Compact Guide Cylinder

x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x 0.7 6 4.2 16 (12 x 2) 3.4 6.5 2 M3 x 0.5 6.5 16 18.5 8 28 14 53 42 57 10.2 24 M4 x 0.7 6 4.3 6 JMGP Series Bore Size 20 (16 x 2) to 40 (32 x 2) Standard: JMGPM WA + Stroke

MXW

For details, refer to page 8-30-31. 8-7-22

SFOD-OMT0009CN

5.1 . 31 (1) C PWR . 31 (2) M PWR . 31 (3) CI . 32 5.2 . 33 (1) . 33 (2) . 34 6.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

21 47.5 44.5 25 9 12 6 24 22 20 28 24 52.5 50.5 29 10 19 7 8 26.5 24 32 64 61.5 37 14 25 30 26 36 41 78 74 49 18 Inch Size B E1 E1 E2 E2 E3 E3 F G H1 H2 H3 L1 L1 L2 L2 L3 L3 M1 M2 M3 Model B side (Center) A side (Left) C side (Right) Applicable tubing O.D.

Dual Speed Controller with One-touch Fitting Series ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 29.4 12 17.5 12.9 25.5 28.6 25.8 10 7.8 9.6 11.7 M5 x 0.8 28.3 8 25 22.2 6 ASD230F-M5-06 11.6 32.5 13 13.7 20.6 6 34.6 ASD330F-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 11.8 10.6 14.2 R 1/8 12 32.1 27.1 15.8 8 33.9 ASD330F-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430F-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430F-02-08S 36.7 41.7

Compact Slide Series MXH

x 0.5 Depth 6.5 LA LB 8 MXS MXQ Guide rail width 5 3 x M4 x 0.7 through Bottom hole dia 3.3 6 x 6 counterbore depth 3.3 4 x M3 x 0.5 Depth 5.5 Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 2 x M5 x 0.8 6.5 5 MXF 4 x M3 x 0.5 Depth 4.8 MXW 17 38 39 MXJ 19 10 18 19 18 15 MXP 5 5.5 10 5.5 5.5 MXY NS 4 9 10.5 8.5 31 + Stroke MTS 39.5 + Stroke 16 4 x M3 x 0.5 Depth 4.8 10 5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Rc 1/8 Vent hole tap 25ALEC 18 LEC S [mm] LEC SS-T Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T U Y V LEC Y LEC Y 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 1 26.5 40 105 to 400 155.5 141 Motorless 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 118 1 34 60 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 M16

PSxx-OMT0001CN

3 () 2 E210-U01 ZS-31-C ZS-31-B Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-41No.PS-OMT0001CN-E 4 80 kPa220 kPa (ON/OFF) OFF ON (43 ) 1 5 2 OUT1 OUT2 / (62 ) (48 ) (45 ) ,[F10](56 ) -42No.PS-OMT0001CN-E 4 () (ON/OFF) () (45 )OUT1

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

3

CLKG CKQ CLKQ Auto switch mounting screw CK CLK CKQ Hexagon socket head cap screw (Included with auto switch) (M2.5 x 12L) t Tighten the auto switch mounting screw (M3) to fix the auto switch. The tightening torque of the M3 screw must be 0.35 to 0.45 Nm. t The detection position can be changed under the conditions in step e.

VQC

pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19 581 667 18 556 642 17 531 617 16 506 592 15 481 567 14 456 542 13 431 517 12 406 492 11 381 467 10 356 442 9 331 417 8 306 392 7 281 367 6 256 342 5 231 317 4 206 292 3 181 267 2 156

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Parameter type Content Value Size (Words) Bit15: CH31 : Bit0: CH16 0x0108 CH16-31 Valve ON/OFF counter 0: disable, 1: enable 1 Bit15: CH31 : Bit0: CH16 0x0109 CH16-31 Open circuit detection 0: disable, 1: enalbe 1 CH16-31 Output setting during communication fault Bit15: CH31 : Bit0: CH16 0: disable, 1: enable 1 0x010A CH16-31 Output value during communication fault Bit15: CH31 : Bit0: CH16

PF2A/PF2W

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.

ZX

Air supply pressure port (M3, PS port) (Mounting hole) ZY Interface plate M5 (V port) Vacuum pad connection port ZQ Adsorption nozzle piping port M5 x 0.8 (or M6 x 1) 4 18 15.5 ZF Pitch = 10 Phillips screw M2.5 x 51 Bracket A (Standard accessory) (PE port) (PV port) Vacuum supply pressure port ZP 2-3.3 mounting hole ZCU AMJ Misc.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Compact Cylinder with Air Cushion

10 19 11 50 41 42 48 44.5 47.5 43.5 40 18 8 18.5 8.5 15.5 5.5 22.5 12.5 23.5 13.5 63 47.5 48.5 54.5 51 54 50 50 18 13.5 18.5 14 15.5 11 22.5 18 23.5 19 80 57.5 58.5 64.5 61 64 60 63 20.5 16.5 21 17 18 14 25 21 26 22 100 67.5 68.5 74.5 71 74 70 80 25.5 20 26 20.5 23 17.5 30 24.5 31 25.5 100 32 26 32.5 26.5 29.5 23.5 36.5 30.5 37.5 31.5 14 Series RQ Operation Range mm 100 Switch model Bore

RQ

IY-G10 32 M26 x 1.5 M26 x 1.5 44 44 79 21 55 24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.

Multi-channel Digital Sensor Monitor ( compatible)

Function selection mode 31 Default setting 31 F 0 Differential pressure check mode, pressure range, display unit 33 F 1 Setting of OUT1 39 F 2 Setting of OUT2 42 F 3 Digital filter setting 44 F 4 Auto-preset function 45 F 6 Fine adjustment of display value 47 F10 Sub display setting 48 F11 Display resolution setting 54 F14 Zero cut-off setting 55 F80 Power saving mode 56 F81 Security code

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

33 29.5 26.5 20.5 30.5 32 25 27.5 21.5 28 27 23.5 24.5 26 19 22 50 39 35.5 32.5 23.5 36.5 38 31 33.5 24.5 34 30 26.5 27.5 29 22 25 63 41 37.5 34.5 25.5 38.5 40 33 35.5 26.5 36 32 28.5 29.5 31 24 27 80 46 42.5 39.5 29.5 43.5 45 38 40.5 30.5 41 36 32.5 33.5 35 28 31 100 50 46.5 43.5 31.5 47.5 49 42 44.5 32.5 45 38 34.5 35.5 37 30 33 41 Compact Hydraulic Cylinder Double Acting/Double Rod: