HRX-OM-W032

The displayed circulating fluid temperature is the fluid temperature discharged from the thermo-chiller (31 oC).

Escapements Series MIW/MIS

Note 2) Refer to page 14 for lead wire length.

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 420 SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 421 Construction

Compact

Note 10) A reference value for correcting an error in reciprocal operation. 13 800 14 900 15 1000 Switch and Acceleration Note) Table 2 Switch no. Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

Ionizer

31 22 4.5 2 x 5.4 22 4.5 32 20 Ionizer 27 2 100 Hexagon socket head cap screw M4 x 6 (Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

[Option] Type 20 Applicable solenoid valve 10-SYJ312M--M3(-Q) 10-SYJ322M--M3(-Q) How to Order SS3YJ3 05 20 10 A port M3 x 0.5 Clean series Applicable blanking plate assembly Refer to page 610.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Otherwise, unexpected malfunctions, such as knocking, may occur. 14.

Compact Guide Cylinder

x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x 0.7 6 4.2 16 (12 x 2) 3.4 6.5 2 M3 x 0.5 6.5 16 18.5 8 28 14 53 42 57 10.2 24 M4 x 0.7 6 4.3 6 JMGP Series Bore Size 20 (16 x 2) to 40 (32 x 2) Standard: JMGPM WA + Stroke

MXH Series Compact Slide

socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 5 3-M4 x 0.7 through Bottom hole dia. 3.3 6-6 counter bore depth 3.3 4-M3 x 0.5 Depth 5.5 2-M5 x 0.8 6.5 5 4-M3 x 0.5 Depth 4.8 17 38 39 15 19 10 18 19 18 5 5.5 10 5.5 5.5 NS 4 9 10.5 8.5 31 + Stroke 39.5 + Stroke 16 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 Stroke (mm) NS LT LB LA J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52

Flow Control Equipment

Model Port size AK M3 X 0.5 0.3 0.3 ASV120F-M3 M5 X 0.8 1.3 1.3 ASV220F-M5 ASS R(PT)1/8 8 7 ASV310F-01 R(PT)1/4 8 7 ASV310F-02 R(PT)1/8 14 13.5 ASV410F-01 R(PT)1/4 14 13.5 ASV410F-02 R(PT)3/8 14 13.5 ASV410F-03 R(PT)1/4 27 23 ASV510F-02 R(PT)3/8 29 27 ASV510F-03 R(PT)1/2 29 27 ASV510F-04 Specifications Model ASV120F ASV220F ASV310F/410F ASV510F 1.5MPa Proof pressure 1MPa Max. operating

Fieldbus system Ethernet POWERLINK compatible SI unit

Round head screw (M3 x 8) , 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6) , 2 pcs. Round head screw (M3 x 8) , 4 pcs. (2) End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20) , 1 pc. P tight screw (4 x 14) , 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

Prevents Micro-Bubbles

x 0.5 M5 x 0.8 46.5 31 67.5 67 19 41.5 13 18 36.5 11.5 19 34 M4 5.5 219 266 313 360 47 36.5 93.5 76 27.5 57.5 17.5 39 53.5 24 27.5 47 M5 6.5 118 177 236 295 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LLC5A 60 47 111.5 95 33.5 70.5 18 50 63.5 29 33.5 56 M6 7.5 130 189 248 307 75 59 131 114 33.5 70 27.5 62 64 34.5 27.5 56.5 M6 7.5 240 299 358 417 17-5-14 12 Series LVC 3 Port Standard Specifications Model

CUJ

x 28l M3 x 33l M3 x 38l 4 M2.5 x 14l 14 4 5 M3 x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10

15

+ Y2) CY1SG6-Z RJ0604N M4 x 0.7 M3 0.5 25 25 49 52 16 1 7.5 15 42 10 14 M6 x 0.75 46 11.5 7.5 19 66 15 CY1SG10-Z RJ0806HN M8 x 1 M4 x 0.7 M5 0.8 25 38 61 60 24 1 5.5 11 47 12.5 16.5 58 14 10 24 76 24 CY1SG15-Z RJ0806LN M8 x 1 M4 x 0.7 M5 0.8 30 50 76 75 30 1 5.5 11 62 12.5 17.5 73 14 9 23 92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10

Series VQ Base Mounted Metal Seal/Rubber Seal

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5