Valve Single Unit Purchasing order is available in units of 10 pieces.
13 17 17 19 27 27 32 41 10(12) M4 x 0.7 depth 7 M8 x 1.25 Rc 1/8 106(114) 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 201 to 350 29 M5 x 0.8 depth 7.5 Rc 1/8 10(12) M10 x 1.25 111(119) 301 to 400 35.5 M5 x 0.8 depth 8 Rc 1/8 10(11) 10(12) M10 x 1.25 113(121) 301 to 450 44 M6 x 1 depth
Applicable Fittings: KQ2H, KQ2S Series Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY3l30-ll-M5 4A, 2B M5 KQ2H KQ2S 1P, 5EA, 3EB 1/8 KQ2H KQ2S X, PE M5 KQ2H KQ2S SY3000 SS5Y3-50/51/52 (R) Manifold base 1/8 KQ2H KQ2S 4A, 2B M5 KQ2H KQ2S Series Model Piping port Port size Fittings Applicable tubing O.D. 2 3.2 4 6 8 10 12 SY5l30-ll-01 4A, 2B 1/8 KQ2H
(mm) <M5> Note) A Weight (g) D1 D2 L1 M L2 Model Nylon Urethane Applicable tubing KGW04-M5 KGW04-01 8 18 30 37.5 32 38.5 M5 x 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 x 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 30.5 40 33.5 42.5 3.0 3.0 8 8 1 8 10 6 12.8 17 20 10 1 4 KGW06-02 46 46.5 17 14 10.9 8.6 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 43.5 49.5 47 51
20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500
Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution
M5x0.8 (SY3000 Type 41 Only) 01 Rc(PT)1/8 (SY5000 Type 41 & SY3000 Type 42 Only) 02 RC(PT)1/4 (SY5000 Type 42 Only) C4 One Touch Fittings for 4 (SY3000 Only) C6 One Touch Fittings for 6 (SY3000 & SY5000 Only) C8 One Touch Fittings for 8 (SY5000 Only) C10 One Touch Fittings for 10 (SY7000 Only) Imperial (Inch) M5T 10~32Nom (SY3000 Type41 Only) 01T 1/8NPTF (SY5000 Type 41 & SY3000 Type 42
-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating
41-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)
[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60
In the case of oxygen at room temperature and 10-6Torr, one atomic layer impinges in a few seconds. O After a few seconds at 10-6Torr 41
Purchasing order is available in units of 10 pieces.
depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 Without auto switch With auto switch DBore size (mm) 5 st 38 41 35 41 45 47 S 15 st 48 56 50 56 60 62 Z S Z 15 st 61 72 66 75 83 89 10 st 43 46 40 46 50 52 5 st 51 57 51 60 68 74 5 st 38 41 45 51 55 57 10 st 56 62 56 65 73 79 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 51 57 61 70 78 84 10 st 56 62 66 75 83 89 15 st 61 72
, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)
(Example) For M5: L1 = 10 Applicable shaft types: S, W, Y Equal dimensions are indicated by the same marker. Shorten the long shaft.
U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed
U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed
Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon
Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon