200 200 200 Over 200st to 300st 167 167 Over 100st to 200st 105 105 117 117 Over 200st to 300st Over 300st 60 60 77 77 14 48 54 70 78 22 25 30 38 20 24 24 24 110 110 120 120 M5 x 0.8 10 10 12 12 40 44 44 44 3 3 3 4 5 5 17 17 56 62 81 91 300 300 3.5 3.5 3.5 4.5 41 46 54 64 15 17 29 29 50 56 72 82 25 27 39 39 37 38 44 50 12 16 20 25 16 M5 x 0.8 18 M6 x 1.0 26 M6 x 1.0 MGPM (slide bearing
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.
26P C8 (for 8) Side P kit: Flat ribbon cable 20 420 20P 1 to 9 stations SS5Q13-SQ130 SQ131 J kit: Flat ribbon cable PC Wiring System compatible Option Direct outlet with built-in silencer 1 to 8 stations 20 420 L3 (for 3.2) L4 (for 4) L6 (for 6) L5 (M5 threads) Note 2) L kit: Lead wire 1 to 12 stations 35 460 Top 20 475 S kit: Serial transmission 1 to 8 stations Note 1) One-touch fittings
-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4
-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4
(inch) Connection thread R Model H (Width across flats) L2 A M Min. port size <M5> Note) Weight (g) D1 D2 L1 15.3 10 KQ2L01-M5 M5 x 0.8 7 1 8 10 2.5 8.4 12.7 24 13.2 14.3 2.3 KQ2L05-02S KQ2L05-01S 1 8 22.5 26.5 11.4 10 19.5 16.5 3.5 3 16 1 4 3.2 19 18 26 14 12 16.1 KQ2L07-M5 M5 x 0.8 7 13.6 15.1 2.3 1 8 1 4 KQ2L07-01S 23.5 26 10 4.6 10 20 32 12 20 28 23 Applicable tubing 1 4 KQ2L07-02S
14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30
-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8
-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.
x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.
14 20 13 8 15 39.5 76 26 17.5 CY1R15 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 84 18 17 25 16 7 18 54.5 94 32 19 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 1/4 CY1R20 11 62 5.6 5 M4 x 0.7 7 95 17 20 40 19 7 22 64 107 38 20.5 CY1R25 15 70 5.6 6 M5 x 0.8 6.5 105 20 22.5 40 21.5 7 28 72 117 43 21.5 CY1R32 13 76 7 7 M6 x 1 8.5 116 26 28 50 27 7 35 79 130 54 24 CY1R40 15 90 7 8 M6 x 1
Related Products 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 +0.07 0 +0.07 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 +0.07 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 L1 DM5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M20 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M24
Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.
44 55 67 HA 30 36 41 52 62 Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 L 53 62 70 76 90 W 25 40 40 50 60 X 18 22 28 35 40 Y 54.5 64 72 79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 Model CY3R15 CY3R20 CY3R25
Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S
x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M39 x 1.5 31.5 M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M48 x 1.5 40 H+0.4 +0.1 D M5
1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8
A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 JSXM20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 JSXM30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 JSXM40 45 JSX10, 20, 30 Series Table of UL-compliant Products * Refer to the table below for UL-compliant products.
22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000