Manifold Specifications

ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

Free Mount Cylinder for Vacuum Series ZCUK

20. 5 27. 5 41. 5 41. 5 41. 5 41. 5 42. 5 42. 5 42. 5 48. 5 ZMA DQ HQ HP 12 21 44 15 21 44 18 23 23 46 28 23 46 35 12 24 47 18 25 48 28 29 52 12 25 48 15 18 29 52 22 27 33 56 34 38 61 ZPT-B6 ZC(D)UKC20 ZC(D)UKQ20 21. 5 23. 5 27. 5 32. 5 44. 5 46. 5 50. 5 55. 5 ZQ DQ HQ HP 43 32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5

Air Slide Table Series MXP

L3 L3 End face Guide block Table 3 L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B 212

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

20 15 20 19.5 46 19.5 31.5 46 46 19.5 31.5 18 46 19.5 35.5 42 15.5 13 42 12 17 17 22 17 22 21 47.5 21 21 33 47.5 21 33 47.5 43.5 17 15 20 47.5 43.5 37 16 23 24.5 19 24.5 63.5 27 19 63.5 27 63.5 27 39 17 22.5 63.5 27 39 43 59.5 23 59.5 20 26 25.5 22 25.5 67 30 22 67 30 42 67 30 42 67 30 26 20 23.5 63 46 63 25 32 25 28.5 25 28.5 36 88.5 36 48 88.5 88.5 36 48 26.5 88.5 36 52 84.5 32 23 84.5

CG5-S

BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type

ZR

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

CG5-S

BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type

CJ5-S

S + Stroke Z + Stroke H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 12 RB 16 15 18.3 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 18.3 J D-X 20Data 10-14-7 8 Series CJ5-S Dimensions R V Rod side

CJ5-S

S + Stroke Z + Stroke H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 12 RB 16 15 18.3 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 18.3 J D-X 20Data 10-14-7 8 Series CJ5-S Dimensions R V Rod side

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 60 60 D-M9A 20 15 2 pcs. (Different surfaces) 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 35 35 35 D-M9AV 2 pcs. (Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 70 D-Z7/Z80 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 60 65 D-Y59/Y69 D-Y7P/Y7PV 2 pcs.

One-touch Fittings Series KQ2

D1 D2 L M A Nylon Urethane M5, M6 KQ2S04 to 12 KQ2S16 M5 0.8 M6 1.0 KQ2S04-M5 KQ2S04-M6 KQ2S04-01S KQ2S06-M5 KQ2S06-M6 KQ2S06-01S KQ2S06-02S KQ2S08-01S KQ2S08-02S KQ2S08-03S KQ2S10-01S KQ2S10-02S KQ2S10-03S KQ2S10-04S KQ2S12-02S KQ2S12-03S KQ2S12-04S KQ2S16-03S KQ2S16-04S 2.7 2.8 8 3.3 3.4 9 15 12 11 24 18 12 19 35 23 18 30 42 34 15.6 14.1 19 16.4 15 20 20 24 19.5 21 26 21.5 21 20 27.5 22.5

LEY-OM007

3 26 NBR 4 27 5 28 6 29 7 30 8 POM 31 9 32 10 33 11 34 12 35 13 36 14 37 15 38 16 39 17 40 18 101 41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

Electric Slide Tables

Motor cable 20 20 24 24 20 Lock cable 20 15 15 Dimensions (mm) Model L C D E F G H 144.5 J 46 LES25L-30133.5 105 2 46 4 48 LES25L-502 84 84 42 159.5 131 170.5 6 LES25L-75165 2 112 112 204.5 6 55 193.5 LES25L-10056 112 8 50 266.5 238 4 277.5 LES25L-125263 4 59 118 302.5 8 55 291.5 LES25L-15062 124 62 316.5 288 4 327.5 8 20 Series LES Dimensions: In-line Motor Type/D Type LES8D 3H9 (+0.025

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

15 15 R2 R2 Individual EXH spacer SJ7000-17-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 R R1 R R1 Manifold Gasket DXT199-21-10 Manifold Gasket DXT199-21-11 L Blanking Plate Assembly SYJ7000-21-1A Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base

5 Port Solenoid Valve

COM. () COM. 23 24 (+) 26 21 Note) 22 Positive COM Negative 19 20 19 20 COM 17 18 17 18 15 16 15 16 13 14 13 14 Note) Mounting valve has no polarity.

MXS Series Air Slide Table

15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 M 71 71 71 83 103 149 203 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 Note) Refer to "Dimensions" of MXS 12 on P. 58 for one with shock absorber as symmetric.