VDW30/40-XF

Flow Rate Characteristics 12 (INN.C.) Water Air 12 (INN.C.) Orifice dia. (mm ) Port connection type Model Cv converted Cv N.C. b Kv C [dm3/(sbar)] 0.09 1.0 0.4 0.03 0.14 0.04 VDW30 P7, C4, C6 0.3 3.0 0.52 0.24 1.0 0.28 0.61 4.5 0.46 0.54 2.3 0.61 VDW40 P10, C8, C10 1.1 6.0 0.4 0.86 4.0 1.0 499 VDW30/40-XF Series Construction Component Parts Materials w e t No.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

stations C4 (For 4) C6 (For 6) C8 (For 8) Side P kit: Flat ribbon cable 26P 1 to 12 stations 35 580 20P 1 to 9 stations C10 (For 10) 10-SQ231 J kit: Flat ribbon cable PC wiring system compatible 10-SS5Q23-1 to 8 stations 35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

Intrinsically Safe Valve

0.27] 2position 0.75 0.36 0.19 3.8 3.2 0.34 0.82 0.26 0.86 53-SY5 20-C4 C10 10 Onetouch fitting 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 2.8 0.59 0.27 0.21 0.67 2.4 53-SY7 20-C10 3position 4position dual 3 port 2.7 [2.0] 0.38 [0.38] 0.70 [0.56] N.C.

Series VV100 /D-sub Connector 3 Port Solenoid Valve Plug-in Connector Type Manifold

Symbol Stations 01 1 station Lateral With bracket (Standard) 12 12 stations SUP/EXH block mounting position: U side 2 F1 With bracket (Port downward) How to Order Valve Manifold Assembly F2 Ordering example (VV100-10FA) V110-D5MZ-C4 (1 set) Double solenoid, individual wiring/lead wire length 300 mm (24 VDC) Note) If the mounting option N (Mounting nut: Inch size) is selected, the bracket

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

modular-press-e

B Port plug PBT, HNBR 1 See below 136010 C Clip Stainless steel 3 136010 One-touch Fittings for Regulator Block Port Plug VVQ0 58A VVQ1000 50A C4 Single unit regulator/ Port plug for regulator block Fitting type One-touch fittings for regulator block Nil L1 Straight Elbow Fitting size 10 Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

B Port plug PBT, HNBR 1 See below 136010 C Clip Stainless steel 3 136010 One-touch Fittings for Regulator Block Port Plug VVQ0 58A VVQ1000 50A C4 Single unit regulator/ Port plug for regulator block Fitting type One-touch fittings for regulator block Nil L1 Straight Elbow Fitting size 10 Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Note) The O-ring is attached.

Table of Contents

VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main circuit (Analog output) 1 k Black OUT 12 to 24 VDC + 12 to 24 VDC + Load Blue LINE() Blue DC() Load Install the load either on the LINE (+) or LINE () side.

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

Compact Manifold Regulator

H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 744 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A C4 Part no.

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

10 223 212.5 191.5 16 11 235.5 225 202 17 12 248 237.5 212.5 18 13 248 237.5 223 12.5 14 260.5 250 233.5 13.5 15 273 262.5 244 14.5 16 285.5 275 254.5 15.5 L1 L2 L3 L4 32

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

3 Port Solenoid Valve Metal Seal Series VZ200 1

, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.

Title not found

Rc1/8 12 3 High Precision Digital Pressure Switch Dimensions C4 C6 M5 ZSE40(F)/ISE40 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port 600 (3000) Lead wire length 3.5 ForM5 7.8 12.4 7 2.6 2.5 30 15.2 43 10.7 8.5 7 12 M5 x 0.8 thread depth 5 One-touch fitting 4, 6 * For splash proof use (IP65), insert an air tube into the atmospheric release

ZSE40/ISE40

to 24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) ZSE40(F) ISE40--30(L)-(M) With auto shift input ZSE40(F) ISE40--70(L)-(M) With auto shift input DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2 k 1.2 k Load 6.8 k 6.8 k Main circuit Main circuit Load OUT1 (Black) OUT2 (White) 12 to 24 VDC 12 to 24 VDC Load Load DC () (Blue

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Rc1/8 12 3 High Precision Digital Pressure Switch Dimensions ZSE40(F)/ISE40 C4 C6 M5 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port 600 (3000) Lead wire length 3.5 ForM5 7.8 12.4 7 2.6 2.5 30 15.2 43 10.7 8.5 7 12 M5 x 0.8 thread depth 5 One-touch fitting 4, 6 For splash proof use (IP65), insert an air tube into the atmospheric release

Proposals for Energy Saving

/Rc 3/8 12/Rc 3/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 16/Rc 1/2 16/Rc 1/2 Refer to page 3.4-1 of No. 3 for details.