MHF2

x 0.8 2-M6 x 1 thread depth 6 56 MHT Mounting thread E 13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

x 0.8 Finger closing port 13 MHS A 45 C MHC MHT M5 x 0.8 Finger closing port M5 x 0.8 Finger opening port MHY 25 25 MHW 6-M4 x 0.7 thread depth 8 MRHQ (A, B, C common view) Auto switch mounting groove 42 14h9 0 0.043 3-4 depth 8 +0.02 0 Misc.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

40 50 63 80 100 125 32.5 146 26 7 4 4 4 94 16 12 32 30 M6 x 1 10 22 G 1/8 13 6 M10 x 1.25 47 Up to 1000 Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106 16 20 37.5 40 M8 x 1.25 17 32 G 1/4 15.5 8 M16 x 1.5 66 Up to 1000 Up to 2000 56.5 194 37 12 9 4 4 121 16 20 45 45 M8 x 1.25 17 32 G 3/8 16.5 8 M16 x

MHZ2/MHZJ2

thread depth 8 (mounting thread) 4-M5 x 0.8 thread depth 10 (mounting thread) Prepared hole dia. 4.3 through (mounting hole) 4H9 depth 4 +0.030 0 7.50.02 8 0 -0.1 +2.2 0.2 (58) 30 42 32 0.02 16.8 29 +0.052 0 21H9 depth 3 0 -0.05 0 -0.7 18 20 43.5 When closed 16.3 When open 26.3 84.8 2-M5 x 0.8 thread depth 10 (mounting thread) M5 x 0.8 (finger closing port) 4-M4 x 0.7 (attachment mounting

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

MQQ

ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-

MQQ

1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-20 20 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other dimensions, refer to basic style on page 10-5-20.

Series IDG

56 87 196 162 158 99 157 201 226 IDG3M, 3HM, 5M, 5HM IDG10M, 10HM 1/8, 1/4 9 210 196 5.5 66.5 35 15 IDG20M, 20HM 1/4, 3/8 205 201 66 130 209 13 12 223 209 IDG30M, 30HM 162 158 87 6 78 40 20 303 IDG30LM 149 145 56 86 196 9 210 196 5.5 7 5.5 70 95 70 35 50 35 15 22 15 IDG50M, 50HM 3/8 177 172 80 87 241 16 14 255 241 350 347 210 196 IDG50LM 1/4, 3/8 149 145 56 86 196 13 9 34 Series IDG Membrane

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM

ARM10/11

SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

ARM10/11

SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

15

Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to

ZPT/ZPX

62 13 40 41.4 28.4 43.2 20.5 32 13 ZPT50HB-A14 -B10 M10 x 1.5 50 51.9 35.7 54 24 35.5 65.5 16.5 ZQ ZPT50HB-B8 M8 x 1.25 50 51.9 35.7 54 24 35.5 16.5 -B10 M10 x 1.5 ZF ZP ZPT HB-A16 (Male thread) ZPT HB-B (Female thread) 63 80 63 80 ZCU M16 x 1.5 AMJ Rc 1/8 Hexagon width across flats 22 6 6 Misc.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Valve stations F: D-sub connector P: Flat cable connector (26 pins) Note Note Stations Stations Symbol 02 Symbol 02 2 stations 2 stations Note 1) Double wiring specification Double wiring specification ... ... ... ... ... 12 13 12 13 Connector mounting position 12 stations 12 stations 13 stations 13 stations Symbol D Mounting position Specified wiring Note 2) Specified wiring (up to 25 solenoids

Compact Cylinder with Air Cushion Series RQ

Refer to page 9 for details on rod end nut and accessories. 6 Series RQ Dimensions/32, 40, 50 Refer to pages 12 and 13 for proper auto switch mounting positions and height.

3 Port Solenoid Valve Series VQ100 1

x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum 18 stations) Formula: L1 = 10n + 32 L2 = 10n + 43 Dimensions n L 2 3 4 5 6 7 8 9 10 L1 L2 (L3) (L4) (L5) 11 12 13 14 15 16 17 18 52 63 83 112.5 123 62 73 93 112.5 123 72 83 103 125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143

MHF2

3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 122 17 Low Profile Air Gripper Series MHF2 Dimensions MHF2-20D Scale: 50% 38 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 71 6 62 86 2-M6 x 1 thread depth 6 33 56 Finger closing port M5 x 0.8 Mounting thread E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting hole) 32 31