AC Servo Motor Driver

ON ABS transfer mode OFF (ABSM) (Pin 17) 1 2 3 4 18 19 ON ABS request (ABSR) (Pin 18) OFF ON 1 2 3 4 18 19 ABS transmission data ready OFF (ABST) (Pin 25) Yes AL.E5 warning No 14 15 14.

Air Slide Table

40 50 60 68 105 145 165 I 12 12 12 12 20 15 18 23 NN 2 2 2 2 3 3 4 5 H 39 39 48 58 52 44 44 G 18 18 19 19 21 36 17 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45 52 88 88 Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 MXQR1610 MXQR1620 MXQR1630 MXQR1640 MXQR1650 MXQR1675 MXQR16-100 MXQR16-125 Note) Note) Note) Refer to the bottom view of the MXQR16

Battery-less

series JXCD1 series JXCE1 series JXCP1 series JXCL1 series 16, 25 Version 3.6 (V3.6, S3.6) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 25, 32, 40 25, 32, 40 25 25 50 32, 40 Version 3.4 (V3.4, S3.4) 25, 32, 40 25, 32, 40 25, 32, 40 25, 32, 40 16, 25 JXCM1 series JXC51/61 series Version 3.5 (V3.5, S3.5) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32,

Fluoropolymer Piping Equipment

LQ1E4A-T 1/2" 1/2" x 3/8" 6 9 24 21 43 40 25 28 9 LQ1E5A-T 3/4" 3/4" x 5/8" 29 26 45.5 55.5 35 39 15 LQ1E6A-T 1" 1" x 7/8" 8 18 39.5 36 69.5 72 46 49 21.2 Note) Products marked are produced upon receipt of order.

Table of Contents

40 50 50 55 55 65 85 , Misc.

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

SX

(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

CJ5-S

40 22 10 10 18 18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS

CJ5-S

40 22 10 10 18 18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS

Rotary Actuator

5 to 22 2 to 22 2 to 22 Size: 10 to 30 Size: 40 40 40 18 to 30 6.5 to 30 4.5 to 30 18 to 30 Symbol: A57 Both the long shaft and the short shaft are shortened.

CL

50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105 130 150 190 212 236 42 50 59 76 92 100 112

ZP

width across flats 19 Width across flats 24 Hexagon width across flats 19 28 Width across flats 24 ZX ZR A 6 ZM 3 B A ZH B 18 ZU 18 ZL ZY ZQ (mm) Model A 40 ZPT40H-B8 C M8 x 1.25 40 ZPT40H-B10 42 M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread)

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

MY1

Maximum allowable moment and load weight Max. allowable moment (Nm) M1 6 10 15 30 59 6 10 15 30 60 Max. load weight (kg) m1 18 26 38 57 84 18 25 35 49 68 Bore size (mm) Model M2 3.0 5.0 9.0 m2 7 10.4 15 23 33 7 10 14 21 30 m3 2.1 3 4.5 6.6 10 2.1 3 4.2 6 8.2 M3 1.0 1.7 2.4 5.0 8.0 2.0 3.0 5.0 16 20 25 32 40 16 20 25 32 40 MY1MW 15 24 3.0 5.0 8.5 14 23 Parts list MY1CW No.

Rotary Actuator/Vane Style Series CRB2

Size: 10 to 30 Size: 40 40 40 18 to 30 6.5 to 30 18 to 30 4.5 to 30 Symbol: A57 Shorten both long and short shafts.

Series SV

18 solenoids possible.)

Mechanically Jointed Rodless Cylinder Series MY1

mounted on 40.

LEC-OM02704CN

4.1 43 4.2 46 4.3 47 4.3.1 47 4.3.2 48 4.3.3 CNP1CNP2CNP3 4-10 4.4 4-17 4.5 () 4-18 4.5.1 4-18 4.5.2 4-21 4.5.3 4-22 4.6 () 4-22 4.6.1 / 4-22 4.6.2 4-23 4.6.3 4-26 4.7 4-27 4.8 4-28 4.8.1 4-28 4.8.2 4-29 4.8.3 4-31 4.9 4-32 4.10 4-33 4.10.1 4-33 4.10.2 4-34 4.11 4-35 4.11.1 4-35 4.11.2 4-36 4.11.3 (LE--) 4-39 4.12 4-40 2 - 5 515-61 5.1

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

shaft side 40 40 18 to 30 4.5 to 30 18 to 30 3 to 30 Y = Size: 10 to 30 Size: 40 Symbol: A57 Shorten both long and short shafts.