CL

11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405 419 440 9-3-10 43 Series CL1 Lock-up Cylinder Double Acting, Single Rod Rod Side Flange Style (F)/Long

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5 19 52 52 52 96.5 17.5 35 22.5 32 22.5

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

CJ5-S

6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30

CJ5-S

6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 Up to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 Up to 1500 40 37 41 125 60 30

CG5-S

6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 to 1200 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 to 1400 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 208 100 to 1500 40 37 41 125 60 30 100 14 10 29

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

(mm) Bore size (mm) H1 H2 I IA K MM NA NB NN P S T V W ZZ GB3 H -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 8 31 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 10 41 25 6 8 34 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 81 11 3.5 5.5 143 10 46 32 8 9 40 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 87 13 3 4 159 10 53 40 10 11 48 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 108 16

7.4

fitting assembly 2n x C4 C4: 4 One-touch fitting assembly L1 L2 L3 4.5 67 1.7 3 Mounting hole for M3 67 1.7 4.5 P=11 15.5 Mounting hole for M2.5 (3.5) (30) 5.5 46.5 8 38 (14) 33 32.2 Residual pressure release manual override 11 Residual pressure release manual override 29.5 (17.5) 38 (22.5) 0.5 (43) 2.5 U side D side Stations 1 2 3 n DIN rail clamping screw 2n x C3, C4, M5 C3: 3.2 One-touch

Table of Contents

(Refer to page 14-19-11.)

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

MLGP

Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

Cylinder with Lock Series MNB

8 52 104 38 16 13 31 9 3 10 83 46 101 91 1/8 40 14 65 63 14 27 to 1000 35 27 11 65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/

Slider Type/Ball Bushing Bearing

CYP 3.5 7 RB0805 RB1006 RB1411 RB2015 Shock absorber model 5.5 11 Maximum energy absorption: (J) 0.98 3.92 14.7 58.8 5 10 Stroke absorption: (mm) 5 6 11 15 5.5 11 Collision speed: (m/s) 0.05 to 5 4.5 9 Max. operating frequency: (cycle/min) 80 70 45 25 Since the cylinder is in an intermediate stop condition when stroke adjustment is performed, use caution regarding the operating pressure

Pressure Gauge Guide

This will cause a malfunction. 14-11-6 6 Pressure Gauge Guide How to Order G M C 46 10 01 X2 Option Specifications Symbol Pressure gauge F.R.L.

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

Table of Contents

44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order .