Compact Vacuum Unit

) (20) (20) 0 0 0 0 0.05 (1.5) 0 0.11 (3) 0.16 (4.5) 0.21 (6) 14.5 (0.1) 29 (0.2)43.5 (0.3) 58 (0.4)72.5 (0.5) 87 (0.6) Supply pressure psi (MPa) Suction flow SCFM (L/min (ANR)) K Nozzle Size 0.6 mm Supply Valve, Large Flow Type (N.C.)

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with DIN rail mounting bracket) and horizontal connector entry [-JS].

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Compact Manifold Regulator Series ARM5

19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

ZQ-OM01401

20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

EtherNet/IP TM Compatible Fieldbus System

/SI unit: 2 pcs. per branch) Power supply for input equipment and control 24 VDC, Max. 1.5 A per one branch port Power supply for Solenoid valve 24 VDC, Max. 1.0 A per one branch port Branch cables Cable with M12 connector made by SMC (EX500-AC-SP) Branch cable length Total length 20 m or less per branch 40 No.EX-OMS0014-A Dimensions 41 No.EX-OMS0014-A SI unit Model Indication and How to

Digital Pressure Switch

Analogue output Output impedance Approx. 1 k Output current (rated pressure range) 4 to 20 mA 2.5% F.S. 2.4 to 20 mA 2.5% F.S. outpour 3 Current Linearity 1%F.S.

VK300

(-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

VK300

screw M3 x 26 Round head combination screw Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold gasket Manifold gasket Applicable base Applicable base VV3K3-20 21 VV5K3-20 21 VK300-45-1 Sub-plate VV3K3-40 (S) 42 VV5K3-40 (S) 41 (S) 42 Manifold base Manifold base

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) System A: Valve + Z728.H B: Valve + MTL728P+ F: Valve + KFD0-SD2-Ex1.1065 Standard SY manifolds Types 20, 41, 42 are used for 52-SY valves.

ARM10/11

MPa 24 SMC 32.5 20 0.5 0.1 0.3 24 56 17 17 5.

ARM10/11

MPa 24 SMC 32.5 20 0.5 0.1 0.3 24 56 17 17 5.

VK3000

VV5K3-20-06 VV5K3-40-06-M5 Common SUP/Common EXH VK Type 20: Body ported (A, B port top ported) Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 How to Order A port: Rc 1/8, M5 x 0.8 VZ VV5K3 20 05 A, B port Rc 1/8, M5 x 0.8 VK3120 Thread type VF VK332 Valve stations Nil 00F 00N 00T Rc 01 1 station Applicable blanking plate assembly VK3000-7-1A VFR G NPT 20 20 stations R port:

VK3000

stations Applicable blanking plate assembly VK3000-7-1A 01 1 station Rc Q CE-compliant Nil CE-compliant F N T G 20 20 stations NPT NPTF A port: M5 x 0.8 B port: M5 x 0.8 Note) Applicable only for DIN terminal type How to Order Type 41: Base mounted (A, B port side ported) Applicable solenoid valve VK3140-(-Q) VK334-(-Q) Type VK3140 VV5K3 M5 05 41 Type VK334 Solenoid direction Valve stations

4/5 Port Air Operated Valve SYJA3000 Series

along with the manifold base model no. 5(R) 1 (P) (R)3 3(R) 1 (P) 3 position exhaust center 3 position exhaust center 4(A) (B)2 4(A) (B)2 (Example) SS5YJA3-41-03-M5 1 pc.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 2) Refer to the General Specifications on P.41 for the specifications not shown in this table. 44 - Doc. no.

Proposals for Energy Saving

Compressor operation status Air consumption status Tubing, fittings Couplers Rubber hoses Other 20% 25% 30% 25% Flow rate Air leakage is equivalent to 20 to 50%.

ZQ-OM01301

60 -60 40 Air consumption -40 30 -40 Suction flow rate 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 Supply pressure [MPa] Suction flow rate [L/min (AMR) ] The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector.