) . 28 1 No.SFOD-OMT0009CN-B (2) . 29 (3) . 30 5. . 31 5.1 . 31 (1) C PWR . 31 (2) M PWR . 31 (3) CI . 32 5.2 . 33 (1) . 33 (2) . 34 6.
Set each P1/P2 (set value), referring to the Accumulated output mode on page 31.
4.8 5 19 5 17 15 38 39 18 5.5 19 5 18 5.5 16 9 5.5 10 10.5 8.5 4 NS 31 + Stroke 39.5 + Stroke 10 5 + Stroke 4 x M3 x 0.5 Depth 4.8 10 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.
Depth 6.5 LA LB 8 MXS MXQ Guide rail width 5 3 x M4 x 0.7 through Bottom hole dia 3.3 6 x 6 counterbore depth 3.3 4 x M3 x 0.5 Depth 5.5 Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 2 x M5 x 0.8 6.5 5 MXF 4 x M3 x 0.5 Depth 4.8 MXW 17 38 39 MXJ 19 10 18 19 18 15 MXP 5 5.5 10 5.5 5.5 MXY NS 4 9 10.5 8.5 31 + Stroke MTS 39.5 + Stroke 16 4 x M3 x 0.5 Depth 4.8 10 5 + Stroke
after power failure . 5-27 5.10.2 Setting/checking of the operation restoration function . 5-28 5.11 Anti-freezing Function . 5-29 5.11.1 Anti-freezing function . 5-29 5.11.2 Setting/checking of anti-freezing function . 5-30 5.12 Key Operation Sound Setting . 5-31 5.12.1 Key operation sound setting . 5-31 5.12.2 Setting/checking of the key operation sound . 5-31 5.13 Temperature Unit Change
Bit6: The short circuit of the valve output or digital output 01h to 64h to Get Channel diagnosis 0Ah 83h Ch0 to 31 BYTE 1 2 has been detected.
21 Y 30 31 35.5 H 5 3.5 1.5 S 5.4 6.5 8.5 AW20 AW30 AW40 Auto Drain mm Dimensions Model Port Size C NPT 1/8 NPT 1/4 GaugePort D 53 70 Q 46 54 L 41 50 J 239(max.242) 276(max.280) K 59 75 U 40 54 V 53 70 A NPT 3/8 NPT 1/2 W 2.3 2.3 X M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 38.5 42.5 E 30 38 F 83(max.86) 88(max.92) T 8 10.5 Y 31 35.5 Z 7 7 AA 19 21 H 3.5 1.5 S 6.5 8.5 AW30 AW40 6 Series AW20~40 Filter
Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to
31 31 31 B 104 124 149 174 199 MXW12 6 W 31 11 11 11 11 V 124 144 169 194 219 W V A 59.5 34.5 34.5 34.5 34.5 34.5 B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 8.5 W 39.5 14.5 14.5 14.5 14.5 14.5 V 155.5 180.5 205.5 230.5 225.5 280.5 A 68.5 43.5 43.5 43.5 43.5 43.5 43.5 B 168.5 193.5 218.5 243.5 268.5 293.5 318.5 MXW20 10 W 48.5 23.5 23.5 23.5 23.5 23.5 23.5 V 188.5 213.5
The displayed circulating fluid temperature is the fluid temperature discharged from the thermo-chiller (31 oC).
) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x
4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread depth 3 Attachment mounting thread 4-M3
CLKG CKQ CLKQ Auto switch mounting screw CK CLK CKQ Hexagon socket head cap screw (Included with auto switch) (M2.5 x 12L) t Tighten the auto switch mounting screw (M3) to fix the auto switch. The tightening torque of the M3 screw must be 0.35 to 0.45 Nm. t The detection position can be changed under the conditions in step e.
AC Specification (Class H coil) AC Specification (Class B coil) Apparent power (VA) Energized 19 16 43 35 62 52 Apparent power (VA) Energized 19 16 43 35 62 52 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush Frequency (Hz) 45 40 55 50 65 60 Inrush Frequency (Hz) 45 40 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 9 7 19 16 30 25 VXD21 VXD21 VXD22
Y31 Y41 Model Port size Applicable model A B C 1/8 1/4 1/8 1/4 1/4 3/8 Y21-01 Y21-02 Y31-01 Y31-02 Y41-02 Y41-03 AC2001, AC2021, AC2031 10 19 29 AC2501, AC2521, AC2531 11 19 33 AC3001, AC3021, AC3031 14 24 39 AC4001, AC4021, AC4031 Note 1) in part number indicates threads. Use nothing for Rc(PT), N for NPT, F for G(PF).
189 29 187 4.6 5.5 15 7 31 11 189 29 187 5.6 6 16 7 11 31 189 29 187 6.1 7 18 8 36 12 194 34 192 7.1 8.5 20 8 36 13 194 34 192 8.6 10.5 25 8 36 15.5 194 34 192 10.6 P (Port thread size) Nil G1/4 TN TF Rc1/4 NPT1/4 5 Series CKQ/CLKQ Dimensions CKQTB50 CKQTA50 (The angle of the cylinder port position against the mounting side is 90) Refer to How to Order on page1 for the mounting side and
x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through
x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 20.5 5.5 Stroke 42 + Stroke 5.5 4.5 13.4 32 + Stroke 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3 L (Hexagon socket head set screw) M8 x 1.25 x 7.5 L (Bolt holder) 0.5 25 0.2 25 0.2 5.3 5.3 16 32 31 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through
x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 MX 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 MTS 20.5 5.5 MY Stroke 42 + Stroke CY 5.5 4.5 13.4 32 + Stroke MG 5 + Stroke 12 2.75 11 1.2 M3 x 0.5 x 3l (Hexagon socket head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same