 11 1 4.2 0.2 28.5 1.0 28 1.0 UL-1015AWG16 200 30 0 1 3 2 4.5 0.5 41 1.0 RAV-781BXZ-4 [Unit: mm] 1) 2) 3) 4) 5.5 1 11 1 28.5 1.0 200 30 4.2 0.2 UL-1015AWG16 0 28 1.0 1 3 2 4.5 0.5 41 1.0 11 34 12. ABSOLUTE POSITION DETECTION SYSTEM 12.

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.